KR930010981B1 - 반도체장치 - Google Patents
반도체장치 Download PDFInfo
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- KR930010981B1 KR930010981B1 KR1019900005982A KR900005982A KR930010981B1 KR 930010981 B1 KR930010981 B1 KR 930010981B1 KR 1019900005982 A KR1019900005982 A KR 1019900005982A KR 900005982 A KR900005982 A KR 900005982A KR 930010981 B1 KR930010981 B1 KR 930010981B1
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Abstract
내용 없음.
Description
제1a도는 본 발명의 제1실시예에 따른 본딩패드부의 구조를 나타낸 단면도.
제2b도는 본 발명의 제2실시예에 따른 본딩패드부의 구조를 나타낸 단면도.
제2도는 종래의 본딩패드의 구조를 나타낸 단면도.
제3도는 본 발명의 제1, 제2실시예 및 종래예에 있어서 초음파본딩을 행한 때의 크랙발생빈도 및 전기적 리크발생빈도의 상대비교도.
* 도면의 주요부분에 대한 부호의 설명
101, 201 : 실리콘기판 102,202 : 필드 산화막
103 : 폴리실리콘막(제1층의 게이트재료) 104 : ONO 절연막
1051: 폴리실리콘막
1052: MoSi막(제2층의 게이트재료)
106, 203 : 장벽금속층 107, 204 : 금속전극층
108 : 층간절연막 109, 205 : 패시베이션막
110 : 폴리실리콘막(제3층의 재료) 120, 206 : 본딩와이어
[산업상의 이용분야]
본 발명은 반도체장치에 관한 것으로, 특히 본딩패드의 구조에 관한 것이다.
[종래의 기술 및 그 문제점]
일반적으로, 반도체기판내에 형성된 소자의 전기적 특성을 외부로 취출하기 위해 소자들을 결선하고 있는 전극배선에 금속선을 본딩시키는 부분을 본딩패드라 한다.
이하, 도면을 참조해서 본딩패드의 구조를 설명한다.
제2도는 종래의 본딩패드의 구조를 나타낸 단면도로서, 이 제2도에 도시된 바와같이 Si 기판(201)상에 형성된 절연산화막(202 ; 필드산화막)상에 본딩패드를 형성한다. 본딩패드는 통상 배선구조와 동일하기 때문에 장벽금속층(203) 및 금속전극(204)으로 구성되고, 그 주위에 패시베이션(passivation)막(205)이 형성되어 있다. 그리고 이 본딩패드(203,204)에 와어어(206)를 본딩한다. 이 경우, 장벽금속층(203)으로는 예컨대 Ti층이 사용되고, 금속전극(204)으로는 Al 또는 Al합금(Al-Si-Cu 등)이 사용된다.
그런데, 상기와 같은 구조에서는 본딩패드(203,204)과 실리콘기판(201)간에 존재하는 절연산화막(202)의 기계적인 강도가 부족하기 때문에 와이어본딩할 때 이 절연산화막(202)에 크랙(207)이 발생하게 되어, 반도체장치를 동작시키기 위해 외부로부터 본딩패드(203,204)와 실리콘기판(201)간에 리크(leak)전류가 생길 우려가 있었다.
즉, 상기한 바와같은 종래의 반도체장치의 본딩패딩구조에서는, 본딩패드와 반도체기판간에 존재하는 막의 기계적 강도가 낮기 때문에 와이어본딩할 때 크랙이 발생하게 됨으로써, 리크전류가 생겨 반도체장치의 신뢰성이 저하된다고 하는 문제가 있었다.
[발명의 목적]
이에 본 발명은 상술한 문제를 고려해서 발명된 것으로, 본딩패드부의 전기적 내입을 향상시켜 신뢰성 높은 반도체장치를 제공하고자 함에 그 목적이 있다.
[발명의 구성]
상기 목적을 달성하기 위해 본 발명의 반도체장치는, 반도체기판과, 이 반도체기판상에 형성된 절연막, 이 절연막상에 형성되어 본딩패드로서 이용되는 금속전극층 및, 이 금속전극층에 접속된 본딩와이어를 갖춘 반도체장치에 있어서, 상기 절연막과 상기 금속전극층간에 제1폴리실리콘막과, 제1산화막과 이 제1산화막상에 형성된 질화막 및 이 질화막상에 형성된 제2산화막을 구비한 복합막 및, 이 복합막상에 형성된 제2폴리실리콘막을 더 갖춘 것을 특징으로 한다.
