JPS6045031A

JPS6045031A - Automatic wafer transfer machine

Info

Publication number: JPS6045031A
Application number: JP58153560A
Authority: JP
Inventors: Yasuo Yatabe; 谷田部　保夫; Mitsuru Tachikawa; 刀川　充; Yuichi Teshigawara; 勅使河原　雄一; Koichi Otsubo; 大坪　弘一
Original assignee: TOMUKO KK
Current assignee: TOMUKO KK
Priority date: 1983-08-22
Filing date: 1983-08-22
Publication date: 1985-03-11
Also published as: JPH0455335B2

Abstract

PURPOSE:To transfer wafers safely without damaging or contaminating the wafers, and moreover to curtail the hours of transfer, and to improve efficiency of transfer by a method wherein the respectively specified table, holders, holder rotating devices, guides, supporting rack frame, guide elevator, pusher, pusher elevator, etc. are provided. CONSTITUTION:A first and a second carriers 40, 50 formed with pusher holes and wafer engaging grooves, a table 4 formed with a hole of nearly the same shape with the pusher hole, a pair of holders 1a, 1b having first main grooves 201 enabled to insert and to put in place wafers 101-103 and second main grooves 202 enabled to pass only wafers positioning at the specified pitch positions on the confronting faces thereof, holder rotating devices 8a, 8b to select the main grooves mentioned above by rotating the holders, a pair of guides 2a, 2b positioning over the holders and having third main grooves 203 on the confronting faces thereof enabled to be inserted with the wafer, a supporting rack frame to support the holders and the guides, a guide elevator to bring up and down the guides, a pusher 5 to bring up and down the wafers in the carriers, a pusher elevator, a driving device to transfer relatively the table, the supporting rack frame and the pusher, etc. are provided.

Description

[Detailed description of the invention]

（利用分野）本允朗は、自動ウェーハ移１勢１１Ｗ１こ１ν１リろ｝
）のであり、特に、一方のキ鬼・リノ′内１；−．　ｉ
ｔうろ一定の１゛゛ソヂで収納されたウェーハを、ｆの
ＩＩ　｛ｉ’ｌ　：ｌ．／．−　１．Ｌｌ　／’　ｎ　
｛６のピッチｒ　｛ＩＩ！／“ｊの−１１・リノノ内へ
移ｊ（４，　、＋ｒ−＋＋′ｙ、納りる自り」つｉ−ハ
移換（幾に関づるものＣある。（（）（来１ｋ　ｔｒｉ　）１′ど冊本製）’ｅｊ　、’、１稈においては、半宥体
つ」−ハに種ノＺの熱処理や化学処理、洗１鋒などが実
施されることは周知のとおりである。このＪ、うに、ウ
ー［−ハに台秤舛（埋を煎り場合、従来は、該処理の能
率をＬＬかるＩこめに、該つ１−ハを１ニドリア内に多
数１１ゾ納しＣ行イｊっでいる。該キ１７リアは、前記ウェーハ収納用の溝が一定ビツブ
Ｃ形成され（いるつ１−ハ収納用の箱０ある。前記：Ｉ
Ｉ・リノ７内に収納りる前記ウェーハは、ｔするべく多
く収納した方が収納の効率が良いのは当然（−ｄうる。。しかし、処理の内容によっては、たどえＬ；ｒ　、熱処
理を扉１りか１ツブ−ング処叩を／ｊ［！ｉ−ＪかにＪ
：つては、該ダ１即のｉｌ常な効果を得るＩこめに、前
記キャリｊ′内（、二１１ゾ納され！ご各々のつ〕−ハ
の間隔を′？シならＵることが必要（・（１りる。例えば、宍ハ処理は、イの効；ｆ′イ１１りる１、＝め
につ１−ハの間隔を狭＜　シ（１’ｉ　ｌ、（い、−１
ｊ　、　ＣＶ　ｒ’＋　Ｘｓ−「ツブング処狸なとは、
これらの処理のむらへ・防ぐために、前記つ工−ハの間
隔を熱処理Ｉｔ？　ｋ：化しＣ人きくして行なうのであ
る、。また、前５１１シたにうな夕ＬＩ叩の３ひいによ−）（
、前記キ鵞アリアの材質も変え４「（〕れＩＩ１．なｉ
−、ｆ、−；い、、　”）　ｉｌす、熱処理はつ」−−
ハを石英製等の−Ｉ＋・すｊ′（：収納しく行ない、一
方、コツプ〕／グ９ハ理；、１前記つ１−八をデノ［１
ン等の樹脂１１１１．　ｔ・リノ′（、二１１シ納１ｙ
　？、　（ｉなうの’Ｃ１ＩＦ）る。したがっ（、つ「−ハ’ｅ：　Ａ’＞イ）９ハ狸１稈か
ら別の処理］’ｆ？へ移り場合、ある物１”ｉ　Ｉ−’
、　、ノ、り形成２＼れｌ、−第１の一１ニトリノア内
に、あるピッｆ？形成さ１＋、　／、ｉｉ、％部に配直
されＩこウ−(Application field) Masaaki Moto is an automatic wafer transfer system with 1 unit of 11W, 1K, 1ν, 1Rero}
), and in particular, one of the demons, Reno'uchi 1;-. i
A wafer housed at a constant 1゛゛ width is placed at f's II {i'l :l. /． -1. Ll/'n
{6 pitch r {II! / "transfer to j's -11・rinono j (4, , +r-++'y, it will fit") i-ha transfer (there is C related to number. (()(next 1k tri ) It is well known that heat treatment, chemical treatment, washing, etc. of seeds are carried out on 1 culm, 1 culm, etc. .When roasting this J, sea urchin, woo[-ha, it was conventionally used to increase the efficiency of the processing by placing a large number of 1-ha in 1 nidoria and placing 11 zo in one nidoria. The rear of the box 17 has a groove for storing the wafer formed in a certain bit C (there is a box 1 for storing the wafer).
Of course, it is more efficient to store as many wafers as possible in the I/Rino 7 (-d). However, depending on the processing content, Apply heat treatment to one door or one door/j[!i-J CrabJ
:In order to obtain the usual effect, we can change the distance between the two spaces in the carrier j' (211 and 211) to 1 and 2. Necessary (・(1 Rir.) For example, Shishiha processing is the effect of A; 1
j, CV r'+
In order to prevent unevenness in these treatments, the spacing between the above-mentioned tools is heat treated. K: It is done in accordance with C people. Also, the 3rd time I hit LI on the previous 511 days-)(
, the material of the above-mentioned Aria was also changed.
-,f,-;I,,")il,heat treatment"--
-I+・Sj' (: Store it properly, while holding it)/G9H principle;, 1.
Resin 1111. T. Reno' (, 211, 1y
? , (inow'C1IF)ru. Therefore, if we move to (, tsu ``-ha'e: A'>a) 9ha raccoon dog 1 culm to another process]'f?, then a certain thing 1''i I-'
, , ノ, ri formation 2\rel, - in the first 11 nitrinoa, there is a certain pf? Formed and rearranged to 1+, /, ii, % part Ik-

【−ハを、別の物？！（１，−、！、（・
）形成されＩこ他のキレリア内１＝、別のヒップで・形
％、！ｊさ４１゜た）ｉ部に移換える１・■口をｉ’−
７ｆ、ｔわ／ｉ　Ｃ１ｔＬ　Ｌｌ、’　１．ｒらイ１゛
イ。前述の操作の従来例は、ピ・〕／レッＥ　Ｊ：（ｊイ・
−用い（、人が−４（枚つ１−ハを直接ｆｒ行なうもの
（゛あ−）　１ニー、　、、　ｉＦ）るい（Ｊ、つ１−
ハの間隔は一定Ｃ１１−トリアの４４７’ｉだ【）を変
えたい、１易含は、該つ１−ハが水土１ｉ向に１１Ｖ、
納されＩこ状態にしＣ１第１の＝ｌ：　ｔ７リノ′に第
２の１１１リノ′を各々のつ［−ハ挿入面どう１）が対
向りるように密着させ、第２の二１−レリアがトにくる
ようにしＣ１該つ（−八を第１の一１′ＩＩリノ′から
第２の１１？リアへ移Φ）ノさけるものＣあっｌこ。この場合の操作も人が該Ｖニドリアを干ぐ持−）Ｕ行／
、ｉつ（いた。しかし、前）！１３の１に来例では、つ丁−ハを第１の
Ｆ　１７す７ノから第２のキャリアへ移換える時、該つ
Ｔ−ハを汚１ノたり、；Ｌｌ、：該ウノーハが該第１＃
Ｊ、び第２の−Ｐ　ｔ＋リアとＩｆｆ　Ｆｌ！ｌＩ／て
、該つＴ−ハに傷が（＝Ｊいｌこり、欠ｌＪたり、ある
いは該つＪ−ハを床面に落とし、破ｒ１りる等の欠点が
あった。特に、第１および第２のキ１ｔリアを、各々のつ謬−ハ
ト０人面どうしが対向づるように密着させる操作の場合
は、傷やアーツビング等を／１１；、よ１；　１５）塵
をＲ１しＣつＪ、−７の発１１−する原因と％　”−（
いＩこ。また、人が直接操作をりるのＣリドｔ２が悪く
、’ｌ’　Ｑ　（ホ’ＦＪ　（Ｔ−費の」−胃等の欠点
ｔ＞　ｉｔ’＋　−）　／Ｊ。（目的）本発明は、前述の欠点を除、ＩＸＪろため１．’：　／
ｉされたものであり、その目的は、第１のＩＩ・リノ′
内（、“第１のピッチ”（聞直されたつ■−ハを、第２
の１１！リア内に、前記第１のピッＪ’　Ｕ＞　’Ｉｔ
’　ＫＱ　ｌｒＸ：１．／、：　ｔよｆｆ１ｌｚ数分の
１のピッチで配列さ１しるように移１！／Ｉえる場合に
おいて、該つ１−ハを（τ、１つ１．Ｊ　／、−リ、汚
しＩ、：すすることなく安全に移換２４１行４−・い、
かつ該移１（ｒ・えの時間４ｇ′）、ｉ７縮し、りｌを
１４＜・１〈）の１．“好ｊｉ；：）　／ｆ白動つ１−
ハ１５５挽間を提供りる１、′・に（（すろ、。（概要）前記の１］的を達成りる１１］めに、本発明（よ、−ε
