JPS62190852A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62190852A
JPS62190852A JP3419386A JP3419386A JPS62190852A JP S62190852 A JPS62190852 A JP S62190852A JP 3419386 A JP3419386 A JP 3419386A JP 3419386 A JP3419386 A JP 3419386A JP S62190852 A JPS62190852 A JP S62190852A
Authority
JP
Japan
Prior art keywords
film
silicon nitride
sidewall
manufacturing
nitride film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3419386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431176B2 (enExample
Inventor
Yutaka Hino
裕 日野
Takahiko Oma
隆彦 大麻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP3419386A priority Critical patent/JPS62190852A/ja
Publication of JPS62190852A publication Critical patent/JPS62190852A/ja
Publication of JPH0431176B2 publication Critical patent/JPH0431176B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP3419386A 1986-02-18 1986-02-18 半導体装置の製造方法 Granted JPS62190852A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3419386A JPS62190852A (ja) 1986-02-18 1986-02-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3419386A JPS62190852A (ja) 1986-02-18 1986-02-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62190852A true JPS62190852A (ja) 1987-08-21
JPH0431176B2 JPH0431176B2 (enExample) 1992-05-25

Family

ID=12407336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3419386A Granted JPS62190852A (ja) 1986-02-18 1986-02-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62190852A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008091497A (ja) * 2006-09-29 2008-04-17 Fujitsu Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008091497A (ja) * 2006-09-29 2008-04-17 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0431176B2 (enExample) 1992-05-25

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