[작용]
상기와 같이 구성된 본 발명의 본딩패딩구조에서는, 반도체기판과 금속전극층간에 산화막 및 질화막으로 구성된 전기적 내압성이 높은 경질(硬質)의 복합막과 연질(軟質)의 폴리실리콘막을 설치함으로써, 기계적 강도가 향상된다.
[실시예]
이하, 도면을 참조해서 본 발명의 실시예를 상세히 설명한다.
제1도(a)는 본 발명의 제1실시예에 따른 본딩패드부의 구조를 나타낸 단면도이다. 이 제1도(a)에 도시된 바와같이 본 발명의 제1실시예에 다른 본딩패드부는 예컨대 EPROM(Electrically Programmable Read Only Memory ; 전기적으로 프로그램이 가능한 독출전용 메모리)과 같은 2층 게이트구조의 디바이스로서, 실리콘기판(101)상에 절연산화막(102 ; 필드산화막)이 예컨대 5000Å정도 형성되어 있고, 그 상부에 EPROM의 부유게이트(제1층의 게이트재료)로 사용되는 폴리실리콘막(103)이 예컨대 2000Å정도 형성되어 있다. 더욱이, 그 상부에 폴리실리콘층간막으로서 산화막-질화막-산화막(Oxide-Nitride-Oxide)의 3층 절연막(104 ; 이하, ONO 절연막이라 칭한다)이 형성되어 있고, 그 상부에 EPROM의 제어게이트(제2층의 게이트재료)로서 사용되는 폴리실리콘(1051) 및 MoSi막(1052)으로 이루어진 폴리사이드막(105)이 5000Å 정도 형성되어 있다.
이 폴리사이드막(105)상에 설치된 접속구멍(contact hole)에 Ti로 이루어진 장벽금속층(106)이 500Å정도 형성되고, 그 상부에 Al로 이루어진 금속전극층(107)이 8000Å정도 형성된 2층 금속배선구조로 되어 있다. 본딩패드는 이 장벽금속층(106) 및 금속전극층(107)으로 구성된다. 또, 이 본딩패드(106,107)를 둘러싸도록 층간절연막(108) 및 패시베이션막(109)이 설치되어 있고, 이 본딩패드(106,107)에 와이어(120)가 접속되어 있다. 이 경우, 층간절연막(108)으로서는 예컨대 PSG막 또는 BPSG막 등이 사용되고, 패시베이션막(109)으로는 PSG막 또는 SiN막이 사용되고 있다.
이 실시예의 본딩패드구조에 의하면, 2층의 폴리실리콘층(103,1051)간에 사용된 ONO 절연막(104)은 경질의 막으로서, 이 막에 연질의 폴리실리콘막을 조합시킴으로써 본딩패드(106,107)와 기판(101)간의 기계적 강도를 보다 높일 수 있게 되고, 그에 따라 크랙이 발생할 위험성을 억제하여 리크전류를 방지할 수 있게 된다. 또, ONO 절연막(104)은 절연내압이 매우 높은 막으로서, 가령 크랙이 아랫쪽의 산화막에 발생하더라도 ONO막(104)에는 크랙이 발생하지 않게 되므로, 이 ONO 절연막(104)에 의해 절연성을 확보할 수 있게 된다. 따라서, 신뢰성 높은 반도체장치를 얻을 수 있게 된다.
또, 본딩패드(106,107)의 아래에 2층의 폴리실리콘층(103,1051)을 적층함으로써 막두께를 두껍게 해서 기계적 강도를 증가시켜 와이어본딩시에 크랙발생을 방지함과 더불어 크랙으로의 수분이나 가동이온(可動 ion)등의 불순물이 침입하는 것을 방지할 수 있게 된다.