の底面にプツシｐ穴ｉ３よびつＩ−−ハＩｆｉ　Ｉｆ−
、ｌ＋’Ｔを形成した第１のキ１１リアと、ての庭１面
（、−ｆツ〕ノド穴、ｌｉ　Ｊ、びつｉ−ハ係１１溝を
形成した第２のキトすｊ／と、前記ＩＩ・リッツをのｌ
、該キ！・リア底面に形成された／フシ１／穴と番よぼ
同形状の穴を形成１ノだテーブルと、ぞの３・１向而に
該ウェーハを挿入、係止できる第′１の１．　！Ｍおよ
び特定のヒップ（１′／直にａ＞るつ１−ハｌどｔＪを
通過できる第２の主）ｈを１１する１組のホルタと、該
ホルタを回転さく！−（前記主溝を選１１りりるホルダ
回転装置と、該ホルダの１方に位巧し、ｒの対向面に該
つ■−ハを挿入でさる第３の主佑をイｊづる１相のガイ
ドと、前記ホルダおよび前記ガイドを支持する支持架枠
ど、該ガイドを上昇またはト降させるガイド昇降装胃と
、前記テーブルを下りに位置し、：１１ノリア内のつＩ
−ハを上背または下降さ１！るノッシレど、該プッシト
を上Ｆ？まｌ（二はＩ−曽さく↓るブ・ンシｔ−テｉド
ｆ装買ど、該ラーｆ）しと支持架枠、＋３　Ｊ：びプツ
シ１？を相対移動させる装置どをＵｉ　Ｍ＾した均に特
徴がある。（実施例）以下に、図面を参照しく、本発明を；ｉＴ　ＩＩＩ　ｋ
コミ（ンＩｌｌりる。第１図は本発明の一実施例ｑ）概Ｆ８ｉｆ’　！…１λ
ｌ　’Ｐ　１ｔ６Ｋ）１、第′１図にＪ３いて、ノｔホ
ルダ１ａお」、ｒｙ　、（１ｒ１−）１ツタ１１叫よ、
」（に正方形柱状を１，１１／　’（いる１、該７−ｌ
ｉ　ルダ１ａの両端に（よ、該］ｉミーホルタｌ　ａ　
ｃｌ）　１ｒｆｊ　ＪＩ５　ＦＪｉ　ｉｒ＋ｉの中心線
延長」にその回転Ｉ１１＋と４Ｔる八ｌ”ｌ　’Ｉ’Ａ
　（’Ｉｌｌ　Ｂ　ａが突出し、また該右ホルダ′１１
１の両端１；二１．１．　、　ｉ’ｉ　１：＋ホルダ１
（）の正方形１す１面の中心線延１ぐｉ　ＩＬ−’（σ
）　ｔｉ１１転中心軸となるイｉ回転軸８１）が突出し
くし′Ｖイ）、。デー１ル４の中火ｌ、　ｆｊ　ｆ：はＩ’２１示さ４’
ｔ４１’ｖ”ニジ１°、ｊｐ２枠がある。該支持架枠は
、前記ノ、−小ルタ゛ｌ　ｎ　Ｊ−Ｇホルダ１１１との
間がつＪ−−−ハの夕１形、、１．　Ｉ）　１．＋　Ｎ
！＋＼ゝ））ゾ：い間隔を保つように、前記／ｉ回転軸
Ｆ’ｊ　；ｌ　に−１、（ｙ（１回転軸８ｂを保持しく
いる。、該ｆｉ：　ｌｏｉ　ＬＬ前記ノド１・Ｊレダｌ
　ａ　（＋３　Ｊ：び右ホルダ゛ｌ　ｂが回転１右ｔ；
−，’、ｒ　Ｚ＋　、１、−）になされ（いる。ｆｉｔ記）ｉ：、　７トルダ１ａおＪ、び右ホルダ″１
１）の同一側の側面、１．り突出した左回転軸８　Ｂ　
Ｊ、’；　Ｊ：び右回転軸１１１１　＋、ｔ、Ｙの−／
ｊが、前記克持架枠に固着されＩ（図示されないホルダ
回転装「に接続されている。該ホルダ回転装四は、前記左ホルグ１ａおＪ：び右ホル
ダ１１）を該ノ１ホルダ１ａＪｊＪ、び右ホルダ１１）
の対称面に対して対称方向に任意の内爪回転さ口ること
がでさる。／ｉ−万（１ニア　ａおｊ；び名刀−Ｎ’２１１１共に
７Ｊｉ形奢１状をｔｉｃ　Ｌ／　Ｃいる。１１１記）し
ホルダ１ａの上方にはｈガイド２ａが、前記右ホルダ１
１）のＬ方には右ガｆド２１）がｌｊ／同じ、該Ｉｆガ
イド２ａとイｉガイド２　＋１どの間がつ１−への外径
よりも丸５や狭い間隔を保つＪ：うに、前記支持架粋に
固看されている。前記支持１２１７枠ｔ、Ｌ図示されないガイド界降装同
より、テーブル４に二対１ノτ−１−、Ｆ　ｉｊ向に移
動りることができる。第１　（７）　：：Ｓ”　Ｉｙ　ＩＪ　’ｊν３０は丁
−１ル４の中央に設置されＣいイ５１．第２の：ｌ：　
ｐリノ’４０は該第１のＩＪ・す７’　３０の左側トニ
、第３の一日ｌリノ’　！’ｉ　０　ＩＬｊ、−へ；０
１の−１」アリア３０の右側に、該第゛１のｌ’ＩＪリ
ノ’　：１　（３とそれぞれ一定の間隔をＪ３い（、前
記テーブル４に段ｆｒされ（いる。前記デープル４は図示さ１０「いｉ’　＝　ｆル移ＩＩ
ＩＪ１１−ｔにより］Ｉ゛右に移動りることが（・ン＼
る３゜前記第１のキレリア３０の１−）′ｊ（、二（ま
ｆ・ンゞ〕Ｉｒ　！ｉが設置され（いる。１．ｈプツシ
ｌ＋　５１ま１ツ１小されむ０プツシ−１胃陪装買によ
り−１１・（、−移動４ることが（き、第１のＶ′１ア
リｊ’　３０、あるいは第２１１３Ｊ、　（ｆ第３のキ
レリア４０．５０に５！ＪｌｌＧれ１．：浦］１ノ目ト
日ｉｉｉ’＋して該キ１？す７内に進入りろ（二とが（
−；＼る１゜前記第２の二亀−ｐ　’Ｊ　７４　（３の
１・Ｉ貨１」１］、１１−−ノロａが設置され（いる。；１、Ｉ、二、前記’、’（！　３（１）　ｌ　）−リ
ア５０の下方にＬＬ右［ｌ−ラ（３１＋がａＵ　Ｉｆ／
ｉされ（（するつ該第１および第２の１１−ラＦ’）　
：＋　、（’ｊ　ｌ＋　１．Ｌ　ｌ’７１示さ１１、な
いＵ−ラ駆９）ｒ　’Ａ置に」二Ｖ）、１ｉｉｌ　’？
ｉ１．旧Ｊ、　Ｕ用ト１；Ｊ、　ＩＺｉＰＩｌりること
がぐきる。第２図はｈ　ＡＳ　Ｊ：び右ホルタｌａ、１１１の詳細
図、第３図はノｒａ３よび右ホルタ１８．ｌｂが第２図
の１／ｌ　ｆｆ４からノｒ′、Ｉ３ｊこび右回転軸８ａ
、８ｂ・を中心としく、該ノｒ　Ａ３よび右ホルダｌａ
、１ｂの対向りる部分が１向さになるようｌｆｆ１４５
１（［回転した様子を示しＩ、：状態図（゛（６る。ま
１．：第４図は左および右ホルタ１ａ、ｌｂが、第３図
の状態からｌｉ−おＪ、び右回転軸８ａ、Ｆ３ｔｌを中
心として、該左おにび右ホルタｌａ、ｉｌ＋の対向りる
部分が下向さになるように、９０１．！’Ｊ回転しｔ、
二仔子を示した状態図である。ｒｊｌ　２　Ｍ、り１３　Ｚ　Ｊ、）　ヨ（ｆ　第４１
”Ｉ　Ｌ　Ｊ７　イＴ、第１図ど同一の符弓は、同一ま
たは同等部分をあられし−（いる。第２図においＵｌ　（ａ）は第１図と同様に１１−おＪ
：び右ボルダｌａ、ｌｂの正面図、（１））は同図（ａ
）の平面図ひある。第２図におい゛Ｃ１左小ルダ１ａと右ボルダ゛ｌ　１１
のでれぞれ対向し１一面の開の距離は、つＸ−ハの外径
１〕Ｊ：りも−１５や８９（い間隔に設定ｃ）ｌ′ｌ　
ｌいる。該左ホルダ１ａと右ホルタ１１１との対向面にＧＥＬ　
。前記ウー［−への外径１）、Ｊ、す０ヤ）や広い間隔Ｐ
　’Ｉを提供づるＪ：うな第１の主溝２０１が、＞１１
形状（、二、かつ該つｉ−へのがみ、Ｊ、リムＸゝ）・
１ゝ）広く、第゛１の１亀νすｊ’　３０に収納りるつ
１−への数／、’ｌＪ同　ビツヂｒ、ｑ、たテーブル１
に対しく　Ｊｊ　ｉｉ’ｉ　ｊｊ向ｉ、ｌ形成、＼れＣ
いる。たとλば、第１Ｅｆ１２．第３　ｉｌ；　、Ｌ　（ドｒ
ｉ　４のつ暫−Ａ　１０１　、１０２　、１０３　、１
０　／Ｉ　Ｌ、Ｌ、Ｉ’ｌ’ｌ　Ｏｈ　ｍｌの主Ｐｉ　
２０１を通ること１ｍ　、１．　り、１１小ルクｉ　ａ
ど右ボルダ１ｂとの間を失１’１ｌＡｉｊ向に、−）、
１リドｈから上方へ、あるい（３！、イのｊφの１万り
日〜）１・Ｉ１７＼自由に移動できる。左ホルダ１ａに形成されろ第゛１σ川１１１へ２０１１
Ｊ、前述のように、第１の：ｌ−＋７すｊ’　３０に収
納（Ｊろつ１−ハの数だ番）形成されている。。さらに該第１の主溝２０１１；二は、ｒの１−）Ｊｊき
に、該第１の主溝２０１と同し幅で、また、ぞのｆｆ”
＋の底面からノーｉｉｌ転’Ｉｌｌ　（３ａの中心まで
のＦ［’ｉ　ｐ！１が、該第１の主溝２０１の底面から
左回転軸８ａの中心；１．Ｃの部門］ど冑しくなるよう
に、かつイの溝の底面が、前記第１の主溝２０１の底面
と反時８（方向に４５葭の角１σを形成りる９Ｌう４に
第２の：１−溝２０２が形成されている。第２図（１１）においＣは、左ボルダ１ａの第２の主１
ｍ　２０２は、図面の１・から数えＣ偶数番［１の第１
のコ″佑２０１に形成されている、。また右ホルダコｂに形成され１．：　化第１の主溝２０
１ｂ、前述のように第１の：１ニレリア３０に収納りる
つ１．〜ハの数だけ形成されているるっｉｔらに、該ｆ
ｆｌ　’１の主溝２０゛１に番よでの１一つおきに、前
記左ホルダ１８に形成された第２の主溝２０２と対向り
るＪ：うな位′「Ｃに該第１の主ｄ４２０　’Ｉと同じ
幅ぐ、まＩこその溝の底面から右回転軸８ＩＩの中心よ
Ｃの部用が、該第″１の二１−溝２０１の底面から４１
回転軸８１）の中心；Ｉ７′の距四と等しくなるように
、かつその溝の底面が前記第゛１の１−’Ｍ　２０１　
（７）底面トＩＩＴ　Ｆｉｔ　ＩＪ　１ｒｉｌ　ＩＬ、
　４５１１’ｊ　＋７．１１　角ｒＱ　＜？　７１　Ｑ
Ｑ覆るような第２の主溝２０２が形成されでいる。第２図（ｂ　）　にＪｊい’Ｃは、／［ホＪＬ／　ｆ　
ｌ　ｌｌ　）ｒＮ２の主溝２０２は図面の千から数λて
１出数翫［］の第１の三ｔｔＭ　２０１に対して形成さ
４１？いる。第３図は左お、１；び右ホルタｌａ、ｉｂが第２図の状
態からｈ：　Ａ３　Ｊ：び右回転軸８ａ、）３１＋を中
心として、該１ｒおＪ：び右ホルタｌａ、ｉｂの対向で
する部分が−し向きになるＪ：うに、す１．ｊ　ｉ’、
、ｌもｊ矢印ロ／ノ向に４５麿回転した状態図（・ある
。第３図（ａ　）は１向図、ｆｆｉ　３　Ｍ　（Ｉ＋　）
　Ｌｌ　１ｉｉｌ　ｌ’７１（ａ　＞の甲面図である。第３図より明らかなＪ、う（Ｊ、（−の状（ｌｉｉｌ、
イ１ンいでは第１．第２．第３および第４のり一一−ハ
Ｉ　０１　。１０２、１０３．１０’ｌ　ｌ；ｔ、イ１１’１ｔ）ｌ
ｉ　Ａ；Ｊ、Ｔｆ石右ホルタａ＋、１ｂに形成されＩ、
］第１１７）　１．−　ｉＦｉ　’；’　０　’ｌ　Ｌ
ｌ、’。１糸ＩＩされ（いる。す１．１わら、この状態では、第１．第２．第３Ａ夕、
Ｊ、び第４のつ■−ハ１０１，１０２，１０３゜１０４
が１φ人され（いる前記〕１おＪ、び右ホルタ１１、ｉ
ｌ＋間の相対向りる部分、っＪ：す、対向りる第１の土
：Ｍ　２０　’Ｉ側喘の底面部間の距Ｎ１はりへ（１９
（〕く、（−れを１）２どりるど、Ｐ　２　＜　＋）な
る条ｆ′１がりλられ（いるの′Ｃ′ｄうる。２１〕１図１；Ｌ　、　ｌｊ　＋１３．にび右ボルタ’
　ｌ　ａ　、　１　ｂ　ｌｆｉ　第３図の状態から左Ｊ
３よび右回転軸８ａ　、　８ｂを中心どｌ、　’Ｕ　、
該ノｉ：　４３　Ｊ、び右ホルタ１ａ、１Ｌ＋の対向り
−る部分が下向きになるように、１なゎら、矢印Ｃｆｊ
向に９０庶回転した様子を示しくいる。１１４図（ａ　）　ＬＪ　ｉｌ：面図、第４図（１１）
は同図（ａ＞の平面図ひある。第４図Ｊ、り明らか’、ｔ　ｊ、うに、この状態におい
ては、第１６３よび第３のつＴ−ハ１０１．’１０３は
）ｉ　Ａ１−１、びイ１ホルタｌａ、１１＋に形成され
た第′１の主溝２０１に１糸止されくいろ、。しかし、第２おＪ：び第４のつ「−ハ’Ｉ　０２　。１０４は第２の主）呂２０２の間を）山Ｖ〕ぬ（Ｊろご
どがひきる。し）だがっＣ１該第２の−１）１１□＋　
：、’　（１：、’を）山ることにより、前記ノｉおよ
びイ１ホルグ゛ｌａ、ｉｂどの間を矢印Δ方向（Ｊｌつ
す１す＋ツノから１．７ｉ’＼、Ｊ一方から１；方へ自
由に移１ＩＩＩｊ（さインのＣある、。この状態では、第１．第２．ε′ｆ１３おＪ、び第１の
ウェーハ１０１，１０２．’＋０１’１．’ＩＯ／ｌが
１Φ人され（いる前記！ｅ＃３よび右ボルクｉａ、ｌｂ
間の相対向づる部分は、第４図（ｂ　）　ｋ−Ｊ’Ｓい
（、該図面の下から数え（奇数番［］のつ１−ハ、つり
１、り第１、第３のつ丁−ハ１０１　、　’＋　（１：
ｔが沖人、＼１１．（いる部分においては第１の一１’
　＋１”ｌ　？ｃｌ＋−１つ、１り１面のトから数え−
１１ｆｌｆ数番目のつｌ−ハ、っ；Ｉ：　り第２．第４
のつ１−ハ１０２，１ｆ）４が１Φ人され（いる１；１
；分に＋３いては第２の一１活である。前ｎａ　ｆｆｉ　１　（７）　主ｉＭ　２０１　間ノＶ
Ｉ’　ｎｌ　１．Ｌ　第：’（図（、：　、ｌ；　ＩＪ
る説明ど同様］）２Ｃあるが、前記り＋２の主溝２０２
間のＶｌｉ　ＦｉｌをＰｌとづるど、Ｐ　２　＜　１）
　＜　１）　１イする条イ′１が！’７えられているの
である。第４ｊ図はノ肖１３Ｊ：び右ガーｒド２ａ、２ｂの詳細
図（”ｉｔうる。ｌ第５１図に＋３い（、（ａ）Ｇ；ｉ第１図とＪｉｍ桶に
７１゛Ｊ３、Ｊ、σ右方−（ド２ａ、２ｉの正面図、（
１））は同図（ａ）の平面図ぐある。。り）５図に＋３い（、第１図〜イＩ４図と同一の符「）
は、Ｉｒ１ｌ　−；ｌ、１．−は１１１１等部分をｄう
らねしている、７左ガイド２ａどイ：１ガイド２１）の
てれぞれ対向しＩ（面の間の距四は、つ１〜ハの外径］
）にりもやや狭い間隔にｔｔＱ定されＣいる。該ノ「ガ
イド２ａと右ガイド２１）の対向面には、１）１１記ウ
−［−ハの夕日￥１〕よｔ′）１）やヤ）広い間隔１〕
１を１１シ供するにうな第３のｌ　ｔＭ　’２０３が、
り、１ｊ形状に、かっ該つＪ−ハの厚みＪ：りもＸ’Ｊ
　ｌゝ）広く、第１の１−Ｉ＋リア３０に収納するつＪ
−−ハの数だ１１回１ｒツブ（−１まＩこ、−ｊ−−−
１ル４に対しく’Ｑ直力方向形成さ１１（いる。前記ビッヂは、〕〕■−小ルグ１お、Ｊ、び右ホルタ１
ｂに形成さ４１に第１σ尺１−１１へ２　（”ｌ　ｉ　
（！：　１ｉｉｌ　Ｌｆｆｆｉあり、また該第３の主溝
２（１：”の断面形状（，１、前Ｆ＋ｄ　ｍ　１　（１
）　ｇｔ−、＋１４２０１　（７）　ｎ面形１／ｉ　ト
ｌ１ｉｌ　Ｌ；　Ｌニー　形成＋：＼：ｌｔＣいる。第５図（１））において、１ル１面の１・の第３の：Ｉ
ＨＨ，７２０３から順に第１．第２．第３　＋３．、Ｌ
び第１のウ−［−ハ１０’ｌ、１０２．１０３．Ｍｌ／
