JPS50116175A - - Google Patents
Info
- Publication number
- JPS50116175A JPS50116175A JP2148474A JP2148474A JPS50116175A JP S50116175 A JPS50116175 A JP S50116175A JP 2148474 A JP2148474 A JP 2148474A JP 2148474 A JP2148474 A JP 2148474A JP S50116175 A JPS50116175 A JP S50116175A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2148474A JPS50116175A (zh) | 1974-02-25 | 1974-02-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2148474A JPS50116175A (zh) | 1974-02-25 | 1974-02-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS50116175A true JPS50116175A (zh) | 1975-09-11 |
Family
ID=12056237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2148474A Pending JPS50116175A (zh) | 1974-02-25 | 1974-02-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS50116175A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5723940A (en) * | 1980-07-21 | 1982-02-08 | Nec Corp | Master-mask manufacturing device and mask plate |
JPS5960439A (ja) * | 1982-09-30 | 1984-04-06 | Fujitsu Ltd | フオト・マスク |
-
1974
- 1974-02-25 JP JP2148474A patent/JPS50116175A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5723940A (en) * | 1980-07-21 | 1982-02-08 | Nec Corp | Master-mask manufacturing device and mask plate |
JPS6216415B2 (zh) * | 1980-07-21 | 1987-04-13 | Nippon Electric Co | |
JPS5960439A (ja) * | 1982-09-30 | 1984-04-06 | Fujitsu Ltd | フオト・マスク |
JPH0473576B2 (zh) * | 1982-09-30 | 1992-11-24 |