JPS6217869B2 - - Google Patents

Info

Publication number
JPS6217869B2
JPS6217869B2 JP55059128A JP5912880A JPS6217869B2 JP S6217869 B2 JPS6217869 B2 JP S6217869B2 JP 55059128 A JP55059128 A JP 55059128A JP 5912880 A JP5912880 A JP 5912880A JP S6217869 B2 JPS6217869 B2 JP S6217869B2
Authority
JP
Japan
Prior art keywords
insulating film
silicon oxide
oxide film
wiring layer
interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55059128A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56155536A (en
Inventor
Nobuo Uematsu
Koichi Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP5912880A priority Critical patent/JPS56155536A/ja
Publication of JPS56155536A publication Critical patent/JPS56155536A/ja
Publication of JPS6217869B2 publication Critical patent/JPS6217869B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP5912880A 1980-05-02 1980-05-02 Semiconductor device Granted JPS56155536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5912880A JPS56155536A (en) 1980-05-02 1980-05-02 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5912880A JPS56155536A (en) 1980-05-02 1980-05-02 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS56155536A JPS56155536A (en) 1981-12-01
JPS6217869B2 true JPS6217869B2 (enExample) 1987-04-20

Family

ID=13104355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5912880A Granted JPS56155536A (en) 1980-05-02 1980-05-02 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56155536A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01105453U (enExample) * 1987-12-30 1989-07-17

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140757A (ja) * 1987-11-27 1989-06-01 Nec Corp 半導体入力保護装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431787B2 (enExample) * 1973-09-10 1979-10-09
JPS5375777A (en) * 1976-12-16 1978-07-05 Nec Corp Mos type semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01105453U (enExample) * 1987-12-30 1989-07-17

Also Published As

Publication number Publication date
JPS56155536A (en) 1981-12-01

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