Ｉか１φ人、＼れている。前記第１．第２．第３　Ａ３　Ｊ、び第４の９１−ハ１
０１、’１０２，１０３．１０’Ｎ、１前記第：）の１
満２０３を通ることｔこより、ノ１ノＪｌ’ｌ・２　ｎ
　、！−，，’Ｎ刀イド２１）どの間を矢印方向へ、′
）　：Ｉ：　ｔ′ｌ　ｌ・ノ°＋／＋日）１方へ、ある
いは上１ノから下Ｉノ／＼自山１．−移１；１１＜、さ
る、１第６図は、第１．り）２お、Ｊ、び：Ｔ！　３の
１１ノリ！！３０、４０．５０ｉ１ＬＩび）−ノル’Ｉ
ｃｒＢＴ庁１１１図１ある。１Ｂ６図（ａ）Ｉ；ｔ、第１図とｌ１ｉｌ　１１に第′
１．第２　Ａ３Ｊ、びε（’ｒ３０）：ＩＩｒ’）ｉ’
３０．　／Ｉ０．５０ｉ１３Ｊ：びテーブル１のｉＬ面
図、第６図（ｂ　）　４Ｊ同図（ａ　）の平面図Ｃ゛あ
る。イ）６図に（１３い（、第１図へ・第５図と同一の符号
は、同　よた【、Ｌ同等部分をあられし〕”Ｃいる。第′１のキレリア３０はグープル４の中央に設置され、
第２のキ１Ｔリア４０は該第１のキレリア；３０のノ１
−側に、また第３の一部１ノリア５０は該第１ノ：ｌ−
、＋−ＩＪ　７３０　ノ右側に、Ｋ　ｍ　１　’ｌ）　
：＃　Ｉ□　’）　７３０と　定の間ＦＭをおいＣ前記
７−ブル４に設直され【いる。ｌ’ｌ’ｌ　ＣＬ！イ１１の１１・リノ７３０（、Ｌイ
の断面が凹形をなしくＪメリ、該凹形内部に「ウェーハ
を収納ぐさるよ）に、ぞの側面板の対向する内面の距向
日、レンｆ、　−ハの外径りより１９大きく　＜＞つて
いる。該第′１の１トリノ’　３０の底面の中央部には、矩形
ＩＩりの第１のフッシト穴３１が形成されている、。Ｊ二だ、前記第１σ戸１トリツノ３３０の側面板（１−
下行イ（、該第１のプツシｐ穴３′１の対向りろ辺には
、つ１−ハ係止Ｉ１１の第１のつ〕−−ハ係山ｆＭ　、
３０１が形成されている。該第１のつ工−ハ係＋ｌ　ｉ関３０’Ｉは、前ム１；第
１のプツシｐ穴３１の対向りる辺の−ｆれ；パれ（１−
１第１の１１１リノ７３０に収納されるベン＼つ１　ハ
の数だ（Ｊ形成されている。また、該第１のつ１−ハ係ＩＬ　！！’＋　３　（、）
　１　を門１、前′、１１左ｉ１３よび右ボルダｉａ、
１１１：二ＩＩｉ成さｉｔ　／、＝第１のＡ溝２０１　
、　ｒ１３よび前記左お、Ｉ（）イ１刀４　ｉ”　２　
ａ　。２　ｂに形成された第３０十ｆｉ＋′＋　２　（１：’
Ｉ　Ｌ：　ｌｉ′ｉｌビ・・）ｆ（形成され（いる。前記第１の１りＪ−ハ係＋１．　ｌｉ’＋　３（’ｌ　
ｉ　１．１、つ１−ハの一部をそこに挿入した場合（、
−１該１°／Ｉ−ハが則れないように支持りるｌこめの
！ｉ”＋　ｒ　ｉｌ□＋るの（、ｌの形状は該つ■−ハ
の人ささ、１１りるい１．１形状＋ｌｌ　、１−）（慎
重に定められるものひある。前音１ｕ１１の１．：　ｔノリア３（）が設置されてい
るｊ−プル４にｂ、該第１のキせリノ７：３０に形成さ
れているガ〕′１のプツシ亀・穴３゛１とほぼ同形状の
プツシ１７穴３１１が加トされている。第２１１３Ｊ、び第３の＝１−１７リア／１０．５０も
第１の二１１・すＩ３０と同様に、その断面が凹形をに
丁しており、該門形内部につＪ−ハを収納でさるＪ、う
に、；どの側面板の対向Ｊる内面の戸開はつＪ−への外
径１〕よりも大きくなつ−（いる。前記第１．第２おにび第３のキＩ２リノ７３０゜４０．
５０はつ「−ハの処Ｌｌｌ！−，１稈が違う揚台に用い
られること（−４するのぐ、（の４ｊ１１成をなり月７
１は８Ｉシなることが多い。まＩこ、前記側面板の対向
りる内面のｒｌｉ　Ｍｌは、イれぞれ同じＣあるが、該
側面板の６゛ちさけ必ＩＪ′１］０同じぐはない。前記第２おＪ：び第３の二１１１リア４０．５０に（，
１、ｎ１１記１１のキレリア３０に形成されｌ〔第１の
プツシ亀・穴；３１と同形状の第２．第Ｓ３のｆフシ１
ν穴４１．５１が、該第２および第３ａ）＝ｌトリノ’
　４０　。５０の底面の中央部に形成Ｊされ（いる。前記第２の一１鵞ｌす７／ＩＯに形成されｌこ該第２＋
７．）プツシ１１穴４１の、該第２の１トす／’　／ｌ
　□の側面板と平行な、対向する辺にｉ、１．　、つ［
−ハ係１１川の第２のつＪ−ハ係＋ｌ−ｔＭ　４０１が
形成さＩＩ（いる。該第２のウェーハ係止溝／ＩＯ’Ｉ　Ｌ；Ｉｌ、各々の
形状は前記第１のウェーハ係止ｔＭ　３０１の各々の形
状と同じであるが、イのピップは、図示のｌ？ｌ　’ｒ
　ｔよ、前記第１のつ１−ハ係１１：　ｉｆ’ｉ　、”
３０１のそれの２１？Ｘ（−ある。また、それぞれの該第２のつｌ−ハ係ＩＩ　！ｉｌ’＋
４０１は、それ−されの該第１の・“］］１−ハ１糸Ｉ
ｆｔ＃’＋３０１のｌ１ＴＩ　−ｉｉ線」に４Ｔｌ）壜
１．　ｌ；［４：　”’・１、五Ｋ　／、＋面のずれは
絶対に許されない。第６図（ｂ）に、！３い（は、図面のトか−）数λて偶
数番目の前記第１のつＴ−ハ１糸ＩＬ　ｔＦ’ｉ　３０
１に対応して、偶数部１］の第１のパノ１−ハ係Ｉｆ　
！＃冒１０１のｌ「側延１４１！＋ｌ　１に第２のつＴ
−ハ係１１−満４０１が位１ｒ′７され（いる。＋ｉｒｔ記第２　（１）　：ｌ　ｌ−リノ７４０が段冒
され【いるｊ　−ｆル４し二も、該第２のギ（・すＦ２
Ｏに形成されえいる第２のプツシ（・穴／１１どほぼ同
形状のプツシレジ＜　４　’Ｉ−１が加にされＣいる。。１ｉ’ｌ　ｉ＋１−！ε＋＋３の二Ｖトリア５０に形！
戊されｌこ該第；３の／ツシト穴５１の、該第３のキ１
７リア５０の側面板ど下行な、対向りる辺に、ウズーー
ハ係庄用の第３１７）　”）　＋：　−ハ係１１）＋’
ｉ　５　（１’Ｉ　カ形成ｃ”ｃ　ｔｔ　Ｃ（１’　ル
。該第３のつ［−ハ係止溝５０１は、各々の形状；よ、前
記第１および第２のつｌ−ハ係＋１ｉＭ　３０１　。４０１の各１７　Ｑ）形状ど１ｉｉｌ　Ｌ；　”Ｃ゛ｉ
ｔ５　ル。該第３のつ】−−ハ係１１）古５０１のピップ−は、前
記第１　（７）　＋、７　：ｔ　−ハ係Ｉｆ溝３０１　
（７）それの２拾〇あり、第２のつＴ−ハ係車溝４０１
のそれど同じＣａりる。ｍ　６図（ＩＩ）においＣ１該第３のウー智−ハ係】１
のつ１−ハ係ＩＩ−溝３０１　ｋ二文・１応じ（、該奇
数番［１の第１のつＩ−ハ係Ｉｆ、　ｆＭ　：ｉ　０ｉ
の（１側チ１「（（わｉｔ　ｌ　ｔ；ｆ位買され゛（い
ろ。そ１１ぞれの該第３のつ１−ノ箇系Ｉｆ　！Ｍ　！ｉ　
Ｄ　１１．Ｌ、第２のウェーハ係１ｊ−）笛４０゛１と
同ｌ〕２、されそれの該第１のウー［−ハ係Ｉｔ　Ｗ／
＋　３ｔ、ｉ　ｌの同　線１１＋−、＜＋′１１ればな
らず、縦方向のづ゛れｔ、）、絶り・）１ごｎｉさ１１
．／己）、。１’＋ｉｉ記第３のキ１１リノ’　５０が７．ｊ目°゛
？さ１′１（いろ）−プル４にも、該第３３の八Ｉ７’
）　−ｊ’　！ｉ　０　ｋ−１１５成され（いる第３の
プツシ（・穴５１と（、ｌＳＬ回！ｌ＞　Ｕｌの／゛・
・ｌシセ穴５１Ｔが７１１１１［され（いる１、さＣ，
第１図にＪｉいて説明しＩｌ、１・）（、−１７−／ル
４の中火部、１なわＩ〕、第１のＩＩＩリノ’　ｒｌ　
（＋の１、ｈに、図示され４「い’Ａ　ｆｉ架什に：　
、、１．　Ｉｌ　、ノー１；　Ｊ、　’Ｕ右ボルダｉａ
、ｉｂが々持さ１１１．−＼’″１　ｋ、−、Ｊ’＜）
、　、１．１び右ホルダｌａ、ｌｌｔのＩｈｌ；−ノ＋
　；１７　ｊ（７′（＋刀（１’２ａ、２１＋が支Ｍさ
れ（いる。Ｊ、た、前記ノｉおよび右ホルダ１ａ、ｌｂに形成され
た第１の主溝２０１＋ＹＩ記ノ「おＪ、び右ガイド２ａ
、２１＋１；二形成され／Ｓ第３の主）Ｍ　２０３　ｄ
３よび第１の１１１リノ’　：１０に形成されＩこ第１
のウー［−ハ係Ｉｔ　ｔｌ’ｉ　３０１はｌｎｌじピッ
プで同数だり形成されＣいる。前記第１の」：溝２０１　、第３の１而２０３および第
１のつＩ−ハ係止ｖＩＳ３０　’ｌは、第１図を平面図
として見た場合、つまり、第１図にａ５いて矢印１−７
’ｊ向／）＋　１う児た場合（ごは、（れぞれの溝の縦
方向のイＯ億が一致４るように椙成きれ（いる。 ′つまり、前記第１の−ＩＩｒす１３０に形成された第
１のつＪ−ハ係止ｔＭ　３０１の各々に、つ」−ハが係
１１され（いる場合において、での各々のつＪ−−ハは
、該つ■−ハを重めに上背させ／、：峙、第２図に示さ
れた相３！ｌ　（ｆＺ直関係にある前記第１のＪＥ　Ｉ
Ｍ２０１を通りＶ、）りる（二とができ、さらに、１１
１５図（口承された前記１１および右ガイド２ａ、２ｂ
に形成された第３の：ｒ　ｉ％’ｉ　２０３に挿入され
て）Ｊ、う（・二、前記それぞれの構は配ＩＮされ（い
るのｒ′ａつる。次にウェーハの移換えの干！！Ｉ″ｉを説明りる。第７図（ａ）−ｍ７図（１）ＬＬ、Ｍ移１．Ｓ　、ｔ、
　ａ＞　：１’順を承り説明図である。これらの図にａ３い（、第１図・−・ＶＯ６図と同一（
７，ｌ　ｉｔ号は、同一または同等部分をあられしＵｕ
ｓる。第１図はつ１−ハ移換λのｎｉ　Ｋ／Ｉの状ＱｌｉをＣ
１う１１）しでいる。第１の一日！リア３０１１こ形成
３才ｔ　１：ゴ１′１のつ【−ハ係止潜３０１　ｔ；Ｌ
　５０　ｆｉｌｌが形成２Ｓ　４’Ｌ　（ｕ凡て、該５
０組の第１０ウ−１−ハ係’Ｉ　ＩＭ　３（璽ｔこ（，
１５０枚のつｒ−−／曹００がそれて゛れ係１；（冒’
Ｌ　（（＋）る。左おにび右ホルダ゛１ａ、′ｌｌ＋お、１、σノー１＋
　、１．　（）　ｔ＋ｊＪ−（ド２ａ、２ｂは１図示、
＼１）、／己′１点１１ｒりｔ１４ｉ”　Ｌｌす、第１
のキＩｌリフ！３０のｌ　ＩＩＩこイ）ン首、きｌｔ　
（（、Ｘイン。前記左おＪ−び右ホルダｌｌ、１ｂＬ、１１１２図の、
１、）な状態に（６る。第７図（ａ　）−・第７図（１）において、つ１−ハコ
０００円の中にｐ（かれた数字は、該つ■−ハＩ　ＯＯ
の枚数を示している。り１７図（ａｒｋ：おい−（、図示上＼れない支持架枠
が図示され（２いガイドｒｊ？降装置により下降し、該
寺持架粋に（１ト持されたノｉおよび右ホル９”ｌ　ａ
　。＋　１１が、第′１の１１７リア３０の側面板に接近し
たところで、該支持架枠は停止１する。該第１の＝１−１７リア３０下方に位置していた１ツシ
亀・５【、１、図示されないプツシト背降装胃によりト
冒りる。該プツシＩ７５は、５０枚の前記つ１−ハ１０
０に接触しく該つＪ−ハ１０　（、）を土臂さＵる。該プツシＩｒ　５は、前記つ１−ハ１００がノ１−１お
よび右ホルタ’ｌａ、ｉｂの第１の主ｆｆ’７２０１間
を通り、’ＬＳ　’Ｊ　ニノ［オＪ、び右カイト２ａ、
２＋＋の第：３の主溝２０３間にＩｎ人されたところ′
ＣＣ停止る。第７図（ｂ）にＪ３い（、図示されないホルダ回転装置
は前記）「おＪ、び右ホルタ′し１　、　’ｌ　ｉ　４
＋、該左および右ボルダ１ｒｌ、ｉｌｌの夕・１向りる
部分が１昇リルＪ：うに、ツｊ、り矢印［３／Ｊ向１；
−、４ｒｉ　ｌＴｒ回り・ｌ：さける。し！、−がっ’
ｌ、前記）ｉ’、　ｉ１３．、ｌ、び（ｉホルダ’ｌｎ
。１１）は第３図のＪ、うな状（１Ｂにイ「ろ。第７図（ｃ）に（Ｊ３いて（ｊｌ、前記ブツシト１）が
、ブッシリ１装「により＋ＭＬ、前、′、［！　’／−
ノル１の上方に来たところで停止Ｉ−りる。１前記５０
枚のつ［−ハ１００　ｌ；１．　、前記ｆツシト５と共
に下降し、前記左おＪ：びイｊホルダ′１ａ。１１１に形成された第１の」猫２０１の９・１向ン１ろ
１１’（。面９ｈ部にぶつかり、該底面端部（、二１糸１１されろ
、１この状態Ｃ支持架枠は１−冒する。。Ｊ−！ｊｉ’−ＬＬ、１）ｒ１記ノ「ＡＥ、Ｊ、びイｉ
　ホル＜ｌ’　ｉ　ｎ　、’ｌ　ｔｌ　Ｌｌ）　ｌ；端
が、第１．第２および第３　（Ｄ　ｌ　＋・リノ’　：
１０　。／１０．５０のいＭ゛れの側面（反Ｊ、　１′１１ｉ）
　ｉ：’：＋いｌＩ’／　ｉｉＦ／　Ｉ＋二くるまｖｔ
ｊなわれ、ぞの１η（７１１りる７゜第７図（（１）に
おい−（は、ｉ−’ｆル１（１１図、Ｊミされｔｌい〕
−−プル移りＪ装買により右ｆｊへ移ｆｈ−！ｌる。該移動は、該ｊ−プル４］−に設訂された第２の１−ト
す７’　４０が、前記支１でｔ架枠のジ°１１；にくる
まで行ｔ「ねれる。前１１Ｉシ支持架枠は、ガイド胃降装置にＪ、り下降し
、前記ノ＋：　６３　Ｊ：びイｉボルダ１ａ、’ｌｉｔ
が前記第２のキレリア１０の側面板に接近したところＣ
停止りる。第７図（０）においては、前３に　Ｌｌ　／、：’７”
　’フル４１、−右１ｊへの移動にＪ、す、前記第２の
−Ｐ　ｔ・リア４０のＦ　／’ｊにイ１′１厘すること
となつＩこ前記プツシｌｙ　５は、ｆツシＩｌ胃降装買
により上背りる。そして、！Ｔ１２のキトす７４０の底面および前記ｊ−
プル４に形成された第２の１ツシｔ・穴４′１おＪ、σ
４１−１−を通り、前記ノ「ＪりＪ、び右ボルダ゛Ｉａ
。ｉ　Ｉ＋に形成された第１の主溝２０１の３・１向りる
底面端部に：係１１°された前記５０枚のつ■−ハ゛１
００の上部（に−接触りる。１前記１ツシ１７５はさらに［胃し、前記ウェーハ１００
をｉＶ　Ｊｊよび右ガｒド２ａ、＞川）に形成された第
３の＋ｉ呂２０３へ種入りる。この時、ｉ’ｌ’Ｉ　Ｎ
：　’７ツシＶ５は十Ｒを（７１１ニする。第７図（［）においＣは、ホルタ回ｖ１装置シロ、Ｅ、
前記左Ｊ３よび右ホルダーａ　、１ｂ　４、該／ｉお、
１、び右ホルダーａ、１１＋の対向りる部５）がＩ・向
ンさＬＪ、　％るように、つまり矢印Ｃ’Ｂ向１．．ｉ
、　、　９０四回ｑｉ島＼ｌする。したが・）（、前記
）［６３Ｊ、びイｉｊｌ、ル’７　ｉ　ｒ＋　。１１）は第４図のにうン「状態になる。。第７図（ｇ＞に４３い（は、ｆｉ’ｌ　Ｆ＋ｌｊ　５０
４９．σ）・“ノーーハ１００を克１ぜ１しくい！、口