제1도(b)는 본 발명의 제2실시예에 따른 본딩패드부의 구조를 나타낸 단면도이다. 이 제1도(b)에 도시된 바와같이 본 발명의 제2실시예에 따른 본딩패드부는 제1실시예의 본딩패드부의 기계적 강도를 더욱 증대시킨 것으로, 실리콘기판(101)상에 순차적으로 적층된 절연산화막(102 ; 필드산화막), 폴리실리콘막(103), ONO 절연막(104), MoSi 폴리사이드막(105)까지는 제1실시예의 구조와 동일하지만, 더욱이 그 상부에 PSG막 또는 BPSG막으로 이루어진 층간절연막(108)이 형성되며, 이 층간절연막(108)의 상부에 제3층의 재료로서 예컨대 폴리실리콘층(110)이 1000Å정도 형성되며 그 위에 Ti로 이루어진 장벽금속층(106) 및 Al로 이루어진 금속전극층(107)의 2층의 금속배선층이 형성된 구조로 되어 있다.
본 발명의 제2실시예에서는, 제1실시예와 마찬가지로 2층의 연질의 폴리실리콘층(103,1051)과 이들 층간에 사용된 결질의 ONO 절연막(104)의 조합에 의해 본딩패드(106,107)와 기판(101)간의 기계적 강도를 높일 수 있게 되고, 그에 따라 크랙발생의 위험성을 억제하여 리크전류를 방지할 수 있게 된다. 또, 전기적 내압성이 높은 막인 ONO 절연막(104)에 의해 확보할 수 있게 된다. 따라서, 신회성 높은 반도체 장치를 얻을 수 있게 된다.
또, 본딩패드의 아래에 2층의 폴리실리콘층(103,1051)을 적층하고, 그 위에 층간절연막(108)과 그 상부의 폴리실리콘층(110)을 설치함으로써, 막두께를 두껍게 해서 기계적 강도를 보다 높일 수 있게 되고, 그에 다라 와이어본딩시의 크랙발생을 방지할 수 있게 된다.
제3도는 본 발명의 제1, 제2실시예 및 종래예에 있어서 초음파본딩을 행한 때의 본딩패드와 반도체기판간에 존재하는 막에서의 크랙발생빈도 및 본딩패드에 전압을 인가한 때 본딩패드와 반도체기판간에서 생기는 전기적 리크의 발생빈도의 상대비교를 나타낸 도면이다. 종축은 크랙발생 및 전기적 리크발생의 빈도를 나타내고 있는바, 종래예를 1로 하였다. 제1실시예의 경우, 크랙발생빈도는 0.5로 되어 종래예의 반으로 감소되고, 전기적 리크의 발생빈도는 0이다. 제2실시예의 경우에서는, 크랙발생빈도 및 전기적 리크발생빈도가 모두 0으로 되어 있다. 이로부터, 본 발명의 실시예에 의하면 종래예에 비해 본딩패드부의 전기적 내압이 높아지는 것을 알 수 있으며, 특히 제2실시예에서는 전기적 내압이 보다 높아지는 것을 알 수 있다. 이 제2실시예에 따른 본딩패드구조에서는, 상기 제1실시예에 비해 층간절연막(108)과 제3층의 재료인 폴리실리콘막(110)이 설치됨으로써 막두께가 증가되어 보다 전기적 내압이 높아져서 신뢰성 높은 반도체장치를 얻을 수 있게 된다.
본 발명의 특징은, 특허청구의 범위 제1항에 기재된 바와같이 본딩패드의 아래에 질화막을 2개의 산화막으로 협지된 구조의 복합막을 설치하고, 더욱이 이 복합막을 2개의 폴리실리콘막으로 협지한 점에 있다. 상기 제1및 제2실시예는, 본 발명의 EPROM에 적용하고, EPROM의 부유게이트 형성공정 및 제어게이트 형성공정과 동일한 공정에서 상술한 2개의 폴리실리콘막을 형성하고 있다. 따라서, 상기 제1 및 제2실시예에 의하면, 공정을 추가하지 않고 본 발명을 실시할 수 있게 된다. 그렇지만, 본 발명은 EPROM만을 대상으로 하는 것이 아니라 본딩패드를 구비한 반도체장치 전반에 적용할 수 있는 것이다. 예컨대, 실리콘게이트 MOS트랜지스터를 갖춘 반도체장치에 본 발명을 적용하는 경우는, 상술한 2개의 폴리실리콘막의 한쪽을 트랜지스터의 게이트전극 형성공정과 동일한 공정에서 형성하는 것이 가능하다. 또, 폴리실리콘배선을 갖춘 반도체장치에 본 발명을 적용하는 경우는, 상술한 2개의 폴리실리콘막의 한쪽을 배선형성공정과 동일한 공정에서 형성하는 것이 가능하다. 또, 폴리실리콘층이 없는 반도체장치에 본 발명을 적용하는 경우는, 상술한 2개의 폴리실리콘막을 형성하기 위한 공정을 추가하면 좋다.
