JPS50116175A - - Google Patents

Info

Publication number
JPS50116175A
JPS50116175A JP2148474A JP2148474A JPS50116175A JP S50116175 A JPS50116175 A JP S50116175A JP 2148474 A JP2148474 A JP 2148474A JP 2148474 A JP2148474 A JP 2148474A JP S50116175 A JPS50116175 A JP S50116175A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2148474A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2148474A priority Critical patent/JPS50116175A/ja
Publication of JPS50116175A publication Critical patent/JPS50116175A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2148474A 1974-02-25 1974-02-25 Pending JPS50116175A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2148474A JPS50116175A (zh) 1974-02-25 1974-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2148474A JPS50116175A (zh) 1974-02-25 1974-02-25

Publications (1)

Publication Number Publication Date
JPS50116175A true JPS50116175A (zh) 1975-09-11

Family

ID=12056237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2148474A Pending JPS50116175A (zh) 1974-02-25 1974-02-25

Country Status (1)

Country Link
JP (1) JPS50116175A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723940A (en) * 1980-07-21 1982-02-08 Nec Corp Master-mask manufacturing device and mask plate
JPS5960439A (ja) * 1982-09-30 1984-04-06 Fujitsu Ltd フオト・マスク

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723940A (en) * 1980-07-21 1982-02-08 Nec Corp Master-mask manufacturing device and mask plate
JPS6216415B2 (zh) * 1980-07-21 1987-04-13 Nippon Electric Co
JPS5960439A (ja) * 1982-09-30 1984-04-06 Fujitsu Ltd フオト・マスク
JPH0473576B2 (zh) * 1982-09-30 1992-11-24

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