止１記ｆ・ンシ亀・５　＋、１、ノンシＩｌ胃陪装置に
より］；陪をｔｆｌめる１、同ｎ：Ｉｈ前記つ１−ハｉ
ｏｏも該プツシーノ！’ｉ　、！−１’、に１・Ｆグｆ
ＩＩイ）、２該５０枚のつ「−ハ１００１．Ｌ、前ムｔ
！　ｌ＋　ｊｌ、１．　（Ｊ’　（＋ボルダ１ａ、１ｂ
の１Ｍ部【、口上さしかか′）Ｉ、ニーＨ：　ｒｌｌ　
７）　Ｔｊ、該左および右ホルタ１ａ、１日こ形成Ｃさ
Ｉ＋　／＝−＞’（ｉ　’？の主溝２０２を通過＼りる
らの（１、前記グ・ンシ１１！）＼とｊＬに前記１１おＪ、び右ホルタ゛ｌｉｌ、１Ｉｌｌ
・部Ｉ＼；ｉｒ＋Ｘ、１・Ｊる。。しかし、該ノｊ　１１３Ｊ、び右ホルタＩａ、ｌｂに形
成５＼れた前記第１のＪ：ｔＦｊ　２０１に進入りる１
りＬ−ハ１００は、該第１の主ｔＭ　２０１の底面６に
：部に−（係１１−される。第４図（ＩＩ〉にＪ：り明らがなＪ：うに、該第２のＪ
ＨｆＭ　２０２　Ｌｊ、それソ゛レノ第１の主ｉｎ　２
０１　（０１つおきに形成され−Ｃいるの−（−・、前
記５）０枚σ戸シｌ−−ハ１００は、−ぞの′１４父Ｊ
５さに、２５枚は該ノ「おｅｌ、びイ１ホルクｌａ、１
１＋の部ブ）　’ｖ　ｉｍ　、＋１され、残り２５枚は
前記プツシ１７５ど其にＦ　＊ｙをｖ：＋ｊることにイ
「る。該１ツシト！′）と共に１・降を続【ノる２５枚のつＴ
−ハ’Ｉ　Ｏ（ｌ　ｌ；Ｌ　、第２の：１−ｐす７’　
／Ｉ　（’、）内に挿入され、該イ１２０日Ｉリノ’４
０の底面にＫｕｔＪられた第２の１”／　、Ｔ：−ハ係
＋ｌ：　Ｍ’ｔ　４　Ｃ−）　１のそれぞれに係止され
る。ｉｊ’ｌ　ｌ；ＩＪ　ｆツシｌ’　５１；Ｌ、ｎＭ　ｍ
　２　（７）−１−１７１Ｊ　ア／Ｉ　Ｏノ底面および
前ｉｉ＋、！　ｊ−’フル１に説りられた第２のプッシ
ャ穴／ＩＩ　Ａ３　Ｊ：　ヒ／１１−ｌ　’ｋＭｒｌＡ
　ｌ／、前ｉｉｊ　２５栓ノウ１−ハ１００を前記第２
のパノ（−ハ係＋ｌ　ｉ；＋’＋４０１に係止させた後
、十降を１・、−１１りる。その後、支持架枠はガイ１〜７ｉ′降″１−直によ１・
〕、前記左ｄ３よび右ホルタｉａ、ｉｂのト端が第１．
第２　Ａ３よび第３のキＸＩリッツ３０．／Ｉ　Ｏ，！
ｉｏのい・１゛れの側部板、Ｊ−りら」部へ）５：・す
る：１、て１冒りる１゜第７図り１１）にＡ３い（は、
前記ノーノル４が１′７１示されないテーブル移動」・
己、直（二、１、（・〕ノ「Ｉｊへ移動（する。該移動
は、該）　Ｉ　／ｌ／　’Ｉ　ｌシ設置ｊ＼４−１　／
、−、’ｉｏ　３のキトリア５０が、前記ｑ持架枠の一
°１１・（、りる；１、で行なわれる。第７図（ｉ　）におい（は、ム１．７り１！４１°１．
Ｌ刀イド冒降装置に、１：すｒｙ＊　（Ｊ　ト降し、該
（１４１°＋　’、’１．’　ｌｉ’　１．１、ｌ’ｌ
’ｌ　＋１４　／＋　＋ｌ＋Ｊ、び右ホルタｌａ、ｌｌ
＋か萌５ｊ！　ｉ’ｌｉ　：ｉのルリノ１５０の側面様
に接ｊ１１シたど（二ろ”：　ｌｉ゛＋ｌりろ。でしく、前）ホした）−ノル１のイ、／ノｌ＼Ｃノ）４
１５昂１０．〜より、前記第３のキトリノ’　５０の１
・方（、二１−ン１１′Ｃりることとなっｌこ前記プツ
シ１１５は、プツシ（７昇降装置にＪ：　Ｐ、ｌ　、ｌ
胃りる。該プツシｒｒ　５は、第３のキＩＴす？５０の底面お、
Ｊ、び−テーブル４に形成されＩＣ第３のプツシ１！穴
５ト１３Ｊ、（Ｆ　５　’Ｉ　’！を通り、前記外およ
び右ホルダ’ＩＱ、’Ｉ１１に形成された第１の、−ト
ｔｉ’１２０１の底部端部に係止され／ｊ前記２５枚の
つ工−ハ１００の１；部に接ｍ：づる。前記ブッシト５はさらに［−胃し、前記つ■−ハ１００
を前記外おＪ、び右ガイド２ａ、２ｂに形成８’　ｔｔ
　／＝　ｍ　３の主溝２０３内へ種入りる。この時、前
記プツシｒ５は上界を１？止する。第７図（ｊ　）にＡ３い−Ｃは、前記ガイド回転装置は
、前記！「および右ホルダ１ａ、１ｂを、該ノ「おＪ、
び右ホルダ１ａ、ｌｂの対向りる部分が上向きになるＪ
：うに、つ；１り矢印Ｂ方向に、４５度回転さｌる。したがっ（、前記外おＪ：び右ホルダ１ａ、ｌｂは始め
の状態、つ；［り第２図のＪ）１．”−、、リベ（のつ
１−ハを通過さける状Ｑ％とイ「る、。第７図（ｋ）おい（は、前記プツシＩｔ　５は、ｆフシ
１２宜降装買により「１び十降イＶ胎める。前ｌ″１１
１２５枚のつ１−ハ１００−ｆ、、＋該ゾ・フシ１１５
−ハ：；−ト降する。該２５枚のつ■−ハ１００は、ｆ）’ｔ　ｉｔ＋３ノｒ
、’　ｉｔンよひ右ボルダ１ａ、１ｈに形成された第′
１のＪ：、　！Ｆ＋　２（’ｌ　ｉを通過し、法外おＪ
、び右ホルダ’Ｉｎ、ｉｌ＋の１・側へ下降し、その後
、前記イビ）の１トすｊ’　Ｅ−１０内へ挿入される。前記２５枚のつＪ−ハ１００１．１．、該イ１：１．の
１トリア５０の底面に設（ＪられＩ、：第３Ｃ））パノ
ｉ−ハ係１１溝５０１のイれぞれに係１１さ４Ｉる。前記プツシせ５は、前記第７１１７）　ｌレリｉ’　り
　０の底面Ａ３Ｊ、ヒＯｊｒ　記テ’ソ）Ｌｔ　’Ｉ　
＋＝　設置、Ｊ　’）しｌ：第：’Ｓ　’７ｉ　ｆラシ
ャ穴５１を通過し、Ｎｉ記２５　＋９．の「゛ノＩ−・
ハ１００を前３ｆシ第３のつ１−ハ係Ｉｆ　ｔＭ　！’
＋　０１に係１１させた後、下降を停止にる。その後、支持架枠は、カイト譬降装買によす、前記左お
よび右ホルタ１ａ、１ｂの下端が、第１、第２および第
３のキャリア３０．４０，５０のいずれの側面仮にりも
高い位置へ達するまで上背する。第１図（１）においては、前記ラープル４はテ−ゾル移
動装貿こより右方へ移動する。該移動は、該シーゾル４
上に設電された第１のキトリア３０が、前記友持架悍の
真下にくるまて行なわれ、その後、停止する、以上の第１図、第７図（ａ）−（ｌ）の操作により、該
第１図において第１のキャリア３０内に収納された５０
枚のウェーハ１００は、該第１のキャリア３０の左右に
設置された第２および第３のキャリア４０，５０内に２
５枚ずつ、かつ前記第１のキャリア３０内に収納されて
いたウェーハ１００間のピッチの２倍のピッチで収納さ
れたことになる。なお第７図（ｄ）、（ｈ）、（ｌ）においては、テーブ
ル４を図示されないラーグル移動装置にはり右方あるい
は左方に移動しこが、該テーフル４を固定しておいて、
左および右ホルタ１ａ、１ｂ、左および右ガイド２ａ、
２ｂ、プッシャ５および左および右ローラ６ａ、６ｂを
移動させても同様の効甲が得られることは明白である。一般に、ウェーハはグルンニウムやシリトノ等の単結晶
であるが、亀甲結晶の方向を示すために、該ウェーハは
円形形状の該ウェーハの一部に内線状のカットが施され
ている。そして，キャリア内にウェーハを収納りる揚台
、該ウェーハの結晶方位、つまり円形形状の一部を白線
状にカットした部分を一定方向にそろえる必要かある号
合が名い。前述の操作においては、該ウェーハ１００の方向をそろ
える操作はしていないのて、第７図の（１）におりる第
２および第３のキャリア４０、５０に収納さたウェーハ
１００は、その方向かばらばらである。以下に、第２および第３のキャリア４０、５０こ収納さ
れこウェーハ１００の方向をぞろえる手順を示す。第７図（ｍ）−第７図（ｐ）はウェーハ１００の方向を
そろえる丁順を説明りる説明図である。第１図〜第６図および第７図（ａ）−第７図（ｌ）にお
いては、ウェーハ１００の前記切欠直線部は示していな
かったが、第１図（ｎ）−第７図（ｐ）においては該切
欠直線部を示しである。また、ウェーハ１００の円の中に書かれた数字は、該ウ
ェーハ１００の枚数を示している。第７図（ｍ）−第７図（ｐ）において、第１図〜第６図
、および第７図（ａ）−第７図（１）と同一の符号は、
同一または同一部文をあうらねしている。前述のように第１図（ａ）においで、第１のキキャリア
３０内に収納されていた５０枚のウェーハ１００は、第
７図（１）においては、第２および第３のキャリア４０
．５０内に２５枚ずつ、かつ前記第１のキャリア３０内
に収納されたウェーハ１００間のピッチの２倍の収納さ
れている。第７図（ｍ）においては、前記第２およひ第３のキャリ
ア４０、５０の下方に設置された左および右ローラ６ａ
、６ｂが、同小されないローラ駆動装置により上背りる
。前記第２および第３のキャリア４０、５０内に収納され
たウェーハ１００は、第２および第３のウェーハ係止溝
４０１、５０１に挿入、係止されているが、該ウェーハ
１００の最下部は第２および第３のプツシャ穴４１、５
１の名出に若干突出している。前記左および右ローラ６ａ、６ｂの上昇は、前記第２お
よび第３のプッシャ穴４１、５１の下面に突出した前記
ウェーハ１００の最下部の円弧状部分に接触りるまぐ行
にねれる。この助、ウェーハ１００の結晶方位を承り前記直線部が
、ぞの最下部にあるウェーハ１００には、前記左および
右ローラ６ａ、６ｂは接触しない。第７図（１１）においては、前記左および右ローラ６ａ
、６ｂは、図示されないローラ駆動装置に一定時間回転
りる。回転方向は、時貢方向、反時計方向どららでもよ
い。前記左および右ローラ６ａ、６ｂの回転により、法外お
よび右ローラ６ａ、６ｂと接触している前１、Ｌ！つ硬
−ハ゛１００は、ぞの摩１■ミカの！こめに回転りる。ｆｌ意の／ｊ向に向い−Ｃいた前記つ１−ハ゛１００の
１１線部は、前記回転のため、該つ丁−ハ１００の最上
部へ回転さ１！られる。該つ１−ハ１００のＩｌｌ［・
部に移ｆ＋ｈ　Ｌ　／、：該ウェーハ１００の直線部は
、前ｉ；１！）ｉ−ｉｌｊよび右【ト→６ａ、６１１に
接触しなくなる３゜し／ｊが−）（、前記）「お、１．
びに＋＋−−ノロ　ｉ＋　、　（ｉ　ｂが回転を続【）
（も１．１亥つＴ−ハ１（３０は罰の回転を停」１りる
１、前記左お上び右１．１−ｆ〕６ａ　、　（５１，Ｉ
　Ｌ；ｌ、前記づべでのウェーハ’Ｉ　（１０の直線部
が該・°〕１−ハ１００の最下ｒ’ＡＩに移動し、該リ
ヘ（の・：）＋−ハ１００の回転が停止ｊ−りるま−Ｃ
耘ｊ４Ｊられる１、この状態におい（、前記つＴ−ハ゛
Ｉ　０００）　ｔｉ’、品方位は、づべて同−ｈ向に１
ｌＦｌλられｌ、：　ｃ’、！：’、　Ｉ：：なで）。さらに、前記つ［−ハ１００のｉｉ’ｉ　、１１！ｉｔ
部を、該つ■−ハ１００の下以外に向１．．Ｉ　／、二
い１“４含１．’　ｉ、１．．１′１１・の操（”ｌを
（１なう。ｍ　７　図（ｏ　）　ニ、ＩＪイ（１，Ｌ、ｆ　Ｉ／）
１　ヘ（（１）　ｉｊ’ｌ　ｉｌ；１部が、ぞの最Ｆ部
にイｊ／　ｆ　ｌろ前ｉｉｌ！　”、／　＋−ハ１０　
（１＋、一対しく、前記）１おＪ、び右１゛１−ラ（冒
＋　、　６　ｂ　１．１同率されないローラ駆動装置に
より１、【らに−、Ｌ　’Ｒ・１イ）、。法外おＪ：び右ロー’＞　６８　、　Ｃｉ　１＋　１．
Ｌ、ｌ’ｌ’ｌ　ｕτ！パノ１〜ハ１００の直線部に１
）触りると同１１゛１に、イの１　＋７．＋イ・停止り
る、。第７図（１））に「１ヌい（＋よ、前記）ｒＡ３よび右
１ｌ−−１７（５ｎ　、　６ｂ　Ｉ；ｌ、前記図示’ｒ
３１−Ｌ　ｆ、ｇ　イＤ　”）　ｊＪ＋ｊ　ｉ’ｌＪ　
’（（直に、〕、り同転する。回転方向ＧＥＬ　、時ａ
１方向、反時ｉｉ１　／Ｊ向のどららｒ　Ｇ　Ｊ、い。前＝Ｌ！つ１−ハ゛１０ｏは、前記ノｒおにび右［１−
ラ（ｉａ、（’３１１の同転にＪ、り回転りる。前記つ
１−ハ１００のＭｉ直線部希望する任意の方向に向（ｊ
られｌζどコロ（゛、前記！ｉ’　ａ３　Ｊ：びイｉｌ
ｌ　’＞６ａ　、　６１＋は、−ｆの回転を停止づる。第７図（ｐ）においては、前記’／　■／”Ｉ　００の
直線部はリベて該つＪ−ハの最上部（、ニイＣｌ　ｒ　
Ｌ／　’Ｃいる。前記クー１−ハ１００のｉｉ’ＴＰ、１１部が希望覆る
任なの方向に向けられ、前記左Ｌ１３よび右ローラ（３
ａ。６１訃の回転が停止Ｌ　Ｌ　ｋところ（、前式！］、お
Ｊ、び右１−１一つ６ａ、６ｂは下降りる。Ｊズ１−の禄イγにより、ての直線部が種々の方向Ｉコ
ー向りられていＩこつ１．−ハ１００は、リベて希望覆
る同一り向へ向Ｉ−，）　Ｉ）れ／ｊことになる。また、以１−の操作の１．１！ｊの操ｆｌ、）７１すＥ
Ｏ’；’　に　ｊ。び第３のキＩ７リア’１０．５０内に収めＩ）れｌ、・
つｉ−ハ１００を、第１０′ＩＩノリノ’　：３０内ｌ
（移１）λる操作ら、前述した操作を全く通の丁Ｍｉ’
ｉ　１．、−ｊ、すｆｌえば容易にｊ５：成′ｒ：さる
。また、第１の：１″レリア３０のノＷ石両四ｌ＼；’ｌ
＋　２＋第３のキ１７リア４０．５０を説ＩＪ　／、＝
が、こ４０．限らず、前記第１の−１−ｔ・リラ１３０
を端部（二設置１、第２＝１．たは第３の−Ｉ＋？リア
４　＋１　、　り０　’Ｓ中史１．二ｉ、（シ（Ｊても
よいのは当然Ｃルｊる。本発明の一実施例では、つ１　ハ’＋　（１０の４５；
　＋／ｊ「えに、第１または第２おＪ、び第Ｊ）の１．
　ｙす／’　＋３０　。４０．５０に形成された第′１；また１、１第２お、Ｊ
、び２゛０３のウェーハ係止溝３０１　、４０１　、　
「ｉ　０　’Ｉ　ｌ、−係止されたイれぞれのつ■−ハ
ｌ　（３０４、）「お、１、（ｆ右ホルダｌａ、１ｂお
よび）響、お、Ｊ、げＣ９がｒＬｊ２ａ。２１）ニ形成された？　ＪＬ　（ＩＩ　（７）　Ｅｒｉ
　’ｌ　、　第２．Ｉｉ　、１、（Ｆ　ｆ４３の主ｆｉ
？＋　２０１　、２０２　、２　（１：１内１．−１小
人あるいは係ＩＩ−する千［ひ、あるいはでの逆の手段
を用い（いる、ｌｉ″ｆ１−！第１．第２おＪ、び第３のつＪ−ハ係１］
猫３０１　、　／Ｉ　Ｏ１、５（）Ｉ　Ｊｊよび第１．
