JPS6217869B2 - - Google Patents
Info
- Publication number
- JPS6217869B2 JPS6217869B2 JP55059128A JP5912880A JPS6217869B2 JP S6217869 B2 JPS6217869 B2 JP S6217869B2 JP 55059128 A JP55059128 A JP 55059128A JP 5912880 A JP5912880 A JP 5912880A JP S6217869 B2 JPS6217869 B2 JP S6217869B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- silicon oxide
- oxide film
- wiring layer
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5912880A JPS56155536A (en) | 1980-05-02 | 1980-05-02 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5912880A JPS56155536A (en) | 1980-05-02 | 1980-05-02 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56155536A JPS56155536A (en) | 1981-12-01 |
| JPS6217869B2 true JPS6217869B2 (enrdf_load_stackoverflow) | 1987-04-20 |
Family
ID=13104355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5912880A Granted JPS56155536A (en) | 1980-05-02 | 1980-05-02 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56155536A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01105453U (enrdf_load_stackoverflow) * | 1987-12-30 | 1989-07-17 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140757A (ja) * | 1987-11-27 | 1989-06-01 | Nec Corp | 半導体入力保護装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5431787B2 (enrdf_load_stackoverflow) * | 1973-09-10 | 1979-10-09 | ||
| JPS5375777A (en) * | 1976-12-16 | 1978-07-05 | Nec Corp | Mos type semiconductor device |
-
1980
- 1980-05-02 JP JP5912880A patent/JPS56155536A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01105453U (enrdf_load_stackoverflow) * | 1987-12-30 | 1989-07-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56155536A (en) | 1981-12-01 |
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