JPS57126128A - Moving method for wafer - Google Patents

Abstract

PURPOSE:To shift the wafers with ease and automatically while arranging the directions by disposing a movable and rotatable orientation flat alignment section between supporting bars to which grooves are formed symmetrically and interlocking the orientation flat aligment section with a guide section and a pusher section. CONSTITUTION:A frame-shaped boat 46 is placed on the upper section of a fixed stand 5, a carrier housing a plurality of the wafers 48 is mounted to a holder 18, and a stage 6 is moved and positioned. The holder 18 is turned and made parallel with a guide supporting bar 19, the orientation flat alignment section 34 is elevated while pusher grooves sections 45 are inserted among guide grooves 20, the guide section and the holder are rotated simultaneously, and the wafers 48 are dropped into the pusher grooves 45. The grooves 45 are pulled out and the wafers 48 are positioned onto the conforming section 34, a shaft 35 is turned and an orientation flat alignment section 47 is arranged onto the positioning section 34, the positioning section 34 is dropped, and the wafers 48 are housed in a holding groove of the boat 46. When the wafers are shifted to the carrier from the upper section of the boat, on the contrary, the guide grooves 20 are made horizontal, and the wafers 48 are elevated by the positioning section 34, pushed into the carrier by the pusher grooves 45 and housed.