第２　Ｊよび；ａ　：３のＬ、　ｉＭ　２０１　、２０
２　、２０３は、前記ウーし一ハ１００を係１１−ある
いは保持するための溝であるから、該溝の幅はあまり広
くｔまできないが、適１１工＜ｒ　Ａ７びは必要ぐある
。前記第′１．第２おＪ、び第３の−１−１１リラ７３ｏ
。／Ｉ　（’、）　、　５０に形成された前記第１．第２
および第３のつＩ−ハ係１１１ｉｉ３０１　、４０１　
、　Ｅ５０１に係１１されたｒｉｉｔ記つ１−ハ１００
は、該ウェーハ１糸止）１！１の前記ｊりびの１．−め
（二、該−１トリアの底面にλ・１しく手向（二＼“１
−）（ニー゛が（さｌ’　＋　；魁ルすｊ′の底面の千
「°Ｊ面に対しくン冒の傾斜角１ｆｌ＠　＜「Ｌ／　’
Ｕ、あるつＪ−ハは該垂直面の下前側１．１：Ｉこ、他
のウェーハは反ス・ｊ側に傾斜しＵ　５’／　＝）こと
になる。したが−）（、−１−１ｒリア内での各つＪ−ハ１０゜
間の上部のビッヂが異イ１す、この状態で１４１１、前
＾１！ｒｃ１３　Ｊ：びもホルダＩＬｌ、ｉｌ＋　Ｊ３
土びノロ１３．１．σもガイド２ａ、２ｂに形成され１
．−第１．第２およびり１３の主ＩＭ　２０１　、　２
０２　、２０　、’ｌ内（１、該つＩ　−ハ１００を円
滑に挿入りる（−Ｊ、がむｊ［かしく／７る。はｌｅ「はだしい場合には、前３１１：の移１’：’ｒ
　、′？＋ＦＩ＋　ｌ’ｌ　１．　ｌ、！７陣を生じＩ
こり、つ１−ハをＩＱ　１１３　＋、、　／；−リ１１
ろ火山がある。、１−記欠点の解決策とし゛（，１１１４ｉ＋−ｓ　ｉ
＞　４１．　ｒ、７い丁ＩＱ　ｋ−にり前記デープル／
Ｉを、該デープル４ど菌中１！つ■−ハ１００どの交線
ト平ｈ　’；ｃ　仮！’；！、！　軸（１）　、１、ｉ
、＋　ｔ：＋　に薯１ｎ斜させてやることが考えられる
。。前記ラーＩル４の飼１斜に、１、”、”　、ｌ’ｌｌｌ
　ｉｉｌ：の・１１＼（のウェーハ゛Ｉ　００は同　ｆ
ｊ向ＩＪＩ”ｉ　：ｉ”ｌじ、ｌ）！−か）（、該つ１
．−ハコ００間の１部のじツｆ（３１、ｉ’　（１）　
ｌ　Ｉｒリアごとに同じになる。なお、前記傾斜が大きい場合（、゛は、ＩＭ　Ｙ、１；
第１のキャリア３０に形成されｌ、７第１のつ嘗−ハ係
１１漏：ｓ　０１と、前記）ｌお、ｊ、び右ボルダｌ　
ａ　、　ｌ　ｌ＋　ａＪＪ：びノｉ’　Ｊｊよびイ＋　
）Ｊ　ｒド２ａ、２ｂに形成された第１゜第２８，１、
び第３のに溝２０１，２０２．，２０３どの相λ・！　
１１７１Ｍを調整りる必要がある。また、前）４：の、Ｊ：うに左および右ボルダ１ａ、Ｉ
Ｉｆ　ｉｌｊ　Ｊ、びｉｉｌ　ｉＢよび右ガイド２ａ、
２１＋に形成され！、：第１．ｆｆｌ：１１５Ｊ：ヒ第
３ｆ７）主ｌＭ２Ｏ１，２０２゜２０３　’ｌ）、前記
つ１−ハ１００が挿入された時に’７１１Ｊな逅びが牛
り゛るＪ：うに形成されＣいる。該遊び（，１、前記ウー［−ハ係止Ｈ’ｔに係止された
前記つ［−ハ１００を前記プツシ鬼・５にＪ：り１昇さ
μる際、前記第１．第２おＪ、び第３の＋ｉ％Ｓ　２０
１　。２０２．２０３にｉｌｊ人しやりくりる為のものＣある
。しかし、該遊で１のムニめに、前−］］ウド１へ八゛ｌ
００が、それぞれ平行に保持されなくなるＪ３イれがあ
る。しノＪが・）−（、この状態では、前記右おＪ、び
右ボルダ１ａ、１ｂににり保持され／ｅ前記ウェーハ１
００を前記第１．第２および第３　ｑ）つ１−ハ係ＩＬ
ｔＭ３０１　、４０１　、　！１５０１内／＼ｌｉ　人
、１ｆｆｉ　Ｉｆ　サＬ！ることはむ１１゛かしくなる
。。 −［記欠貞の解決のために（：１、前記第１．第２，１
５１こび第３の主溝２０’ｌ、２０２．２０３４、ｒの
断面が矩形ではなく、法面の底肉部がｉｌｌつ「−ハ１
００の幅トＩｎｌ　Ｕ　（−１該ｊｉＩＮｌ／）　１ｆ
ｔｌ　Ｉ　ｌ　ｒ＋ｌＬ　カｎｊｔ　開底面部の幅より
し広くなるよう’Ｊ　ｒ’？　Ｉｒ看（ｌ・〕るよ）ｔ
「形１１；とするのがよい。この場合には、第１．第２イ１；よひ第３のつ瞥−へ係
止溝３０１．／１０１．トｊ０１内（５−１糸１し＼ｉ
ｔ、　ｌ−ウ−［−ハ１００を、第１．第’ｔ”　ｉ１
３＋１．び第３ｑ）１漏　２　（１１，２０２，２０３
’＼ｉｆ”　へ１　／＋　、”４合ｔ、ｔ　、）　１７
）断面をり４１形状とし、遊びを人さりＬ／　／、Ｉ）
ｎ命と同（Ｔに容易Ｃあり、また該つ１−−ハＩ　００
をｆ＋：　１１ｒ　１ろ場合は、該つ１−−ハ係１１漏
のハ“（２面部にて、前記１°〕Ｔ−ハ１００が保持さ
れるのＣ，該つ１−ハ１００　、！＝該第１．第２　ｄ
３　Ｊ：　ヒｒ（’ｒ　、７）０１１　ｉｆ’＋　２０
　’ｌ　。２０２．２０３との間に１ｊ７７びは生じ４１い。前ｒＨ＋−実ＪＡｉ例に４３いては、ノ［イ１３よび右
ホルダｌａ、ｌｂを１ｌｆｊ形手、［状としたが、特に
正カ形科状に限らり゛、円（１状あるいは他の形状Ｃあ
−）てＯＪ、い。マＩコ、第２ｉ１ｊ　Ｊ、σ２０：ｉ　（１）　ｔ　Ｉ
ノ’Ｊ　’／’　４０　、５０　（１）底面に形成され
Ｉこ第２お上てｆ第３３のつｔ−ハ係ｊ１）Ｉう４０１
．５Ｑ１の子れぞれのピップを、第１のｉ：　ｒＩリア
３０の底面に形成された第１σ戸ノ１−−ハ係１１）呂
３０１のイれぞ１１のビッヂの２１ｆ’としたが、該第
１のつ〕−−ハ係止溝３ｏ′１の−Ｃれぞれのピップど
同一にしても良いことは明らか（゛ある。Ｊの場合、第゛１のキレリア３ｏと第２および第３の１
−１？すｊ’／１０．５０どの祠負が同じ時は、第１　
（１）　１１１．す／’　、”３　（Ｊをちっ（、第２
　ｉｌ３　Ｊ、び第３の＋＋１リノ’４（、）、５Ｑに
代えることが′Ｃきる。さＣ１本発明の一実施例は、１っσ）　＝１−ＩＩリノ
′内１、：　ＩＩＩめＩ）れだりＣ）枚のつＪ−ハを別
の２つの１トリア内へ２５枚ずつ移し換え、′、Ｉ：　
／、二該別の２゛）のギＩアリア内へ２５枚り゛つ移し
１テ六られｌζつＩ−ハ間のビッヂ（、Ｌ、始めの１′
）の１１ノリ１′内（、−収められた５０枚のつＪ、−
ハ間のピッ゛１の２（ｉ’ｌてあった。つＪ、す、釘１１の〜トリアへ１１Ｖ、１内（＼ｉ’１
．　（いＩＪつ１−ハの枚数番、１、第２Δ３よび第、
′）の１１ＴＩＪノｌへ１１マ納された枚数の２イｊ１
（あ）　Ｉ＝−、、。しかし、ノｔおＪ、び右ホルダ（、叫杉成され／、−ｉ
Ｔ！　２σ）主溝を、多ｒｉ　１の’？”　ｆＭの一咽
（＋２　）Ｊメハ（、−形成りるとともに、もう１れ１
の前記’（’Ｑ　２　（１）　十、　ｉＭと同形状の第
４０主溝を前記第２０）　ａ、’、　ｉｉ’ｉが形１〜
（＼れ（い１．１い前記第１の主溝の他端に２つ、）メ
い、１．二形成し、：ＩＩ　Ｌ：、ざらに第４のキ（・
すｊ）を′、’Ａ　ＩＪ　、　ｉイ１２．第３４３４．
’び第４０）キトすｊｌに第１のキトリノ’　１．Ｊ、
　Ｉ七成され！、７第１のウ−「−ハ係＋Ｌ　ｉ笥の３
１ｆ１σン１゛・ン１に了’ｒ　２．；４！　：”！Ｌ
１３　Ｊ：び第４のつ］−−ハ係１ｌｉｉ”ｉイ１形成
し、１．ヘク゛１′１１のつ１−−ハ係＋Ｌ、　＋Ｍ　
（Ｊ）　リｌ＼テカＨ’ｘ　；Ｙｉ　’）　、　’、’
ｎ　：３　Ｌｌｒ　、１．７Ｆ　第４　（７）　Ｉ）　
Ｊ：　Ａ　係止ｉＦｉ　Ｕ）　ｇ　１４　ＪＳＩ　Ｉ　
Ｌ二Ｋｌ　ｆｎ　１　ｄ、＋　、Ｌ　’＞　ＩＪ１〆１
成りることにより、前記化率を３倍にすることが（シー
＼る。。一＃シに、’ｈ、　＋３　Ｊ、び右ホルダに形成された
第１お、Ｊ、び第２のＪｉｉｔお、Ｊ：び法外Ｊ３よび
イ１ホルグの形状を自１１１　ｋ’−、’＜＝形りるこ
とにＪ、す、本発明（，１５、これらの！：１１ホ的イ
；　ｉｋ　ｆ！ｔｆ　ｌ−、ｉｉ＋ｌ約されず、１　ッ
Ｑ）　千Ｉｒ　１，１７’　内（６−１ツぬられｔ、−
Ｘ枚のウェーハを、別のｎ個の一１トすｌ′内ｌＸ、Ｘ
　、ｒ’　ｌ１枚り′つ仔し換え１．１、！、：、該別
の１１１１、ｉｌのＩＩ・リア内へＸ７勺１枚ず゛つ移
し挽えられたつ１−ハ間のビッヂ【ｊｌ、ｊ）ｆＨめの
′１つのキトリア内に１１１４めらｔｌ、　／、＝　Ｘ
枚のつＴ−ハ間の１７１０月１（ｊｌにりるｌ二どがｒ
ぎる。また、逆の操ｆ′１にＪ、す１１個のＩＩ・すｊ′内に
Ｘ枚１「つＩＩＶめられＩ、＝つ１−八を、別の１つの
キｔ！リア内ｌ＼１１　・Ｘ枚移１）換え、；１．ｌこ
該別の１つのキトすｊｌ内へ移し換えｌ）れた１１　・
Ｘ枚のつＪ−−ハ間のピップ（，１、始めのｎ個のキト
・リア内にＸ枚り゛っ収められＩ、：ウシーハ間のヒッ
プの１／’１１倍にりることができる。（効果）以上の説明から明らか’、ｒ　Ｊ、）に、本光明（・ｌ
　、Ｊ：　ｔｌば、つぎの、）、）な効果が達成、Ｘれ
る。（１）　キトリア内へ収納さ１１　／、　ｌ’ノ１−ハ
ネ曲の１ｐリア内へ自動的ｔｒ移１／／ｌ　／ｌでて）
（−が−（きるの（、該−シ　、「　−ハ　を　ンク　
し　ｌζニ　リ　、　ｉｌ７１）（）　人−をン　、　
（１リ　る　い　＋７１破に１りることかなく、：ＩＩ
、°該移１色えかダｊ１！千′、１、く行なわれ、経湾
的（δりる。。（２）−１−＋７すｊｌ内へ収納されｌご・、゛ノ１−
ハの結晶１ノ位をそろえく）ことが（きるの（、各（Φ
＾ｌハ理がｒｉＦ率よく行なわれる。４、図面の（ｍ　Ｑ！　’−′ｒｒＪ２明第１図は本明
朗１図実ｌ１１１！例のＩ１１イ略１１面口、：１２図
はノｊ　＋３　ｃｌ：　ヒ右＊　７Ｌ／　’ｌ　Ｏ）　
ＫＴ　？ＩＩ　ｆ’ＪＩ、第３１ｍ　１．１　／＋　Ｊ
＋　Ｊ。び右ホルダが第２図の状態からでのヌ・ｊｌりる部分が
上向さになるＪ：うに／Ｉ！：５１θ回Φｉ、　シ／ｒ
ニオｌり剋１４、第４図は左おにびねホルダが第ｒｔ　
ｒＸｌの払（ｊ、ｉからイのス・１向づる部分がＩ悄「
りきにイｆる。１：　’ｒに９０度回転しＩＣ状態図、
第５）図はノ１おＪ、び右ガイドの詳ｔｌｌ１図、第（
３図は第１．第２および第３のキＩ７リアＪ３．Ｊ：び
ｒ　−−１ルの８Ｙ細図、第７図（ａ　）へ・（１）は
つ工−ハの移し１φえの手順を示１説明図、第７図＜ｍ
）・・・（１））はつＪ−ハのｌｊ向をそろえる手順を
承り説明図で（５る１゜ ’ｌ　ａ・・・）１ホルダ、１ｂ・・・イｉホルダ、２
ａ・・・１刀（ド、２１）・・・右方イド、／１・・テ
ーブル、５・・・プツシト、Ｆｌ　ａ・・・ノ「回転軸
、ε３１１・・・右回転軸、３０・・・第１の−１−１
−リア、３１・・・第１のプツシｔ・穴、／ＩＯ・・・
第２の１＋７リラ７．４゛１・・・第２のプツシＩＩ穴
、５０・・第３のＩＩ７リノ７．５１・・・第３のプツ
シＩ７穴、１００・・−ンＪ−ハ、１０１・・・第１の
つ１．−ハ、１０２・・・第２のウェーハ、’＋　０３
・・・第３のウー１−ハ、１０／ｌ・・・第４のつ１−
ハ、２０　’Ｉ・・・第１の１！ｒ１ｉ、２０２・・・
第２の十ｉｉｉ　。２０３・・・第３の干満、３０１・・・第１のウェーハ
係１１−ｊ苫、／＋　０１・・・ε０２のつ誓−ハ係１
１）１１′１．５０１・・・第３のウェーハ係ＩＬ　！
＃“１代理人弁狸十　′″１′木値人　夕１１上第　１
　図（第２図牙　３　図牙４１ン１第５　Ｎ７図（ｂ）・ｊｄ）第　７第　７（１）（ｋ）８ａ１ト１ａ１ｂ十ト８ｂ０−６・　工５（１）ト（士Ｉａ　１ｂモレ８ｂ ■、６ａ５−Ａ−６ｂ〜■ （ｍ）（ｏ）図（ｎ）ａａイ１１．　ｉｂ〜Ｂ−ｓｂ８ａ）７ト１ａ　１ｂ（Ｂ７８ｂ[-ha, something else? ! (1,-,!,(・
) is formed in other Kirelia 1=, in another hip, shape %,! 41゜) Transfer to part i 1・■ Mouth i'-
7f, twa/i C1tL Ll,' 1. rrai1゛i. A conventional example of the above operation is
- Use (, when a person directly performs -4
The distance between C is constant and C11-Thria is 447'i.
Place the second 111 lino' in close contact with the first lino' so that the two [-C insertion surfaces 1) are facing each other, and Make sure that Lelia is on the side and avoid C1 (move -8 from the first 1'II Reno' to the second 11?rear). In this case, the operation is also for a person to dry the V Nidoria -) U line/
, i (was. But before)! In the next example in 1 of 13, when transferring the carrier from the first carrier to the second carrier, the carrier is contaminated by 1 stroke; 1st #
