JPS6216415B2 - - Google Patents

Info

Publication number
JPS6216415B2
JPS6216415B2 JP9952880A JP9952880A JPS6216415B2 JP S6216415 B2 JPS6216415 B2 JP S6216415B2 JP 9952880 A JP9952880 A JP 9952880A JP 9952880 A JP9952880 A JP 9952880A JP S6216415 B2 JPS6216415 B2 JP S6216415B2
Authority
JP
Japan
Prior art keywords
master
mask
pattern
alignment
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9952880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723940A (en
Inventor
Kazuo Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP9952880A priority Critical patent/JPS5723940A/ja
Publication of JPS5723940A publication Critical patent/JPS5723940A/ja
Publication of JPS6216415B2 publication Critical patent/JPS6216415B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9952880A 1980-07-21 1980-07-21 Master-mask manufacturing device and mask plate Granted JPS5723940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9952880A JPS5723940A (en) 1980-07-21 1980-07-21 Master-mask manufacturing device and mask plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9952880A JPS5723940A (en) 1980-07-21 1980-07-21 Master-mask manufacturing device and mask plate

Publications (2)

Publication Number Publication Date
JPS5723940A JPS5723940A (en) 1982-02-08
JPS6216415B2 true JPS6216415B2 (zh) 1987-04-13

Family

ID=14249720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9952880A Granted JPS5723940A (en) 1980-07-21 1980-07-21 Master-mask manufacturing device and mask plate

Country Status (1)

Country Link
JP (1) JPS5723940A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795515B2 (ja) * 1987-07-24 1995-10-11 沖電気工業株式会社 ウエハアライメント装置及びそれに用いるアライメントマ−ク

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50116175A (zh) * 1974-02-25 1975-09-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50116175A (zh) * 1974-02-25 1975-09-11

Also Published As

Publication number Publication date
JPS5723940A (en) 1982-02-08

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