JPS6217860B2 - - Google Patents

Info

Publication number
JPS6217860B2
JPS6217860B2 JP55083203A JP8320380A JPS6217860B2 JP S6217860 B2 JPS6217860 B2 JP S6217860B2 JP 55083203 A JP55083203 A JP 55083203A JP 8320380 A JP8320380 A JP 8320380A JP S6217860 B2 JPS6217860 B2 JP S6217860B2
Authority
JP
Japan
Prior art keywords
region
semiconductor substrate
conductivity type
film
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55083203A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577943A (en
Inventor
Tsutomu Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8320380A priority Critical patent/JPS577943A/ja
Publication of JPS577943A publication Critical patent/JPS577943A/ja
Publication of JPS6217860B2 publication Critical patent/JPS6217860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP8320380A 1980-06-19 1980-06-19 Manufacture of semiconductor integrated circuit device Granted JPS577943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8320380A JPS577943A (en) 1980-06-19 1980-06-19 Manufacture of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8320380A JPS577943A (en) 1980-06-19 1980-06-19 Manufacture of semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS577943A JPS577943A (en) 1982-01-16
JPS6217860B2 true JPS6217860B2 (cg-RX-API-DMAC10.html) 1987-04-20

Family

ID=13795762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8320380A Granted JPS577943A (en) 1980-06-19 1980-06-19 Manufacture of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS577943A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6294760U (cg-RX-API-DMAC10.html) * 1985-12-05 1987-06-17

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616510B2 (ja) * 1986-08-06 1994-03-02 日本電気株式会社 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6294760U (cg-RX-API-DMAC10.html) * 1985-12-05 1987-06-17

Also Published As

Publication number Publication date
JPS577943A (en) 1982-01-16

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