J, and the second -P t+ rear and If Fl! In particular, there were defects such as scratches on the T-Ha (=Jl stiffness, missing lJ, or damage caused by dropping the J-Ha on the floor. In particular, the first And in the case of the operation in which the second rear is brought into close contact with each other so that the two sides face each other, remove scratches and scratches, etc. by R1; 15) Remove dust. C J, -7 occurrence 11- causes and % ”-(
I'm here. In addition, C lid t2 is bad when a person directly operates, 'l' Q (Ho'FJ (T-expenses'-flaws such as stomach t>it'+ -) /J. (Objective) This invention Except for the above-mentioned drawbacks, IXJ is 1.': /
The purpose of the first II Reno'
inside (, “first pitch” (relistened), second pitch
11! In the rear, the first pitch J'U>'It
'KQ lrX:1. /,: tyoff1lz Move so that it is arrayed at a pitch of a few fractions! /I, in the case where the 1-c is (τ, 1 1.J /, -ri, stain I,: transfer safely without sipping 241 lines 4-,
And the transfer 1 (r・e time 4g'), i7 contract, ri l 14<・1<) of 1. “Good ji;:) /f white movement 1-
In order to provide 155 milling spaces, the present invention (1, -ε
Push p holes i3 and I on the bottom of the if-
, l+'T, and the second Kitosu j/, which formed the 11 grooves of 1 side of the garden (, -f Tsu), li J, and the 11 grooves of the bits i-ha. , the II.
, That ki!・A hole of approximately the same shape as the hole 1 formed on the rear bottom surface is formed on the table 1, and the wafer can be inserted and locked in the direction of the table 3 and 1. ! M and a set of holters that make 11 a specific hip (1'/directly a>rutsu 1-a second main that can pass through tJ) h and rotate the holters! - (a holder rotation device for selecting and rotating the main groove; and a phase for rotating a third main groove, which is positioned on one side of the holder and inserted into the opposite surface of r. a guide for raising or lowering the guide, such as a support frame for supporting the holder and the guide, and a guide for raising or lowering the guide, located below the table;
- Ha up your back or down 1! Do you want to press that button up? Mar (2 is I-Sosaku↓rubu-unshi-t-te-id-f-equipment, said-ra-f) and support frame, +3 J: Bipusshi 1? Ui M^ is unique in that it is a device that moves the objects relative to each other. (Example) The present invention will be described below with reference to the drawings;
Figure 1 shows an embodiment of the present invention q) Approximately F8if'! ...1λ
l 'P 1t6K) 1, J3 in figure '1, not t holder 1a o', ry, (1r1-)1 ivy 11 shout,
``(to have a square columnar shape 1,11/'(1, the 7-l
i At both ends of the holder 1a
cl) 1rfj JI5 FJi ir+i's center line extension' to its rotation I11+ and 4T ru 8l"l 'I'A
('Ill B a protrudes, and the right holder '11
Both ends of 1; 2 1.1. , i'i 1:+holder 1
The center line extension of the square 1 and 1 side of () is 1 g i IL-'(σ
) The rotating shaft 81), which is the central axis of rotation, protrudes from the comb 'Va). Day 1 le 4 medium heat l, fj f: I'21 indicates 4'
There is a frame with a width of 1° and a width of 2. The support frame is of the type 1, 1. I) 1.+N
! +\ゝ)) zo: -1, (y(1) is applied to the /i rotation axis F'j; l so as to maintain a long interval., the fi: loi LL the throat 1. J Leda l
a (+3 J: and right holder l b rotates 1 right t;
-, ', r Z+, 1, -) is made (fit note) i:, 7 Torda 1a and J, and right holder ``1
1) side on the same side as 1. Left rotating shaft 8 B
J, '; J: Right rotation axis 1111 +, t, Y -/
j is fixed to the support frame and connected to a holder rotating device (not shown). The holder rotating device 4 rotates the left holder 1a and right holder 11 to , right holder 11)
The inner claw can be rotated in any direction symmetrical to the plane of symmetry. /i-man (1 near aoj; biname sword-N'2111 and 7Ji type 1 form tic L/C. 111) and above the holder 1a is the h guide 2a, and the right holder 1
On the L side of 1), the right guide f 21) is lj/same, if the guide 2a and the i guide 2 +1 keep a circle 5 or narrower spacing than the outer diameter to 1-. , the support structure is firmly observed. The support 1217 frames t and L are movable in the 2-to-1 direction τ-1- and Fij directions from the guide field (not shown). 1st (7) ::S" Iy IJ 'jν30 is installed in the center of 4.
P Reno'40 is the left side of the 1st IJ Su7'30, 3rd day l Reno'! 'i 0 ILj, -to;0
On the right side of the ``1-1'' aria 30, the ``1st l'IJ Reno': 1 (3) and J3 (are placed in the table 4 at regular intervals. The daple 4 is shown in the figure. Showing 10 "i' = fru transfer II
By IJ11-t] I゛ can move to the right (・n\
3゜1-)'j(, 2(maf・nゞ〕Ir!i) of the first Killeria 30 is installed (1. By purchasing one stomach, -11. .: Ura] 1st no. day iii'+ and enter the corresponding key 1?Case 7 (2 and (
−; '(! 3 (1) l ) - LL right below rear 50 [l - La (31+ is aU If/
i was ((the first and second 11-la F')
:+, ('j l+ 1. L l'71 shown 11, no U-ra drive 9) r 'A position' 2 V), 1iil'?
i1. For old J, U, 1; J, IZiPIl is available. Fig. 2 is a detailed view of h AS J: and right holter la, 111, and Fig. 3 is a detailed view of ra3 and right holter 18. lb is 1/l in Fig. 2, ff4 to r', I3j right rotation axis 8a
, 8b, in the center, the holder A3 and the right holder la.
, lff145 so that the opposing parts of 1b are oriented in one direction.
1 ([I show the rotated state I, : State diagram (゛ (6 R. M1.: Figure 4 shows that the left and right holters 1a and lb have changed from the state shown in Figure 3 to li-J and clockwise rotation. Rotate 901.!'J around the shafts 8a and F3tl so that the opposing parts of the left and right holsters la and il+ are facing downward.
It is a state diagram showing two offspring. rjl 2 M, ri13 Z J,) Yo (f 41st
"I L J7 I T, the same arches as in Figure 1 have the same or equivalent parts. In Figure 2, Ul (a) is the same as in Figure 1.
