JPS6216019B2 - - Google Patents

Info

Publication number
JPS6216019B2
JPS6216019B2 JP56010581A JP1058181A JPS6216019B2 JP S6216019 B2 JPS6216019 B2 JP S6216019B2 JP 56010581 A JP56010581 A JP 56010581A JP 1058181 A JP1058181 A JP 1058181A JP S6216019 B2 JPS6216019 B2 JP S6216019B2
Authority
JP
Japan
Prior art keywords
wafer
support rod
orientation flat
carrier
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56010581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57126128A (en
Inventor
Kyoshi Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56010581A priority Critical patent/JPS57126128A/ja
Publication of JPS57126128A publication Critical patent/JPS57126128A/ja
Publication of JPS6216019B2 publication Critical patent/JPS6216019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/00—
JP56010581A 1981-01-27 1981-01-27 Moving method for wafer Granted JPS57126128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56010581A JPS57126128A (en) 1981-01-27 1981-01-27 Moving method for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56010581A JPS57126128A (en) 1981-01-27 1981-01-27 Moving method for wafer

Publications (2)

Publication Number Publication Date
JPS57126128A JPS57126128A (en) 1982-08-05
JPS6216019B2 true JPS6216019B2 (OSRAM) 1987-04-10

Family

ID=11754204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56010581A Granted JPS57126128A (en) 1981-01-27 1981-01-27 Moving method for wafer

Country Status (1)

Country Link
JP (1) JPS57126128A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045031A (ja) * 1983-08-22 1985-03-11 Tomuko:Kk 自動ウェ−ハ移換機
JPH05291379A (ja) * 1992-04-10 1993-11-05 Kaijo Corp 半導体基板用搬送装置及び半導体基板処理器並びに自動処理装置
JP6030686B2 (ja) 2015-03-26 2016-11-24 本田技研工業株式会社 エンジン駆動発電機

Also Published As

Publication number Publication date
JPS57126128A (en) 1982-08-05

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