또한 상술한 실시예에서는 제1층, 제2층의 게이트재료 및 제3층의 재료가 폴리실리콘 또는 폴리사이드인 경우에 대해 설명했지만, 본 발명은 이에 한정되지 않는다. 더욱이, 제1층, 제2층, 제3층의 재료가 폴리사이드구조와 같이 2종류 이상의 층의 적층구조로 되어 있어서 좋다.
한편, 본 발명의 특허청구의 범위의 각 구성요건에 병기한 참조부호는 본 발명의 이해를 용이하게 하기 위한 것으로서, 본 발명의 기술적 범위를 도면에 도시된 실시예에 한정할 의도로 병기한 것은 아니다.
[발명의 효과]
이상에서 설명한 바와같이 본 발명의 본딩패드구조에 의하면, 본딩패드와 기판의 전기적 내압성을 높여 신뢰성 높은 반도체장치를 얻을 수 있게 된다.
Claims (3)
- 반도체기판(101)과, 이 반도체기판(101)상에 형성된 절연막(102), 이 절연막(102)상에 형성되어 본딩패드로서 이용되는 금속전극층(106,107) 및, 이 금속전극층(106,107)에 접속된 본딩와이어(120)를 갖춘 반도체장치에 있어서, 상기 절연막(102)과 상기 금속전극층(106,107)간에 제1폴리실리콘막(103)과, 제1산화막과 이 제1산화막상에 형성된 질화막 및 이 질화막상에 형성된 제2산화막을 구비한 복합막(104) 및, 이 복합막(104)상에 형성된 제2폴리실리콘막(1051)을 더 갖춘 것을 특징으로 하는 반도체장치.
- 제1항에 있어서, 상기 금속전극층(106,107)과 상기 제2폴리실리콘막(1051)간에 고용된 금속막 또는 고융점 금속실리사이드로 이루어지는 막(1052)을 더 갖춘 것을 특징으로 한느 반도체장치.
- 제2항에 있어서, 상기 막(1052)과 상기 금속전극층(106,107)간에 층간절연막(108)을 더 갖춘 것을 특징으로 하는 반도체장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP01-105912 | 1989-04-27 | ||
JP1105912A JPH02285638A (ja) | 1989-04-27 | 1989-04-27 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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KR900017136A KR900017136A (ko) | 1990-11-15 |
KR930010981B1 true KR930010981B1 (ko) | 1993-11-18 |
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KR1019900005982A KR930010981B1 (ko) | 1989-04-27 | 1990-04-27 | 반도체장치 |
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EP (1) | EP0395072B1 (ko) |
JP (1) | JPH02285638A (ko) |
KR (1) | KR930010981B1 (ko) |
DE (1) | DE69033229T2 (ko) |
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-
1989
- 1989-04-27 JP JP1105912A patent/JPH02285638A/ja active Pending
-
1990
- 1990-04-24 US US07/513,973 patent/US5036383A/en not_active Expired - Lifetime
- 1990-04-26 EP EP90107998A patent/EP0395072B1/en not_active Expired - Lifetime
- 1990-04-26 DE DE69033229T patent/DE69033229T2/de not_active Expired - Fee Related
- 1990-04-27 KR KR1019900005982A patent/KR930010981B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0395072A3 (en) | 1991-07-17 |
JPH02285638A (ja) | 1990-11-22 |
DE69033229T2 (de) | 1999-12-16 |
DE69033229D1 (de) | 1999-09-09 |
EP0395072B1 (en) | 1999-08-04 |
EP0395072A2 (en) | 1990-10-31 |
US5036383A (en) | 1991-07-30 |
KR900017136A (ko) | 1990-11-15 |
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