: Front view of the right boulder la, lb, (1)) is the same view (a
). In Figure 2, C1 left small rudder 1a and right boulder 11
Therefore, the distance between the openings on one side of each of the opposing surfaces is 1 (outer diameter of 1)
There is. GEL is placed on the opposing surfaces of the left holder 1a and the right holder 111.
. The outer diameter 1), J, Su0ya) and wide interval P
'I provide J: Eel first major groove 201 is >11
Shape (, two, and the same i-togami, J, rim Xゝ)・
1ゝ) Widely, ゛1st 1st table νsj' 30 stored in the number/,'lJ same bitsjir, q, ta table 1
Against Jj ii'i jj direction i, l formation, \reC
There is. For example, the first Ef12. 3rd il; ,L (dr
i 4 no Tsutaku-A 101 , 102 , 103 , 1
0 /I L, L, I'l'l Oh ml's Lord Pi
1m passing through 201, 1. ri, 11 small ruku i a
Lost the distance between it and the right boulder 1b, towards 1'1lAij, -),
You can move freely upwards from 1 Lido h, or (3!, 10,000 days of jφ in A~) 1・I17\. Formed in the left holder 1a to the 1st σ river 111 2011
J, as mentioned above, is stored in the first:l-+7sj' 30 (the number of J-1-C). . Further, the first main groove 2011; second is the same width as the first main groove 201, and the width of the second main groove 2011 is the same as that of the first main groove 201;
From the bottom of + to the center of 3a F['i p! and the bottom surface of the groove A forms an angle 1σ of 45 in the direction opposite to the bottom surface of the first main groove 201. In Fig. 2 (11), C is the second main 1 of the left boulder 1a.
m 202 is the C even number number counting from 1 in the drawing [the first of 1]
The first main groove 20 is formed in the right holder.
1b, stored in the first Nireria 30 as described above.1. ~ It is formed as many times as there are f.
The first main groove 20 of fl'1 is located at every second main groove 20' in the left holder 18, facing the second main groove 202 formed in the left holder The same width as the main d420'I is from the bottom of the groove to the center of the right rotation shaft 8II.
The center of the rotating shaft 81);
(7) Bottom surface IIT Fit IJ 1ril IL,
4511'j +7.11 Angle rQ <? 71 Q
A second main groove 202 has been formed that covers the Q. In Figure 2(b), Jj i'C is /[ho JL/ f
l ll ) The main groove 202 of rN2 is formed for the first three ttM 201 of 100 to several λ in the drawing [ ] 41? There is. Fig. 3 shows that the left o, 1; The opposite part of the is facing - J: Sea urchin, sea urchin 1. j i',
, l is also a state diagram rotated by 45 degrees in the direction of the j arrow B/N.
This is a top view of Ll 1iil l'71 (a).
1st in 1. Second. Third and fourth glue 11-ha I 01 . 102, 103.10'l l;t, i11'1t)l
i A; J, Tf stone right Horta a+, formed in 1b I,
] No. 117) 1. - iFi ';' 0 'l L
l,'. In this state, the 1st, 2nd, and 3rd A evening,
J, and the fourth part - C 101, 102, 103゜104
is 1φ person (as mentioned above) 1 OJ, and right Horta 11, i
The oppositely facing part between l+, J:su, the oppositely facing first earth: M 20 'Distance between the bottom part of the I side to the N1 beam (19
(), (-re 1) 2 times, P 2 < +), the line f'1 is λ (there is 'C'd). 21] 1 Figure 1; L, lj +13. right volta'
l a , 1 b lfi Left J from the state in Figure 3
3 and right rotation axes 8a, 8b as centers.
43 J, right holster 1a, 1L+ so that the opposing parts are facing downwards, 1, etc., arrow Cfj
I will show you how it rotates 90 degrees in the direction. Figure 114 (a) LJ il: Top view, Figure 4 (11)
is a plan view of the same figure (a>. 1. One thread is fastened to the '1st main groove 201 formed in the first hole la and 11+. However, the second OJ: and the fourth one ``-ha'I 02. The second -1) 11□+
:,' By moving (1:,'), it is possible to move between the above-mentioned No. 1; freely move toward the direction 1IIIj (there is C in the side. In this state, the 1st, 2nd, ε'f13, and the first wafers 101, 102.'+01'1.'IO/l is 1Φ person (said!e#3 and right bolt ia, lb
The parts facing each other are shown in Fig. 4(b) k-J'S (counting from the bottom of the drawing (odd numbered [ ]) 1-C, 1st, 1st, 3rd). Ding-Ha101, '+ (1:
t is Okito, \11. (In the part where
+1”l ?cl+-1, 1, counting from G on the 1st side-
11flf number 1-ha; I: ri 2nd. Fourth
Notsu 1-Ha 102, 1f) 4 is 1Φ person (there is 1; 1
; +3 in minutes is the second 11th. Mae na ffi 1 (7) Main iM 201 Between V
I'nl 1. L No.:'(Figure(,: ,l; IJ
]) 2C, but the above +2 main groove 202
The intervening Vli Fil is defined as Pl, P 2 < 1)
< 1) The line I'1 that makes 1! '7 has been given. Figure 4j is a detailed view of the right guards 2a and 2b. J, σ Right - (Front view of Do 2a, 2i, (
1)) is a plan view of the same figure (a). . 5) +3 in figure 5 (, the same sign as in figures 1 to 14)
is Ir1l −;l, 1. - is 1111, extending d around the equal parts, 7 left guides 2a and 1: 1 guide 21) facing each other (the distance between the surfaces is the outer diameter of 1 to 3)
), the ttQ and C are also set at slightly narrow intervals. On the facing surfaces of the guide 2a and the right guide 21), there are 1) 11th U-[-C Sunset ¥1] Yot') 1) and Y) Wide intervals 1]
The third l tM '203, which offers 11 pieces of
ri, 1j shape, bracket J-c thickness J: Rimo X'J
lも) Wide, 1st 1-I + 1-J to be stored in rear 30
--The number of Ha is 11 times 1r Tsubu (-1 ma Iko, -j---
1 Formed in the direct force direction of 'Q' against 4
b formed 41 to the first σ scale 1-11 to 2 ("li
(!: 1iil Lfffi is present, and the third main groove 2 (1:" cross-sectional shape (, 1, front F + d m 1 (1
) gt-, +14201 (7) n-plane 1/i tol1il L; L knee formation +:\:ltC. In Figure 5 (1)), the third :I of 1 of 1 le 1 side
HH, 7203 to 1st. Second. 3rd +3. , L
and the first u-[-ha10'l, 102.103. Ml/
I or 1φ person is \. Said 1st. Second. 3rd A3 J, and 4th 91-c1
01,'102,103.10'N,1 1 of the above :)
From passing through 203, ノ1ノJl'l・2 n
,! −,,'N sword id 21) Between which direction in the direction of the arrow,'
) :I: t'l l・ノ°+/+日) Towards one direction, or from upper 1 no to lower I/\own mountain 1. -Movement 1; 11<, monkey, 1 Figure 6 shows the 1. ri) 2 O, J, Bi: T! 11 nori of 3! ! 30, 40.50i1LI and)-nor'I
crBT Agency 111 Figure 1. 1B6 Figure (a) I; t, Figure 1 and l1il 11 '
1. 2nd A3J, and ε('r30):IIr')i'
30. /I0.50i13J: and iL plan view of table 1, FIG. 6(b), and 4J plan view C of FIG. B) In Figure 6, (13) (, go to Figure 1, the same symbols as in Figure 5 are the same [, refer to the L equivalent parts]). installed in the center,
The second key 1T rear 40 is the first key rear; No. 1 of 30
- side, and the third part 1 noria 50 is the first part:l-
, +-IJ 730 to the right, K m 1 'l)
：#I□') 730 and FM for a while, and the setting was changed to 7-bull 4. l'l'l CL! A 11-11 Lino 730 (The cross section of L A is not concave, and the wafer is stored inside the concave shape.) The distance between the opposing inner surfaces of the side plates is The outer diameter of the lenses f and -c is 19 <> larger than the outer diameter of the lenses f and -c.A first hook hole 31 having a rectangular shape II is formed in the center of the bottom surface of the 'first one Torino' 30. J2, the side plate (1-
Descending A (on the opposite side of the first push p hole 3'1 is the first one of the locks I11) - C lock fM,
301 is formed. The first push-p hole 31 is -f on the opposite side of the first push-p hole 31;
1 This is the number of Ben\tsu 1 Ha stored in the first 111 Reno 730 (formed J. Also, the number of the first 1-Ha relation IL!!'+ 3 (,)
1 to gate 1, front', 11 left i13 and right boulder ia,
111: 2IIIi made it /, = first A groove 201
, r13 and said left o, I()i1 sword 4 i” 2
a. The 30th fi+′+ 2 (1:′
I L: li'ilbi...)f(is formed. Said first 1 J-ha relation +1. li'+ 3('l
If a part of i 1.1, tsu1-c is inserted there (,
-1 1°/I-H is supported so that it does not conform! i"+ r il□+runo (, the shape of l is the shape of the person of tsu■-c, 11 rurui 1.1 shape + ll, 1-) (there are things that are carefully determined. The front sound 1u11 no 1) .: In the j-pull 4 where the Noria 3 () is installed, the shape is almost the same as the hole 3゛1 in the hole 3゛1 formed in the first corner 7:30. A push 17 hole 311 is added. The 2113J and the 3rd = 1-17 rear/10.50 are similar to the 1st 211-s I30, and their cross section is concave. The inner surface of each side plate is larger than the outer diameter of the door opening (1). Said 1st, 2nd and 3rd Ki I2 Reno 730°40.
50 Hatsu ``-Ha's place Llll!-, 1 culm is used for a different lifting platform (-4 suru nogu, (4j11 formation, month 7)
1 is often 8Ishi. Well, the rli Ml of the opposing inner surfaces of the side plates are the same C, but the 6゛chisakene IJ'1]0 of the side plates are not the same. Said 2nd J: and 3rd 2111 rear 40.50 (,
1, n11 Formed in Kirelia 30 of 11 [first push turtle/hole; second hole with the same shape as 31]. S3 f-fushi 1
The ν holes 41.51 are the second and third a)=l Torino'
40. 50 is formed in the center of the bottom surface of the second +7/IO.
7. ) Pressure 11 hole 41, the second one /' /l
i, 1. on the opposite side parallel to the side plate of □. , Tsu [
A second wafer locking groove 401 of the first wafer locking groove is formed. The shape of each of the locking tM 301 is the same, but the pip of A is the l?l 'r shown in the figure.
t, said first part 1-c relation 11: if'i,"
21 of 301? X (- exists. Also, each of the second
401 is the first thread I
4Tl) Bottle 1. l; [4: ``'・1, 5K /, A deviation of the + plane is absolutely not allowed. In Fig. 6 (b), ! Said first T-Ha 1 yarn IL tF'i 30
1, the first pano 1-c coefficient If of the even part 1]
! #Invasion 101 l “Side extension 141! +l 1 and 2nd T
- Part 11 - 401 is placed in position 1r'7 (there is).・SuF2
A second pushbutton (hole/11) which can be formed in O is added with a pushbutton register <4' I-1 of approximately the same shape as the hole/11.
The third key 51 of the third hole 51 is drilled.
7. On the opposite side facing downward from the side plate of the rear 50, there is a number 317) ``) ``) +: -Ha 11) +'
i 5 (1'I force formation c"c tt C (1'). The third locking groove 501 has a respective shape; +1iM 301. Each 17 of 401 Q) Shape 1iil L; ”C゛i
t5 le. The third pip]--C relation 11) Old 501 pip- is the first (7) +, 7:t-C relation If groove 301
(7) There are two of them, the second T-ha mooring groove 401
Both of them are the same. m 6 Figure (II) C1 the third Wu Ji-Ha] 1
No. 1 - C relation II - Groove 301 k 2 sentences, 1 response (, the odd numbered number [1's first I - C relation If, fM : i 0i
(1 side Chi 1 "((it it l t; f rank is bought" (Iro.) If !M !i
D11. L, second wafer worker 1j-) whistle 40゛1 and same l]2, and its first wafer worker It W/
+ 3t, i l's same line 11+-, <+'11, vertical deviation t,), break・)1 11
．． /self),. 1' + ii 3rd Ki 11 Reno' 50 is 7. The jth °゛? Sa1'1 (iro) - Also in pull 4, the 33rd 8 I7'
) −j'! i 0 k-115 is made (the third push (・hole 51 and (,lSL times!l>Ul's/゛・
・L hole 51T is 71111 [(1, C,
Referring to Figure 1, Il, 1) (, -17-/L4 medium heat section, 1 rope I), 1st III Reno'rl
(Illustrated in + 1, h, 4 'A fi frame:
,,1. Il, no 1; J, 'U right boulder ia
, ib holds 111. -\'''1 k, -, J'<)
, , 1.1 and right holder la, llt Ihl;-ノ+
;17 j(7'(+sword (1'2a, 21+ is supported). , right guide 2a
, 21+1; two formed/S third main) M 203 d
3 and 1st 111 Reno': Formed at 10 I this 1st
The U[-C ratio It tl'i 301 is formed by the same number of lnl pips. The first groove 201, the third groove 203, and the first I-H lock vIS30'l are the same as the arrow a5 in FIG. 1-7
'J direction/) + 1 If the direction is + 1, the vertical direction of each groove should be aligned with 4.'In other words, the first -IIr direction Each of the first J-HA locks tM 301 formed in Heavily put on his back/,: facing, phase 3!l shown in Figure 2 (the first JE I which is directly related to fZ)
V through M201,
Figure 15 (orally transmitted above 11 and right guides 2a, 2b)
The third: r i%'i formed in !!I"i will be explained. Figure 7(a)-m7(1) LL, M transition 1.S, t,
a>: This is an explanatory diagram in accordance with the order of 1'. A3 in these figures (, Figure 1 - Same as Figure VO6 (
7.It number is the same or equivalent part.Uu
Sru. Figure 1 shows the state Qli of ni K/I of 1-C transfer λ as C
1u11) I'm in the middle of the day. First day! Rear 3011 formation 3 years old t 1: Go 1'1 notsu [-ha anchoring submarine 301 t;L
50 fill is formed 2S 4'L (u all, the 5
Group 0's 10th U-1-Ha Section'I IM 3
150 pieces of r---/so 00 swerves.
L ((+)ru. Left rice and right holder ゛1a,'ll+o, 1, σ no 1+
, 1. () t+jJ-(dos 2a and 2b are shown in 1 diagram,
\1), /Self'1 point 11rrit14i'' Llsu, 1st
Ki Il Riff! 30 l III) neck, kilt
((,
1,) is in the state (6. Figure 7 (a) - In Figure 7 (1), the number p (written in the 1-box 000 yen is
It shows the number of sheets. Figure 17 (ark: oi-(, the support frame not shown in the figure is lowered by the second guide rj? lowering device, 9”l a
. When + 11 approaches the side plate of the '1st 117 rear 30, the support frame stops 1. The first turtle, which was located below the rear 30, was blown away by the dorsal descending stomach (not shown). The Pushi I75 has 50 sheets of the above 1-10
0 and J-ha10 (,). The pusher Ir 5 passes between the first main ff'7201 of the first part 1-1 and the right halter 'la, ib, and the 'LS'
2++ No. 3: In between the main groove 203'
CC stops. In Fig. 7(b), the holder rotating device (not shown is described above) is shown in Fig. 7(b).
+, the part of the left and right boulder 1rl, ill facing 1 is 1 rising ril J: sea urchin, tsu j, ri arrow [3/J direction 1;
-, 4ri lTr rotation/l: Avoid. death! ,-ga'
l, above) i', i13. ,l,bi(i holder'ln
. 11) is J in Fig. 3, eel-shaped (1B). In Fig. 7 (c), (J3 (jl, the above-mentioned Bushito 1) is changed to +ML, front, ', [! '/-
Stop when you reach the top of Nol 1. 1 above 50
One piece [-ha 100 l;1. , descends together with the f-seat 5, and the left j: and i-j holder '1a. The first cat 201 formed at 111 hits the 9/1 direction 1ro 11' (. face 9h part, and the bottom end part (21 thread 11), 1 In this state C support frame is 1-Affect. J-!ji'-LL, 1) r1 No. AE, J, bii
Hol<l' i n ,'l tl Ll) l; The end is the first. 2nd and 3rd (D l +・Lino':
10. /10.50 side of M゛ (anti-J, 1'11i)
i:':+II'/ iiF/ I+Two cars vt
1η (711 7゜Fig. 7)
--Move to right fj by pull move J purchase fh-! Ill. The movement is continued until the second 1-tooth 7' 40 set in the j-pull 4 comes to the position 11 of the frame on the support 1. 11I The support frame is lowered onto the guide stomach lowering device, and the above-mentioned No+: 63 J:I boulder 1a,'lit
When approaching the side plate of the second Kirelia 10, C
Stop. In Figure 7 (0), the front 3 is Ll /, :'7"
'Full 41, to move to the right 1j, move to the F/'j of the second -P t rear 40. I'm back up due to stomach decline. and,! The bottom surface of the T12 kitosu 740 and the j-
The second hole 4′1 formed in the pull 4, σ
Pass through 41-1- and reach the above-mentioned "Jri J" and the right boulder "Ia".
. i At the bottom end facing 3/1 of the first main groove 201 formed in I+, the 50 pieces
The upper part of the wafer 100 (contacts with the wafer 100)
The seed enters the third +iro 203 formed on iV Jj and right guard r2a, > river). At this time, i'l'I N
: '7 V5 is 10 R (711 ni.
Said left J3 and right holder a, 1b 4, said /i o,
1, and the opposing parts 5) of the right holders a and 11+ are aligned in the direction LJ, that is, in the direction of the arrow C'B. ．． i
, , qi island\l 90 times. However,) (, above) [63J, biijl, le'7 i r+. 11) is in the state shown in Figure 4.
49. σ)・“Let's conquer 100!, Hush 1st f・Nshikame・5 +, 1, Nonshi Il gastrointestinal device]; 1-high i
oo too! 'i,! -1', ni1・Fgf
II A), 2 50 sheets - C1001.L, previous Mut
! l+jl, 1. (J' (+Boulder 1a, 1b
1M part [, Mouth Sashaka') I, Knee H: rll
7) Tj, said left and right Horta 1a, 1 day formation Csa I+ /=->'(i'? pass through the main groove 202 \Rilura's (1, said Gunshi 11!)\ and jL, the above 11 OJ, and the right holster lil, 1Ill
・Part I＼;ir+X, 1・Jru. . However, the first J formed in the nozzle J 113J and the right Holter Ia, lb:
The L-Ha 100 is attached to the bottom 6 of the first main tM 201 at the bottom 11. In FIG. J of
HfM 202 Lj, Soleno 1st Lord in 2
01 (01 is formed every other -C - (-・, 5 above) 0 sheets σ door sill - - HA 100 is -zo'14 father J
At 5, the 25 sheets are the same.
1 + part b) 'v im , +1, and the remaining 25 cards are pressed 175 and then F *y to v:+j. 25 pieces T
-Ha'IO(l l;L, second:1-psu7'
/I (',) and the 120th day I reno'4
The second 1"/ , T:-C+l: M't 4 C-) 1, which is attached to the bottom surface of 0, is locked to each of 1. , nM m
2 (7)-1-171J A/I O bottom and front ii+,! j-'Second pusher hole taught by Full 1/II A3 J: H/11-l'kMrlA
l/, previous iij 25 stopper no. 1-ha 100 said second
After locking the pano (-c) + l i;
], the left end of the left d3 and the right halter ia, ib are the first.
2nd A3 and 3rd KiXI Ritz 30. /IO,!
io's side plate, J-Rira' part) 5: - Do: 1, te 1 1 degree 7th drawing 11) to A3 (ha,
``Table movement where the above-mentioned Nornol 4 is not shown 1'71''・
Self, direct (2, 1, (・) ノ ``Move to Ij (do. The movement is the) I /l/ 'I lshi installation j\4-1 /
, -,'io 3's Kitria 50 is carried out at 1°11. °1.
To the L sword id descending device, 1: sry* (J t descending, this (141°+ ','1.'
'l +14 /+ +l+J, right Horta la, ll
+ or Moe 5j! i'li: Touched the side of i's Lulino 150.
15 昂10. From ~, the third chitrino' 1 of 50
・The push button 115 will be placed in the direction (21-11'C).
Stomach riru. The push rr 5 is the third key IT? The bottom of 50
J, and the IC third pusher 1 formed on the table 4! through the hole 5 'I'!, and is latched to the bottom end of the first, -' 1201 formed in said outer and right holder 'IQ,'I11'; The bush 5 is further connected to the 1 part of 100.
are formed on the outside J and right guides 2a and 2b 8' tt
/= The seed enters the main groove 203 of m 3. At this time, the above push r5 has an upper bound of 1? Stop. In FIG. 7(j), A3-C indicates that the guide rotation device is the same as the one described above! "And the right holders 1a and 1b,
and the opposing parts of right holder 1a and lb are facing upwards.
:Uni, Tsu;1 Rotate 45 degrees in the direction of arrow B. Therefore, (the above-mentioned outer J: and the right holder 1a, lb are in the initial state, [J in Fig. 2)1. 7 (k) The above-mentioned Push It 5 is the "1 and 10 years ago, 11 months ago.
125 pieces 1-ha 100-f,, + the Zo-fushi 115
-c:;-to descend. The 25 sheets - C 100 are f)'t it+3nor
,' It was formed on the right boulder 1a, 1h.
1 J:, ! F+ 2 (passing 'l i, outrageous J
, and descends to the 1 side of the right holder 'In, il+, and is then inserted into the 1st j' E-10 of the above-mentioned Ibi). Said 25 sheets J-Ha1001.1. , said I1:1. 11 and 4I are provided on the bottom surface of the rear panel 50 (3rd C) respectively. The pusher 5 is the bottom surface A3J of the 7117) Lt 'I'
+= Installation, J') Shil: No.:'S'7i f Pass through the Rasha hole 51, Ni 25 +9. ``゛ノI-・
If tM 100 in front of 3f and 3rd 1-c! '
After reaching 11 on +01, the descent was stopped. Thereafter, the support frame is attached so that the lower ends of the left and right halters 1a, 1b are temporarily attached to either side of the first, second and third carriers 30, 40, 50 when the kite is being dismounted. Stand tall until you reach a high position. In FIG. 1(1), the lar pull 4 moves to the right from the Tesol moving device. The movement is the seasol 4
The first Kitria 30, which is electrically connected above, is carried out until it is directly under the Tomamomochi frame, and then it is stopped. , 50 housed in the first carrier 30 in FIG.
Two wafers 100 are placed in second and third carriers 40 and 50 installed on the left and right sides of the first carrier 30.
This means that five wafers are stored at a pitch that is twice the pitch between the wafers 100 that were stored in the first carrier 30. In FIGS. 7(d), (h), and (l), the table 4 is moved to the right or left by a lurgle moving device (not shown), but the table 4 is fixed.
Left and right holters 1a, 1b, left and right guides 2a,
2b, pusher 5, and left and right rollers 6a, 6b, it is clear that the same effect can be obtained. Generally, the wafer is a single crystal such as grungium or silitonium, but in order to indicate the direction of the hexagonal crystal, a part of the circular wafer is cut in the form of an internal line. There is a problem in that it is necessary to align the crystal orientation of the wafer, that is, the part of the circular shape cut into a white line shape, in a certain direction. In the above-mentioned operation, the wafers 100 housed in the second and third carriers 40 and 50 shown in (1) of FIG. The direction is different. Below, a procedure for aligning the directions of the wafers 100 housed in the second and third carriers 40 and 50 will be described. FIGS. 7(m) to 7(p) are explanatory diagrams illustrating the order in which the directions of the wafers 100 are aligned. In FIGS. 1 to 6 and FIGS. 7(a) to 7(l), the straight notched portion of the wafer 100 is not shown, but FIGS. 1(n) to 7(p) ) shows the notched straight portion. Further, the number written inside the circle of the wafer 100 indicates the number of the wafer 100. In FIGS. 7(m) to 7(p), the same symbols as in FIGS. 1 to 6 and FIGS. 7(a) to 7(1) are
It is the same or repeats the same part of the sentence. As mentioned above, the 50 wafers 100 stored in the first carrier 30 in FIG. 1(a) are stored in the second and third carriers 40 in FIG. 7(1).
．． 25 wafers 100 are stored in each wafer 50, and the pitch is twice the pitch between the wafers 100 stored in the first carrier 30. In FIG. 7(m), the left and right rollers 6a installed below the second and third carriers 40 and 50
, 6b are turned over by the same sizeable roller drive. The wafer 100 housed in the second and third carriers 40 and 50 is inserted and locked into the second and third wafer locking grooves 401 and 501, but the bottom of the wafer 100 is Second and third pusher holes 41, 5
It stands out a little more than number 1. The upward movement of the left and right rollers 6a and 6b twists into contact with the lowermost arcuate portions of the wafer 100 protruding from the lower surfaces of the second and third pusher holes 41 and 51. In this case, the left and right rollers 6a and 6b do not come into contact with the wafer 100 whose straight portion is at the lowest position due to the crystal orientation of the wafer 100. In FIG. 7 (11), the left and right rollers 6a
, 6b are rotated for a certain period of time by a roller drive device (not shown). The rotation direction may be either clockwise or counterclockwise. Due to the rotation of the left and right rollers 6a, 6b, the front 1, L! which is in contact with the extra-legal and right rollers 6a, 6b! Hard-high 100 is Zonoma 1 ■ Mika's! It spins around. Due to the rotation, the line 11 of the piece 1-H 100 facing -C in the /j direction is rotated 1! to the top of the piece-H 100! It will be done. 1-ha 100 Ill [・
Moving to part f+h L /,: the straight part of the wafer 100 is i;1! ) i-ilj and right [G → 6a, 3 degrees so that it no longer touches 611 / j is -) (, above) "Oh, 1.
and ++--noro i+, (i b continues rotation [)
(1.1 T-Ha 1 (30 stops the rotation of punishment) 1, above left and right 1.1-f] 6a, (51, I
L;l, the wafer'I at the above-mentioned position (the linear part of 10 moves to the lowest r'AI of the 1-ha 100, and the rotation of the wafer (of ・:)+-ha 100 Stop J-Riruma-C
还j4J 1, In this state (, the above T-Ha゛I 000) ti', the product direction is 1 in the same -h direction
lFlλ: c',! :', I:: pat). Furthermore, the above two [-c100 ii'i, 11! it
Place the section in the direction 1. other than under the 100. ．． I/, 2 1 "4 including 1.' i, 1..1'11・ operation ("l becomes (1). m 7 Figure (o) d, IJ i (1, L, f I/ )
1 He ((1) ij'l il; 1 part is in the Fmost part of the z/f l ro front iil! ”, / +-ha 10
(1+, pairwise, above) 1 and J, and right 1'1-ra (+, 6 b 1.1 1, [Rani-, L'R・1-i), by means of an unequalized roller drive. Lawless J: and right low'> 68, Ci 1+ 1.
L,l'l'l uτ! 1 on the straight line part of Pano 1 to Ha 100
) If you touch it, it will be the same as 11゛1, A's 1 +7. ＋I・Stop. Figure 7 (1)) shows "1 nu (+, above) rA3 and right 1l--17 (5n, 6b I;l, above-mentioned 'r
31-L f,g iD”) jJ+j i'lJ
'((directly,) rotates at the same time. Rotation direction GEL, time a
1 direction, counterclockwise ii1 /J direction dora r G J, i. Front=L! 1-10o is the right [1-
La (ia, ('311's same rotation, J, rotation.
Rare lζ dokoro (゛, the above! i' a3 J: biiiil
l'>6a, 61+ stops the rotation of -f. In FIG. 7(p), the straight line part of '/■/'I 00 is located at the top of J-C (, Cl r
L/ 'C is here. The ii'TP and 11 parts of the cooler 1-ha 100 are directed in any desired direction, and the left L13 and right roller (3
a. 61 The rotation of the deceased stops L L k (, the previous formula!), and the right 1-1 6a and 6b go down.Due to the rotation of the J's 1-1, the straight line parts of the 1.-C 100 will be turned in the same direction as the desired direction I-,) I) Re/j. Also, 1.1 of the operation 1- below! j's operation fl,)71suE
O';' to j. and the third key I7 rear '10.50.
I-Ha 100, 10th 'II Norino': within 30 l
(Movement 1) I am completely familiar with the above-mentioned operations, including the λ operation.
i1. , -j, sfl easily j5: formation'r: monkey. Also, the 1st: 1″Relia 30 no W stone Ryo4l＼;'l
+ 2 + third key 17 rear 40.50 IJ /, =
But this 40. However, the first -1-t lira 130
The end (2 installation 1, 2nd = 1. or 3rd -I+? rear 4 +1, ri 0'S middle history 1.2i, (shi(J) In one embodiment of the present invention, tsu1 ha'+ (45 of 10;
+/j "Eni, 1st or 2nd J, and 1st J).
ys/' +30. 40. No. 1 formed at 50; Also No. 1, 1 No. 2, J
, and 2-03 wafer locking grooves 301 , 401 ,
``i 0 'I l, - Each of the locked parts ■ - Hal (304,) ``O, 1, (f right holder la, 1b and) Hibiki, O, J, ge C9 is rLj2a 21) Was it formed? JL (II (7) Eri
'l, 2nd. Ii, 1, (main fi of F f43
? + 201, 202, 2 (1:1 in 1.-1 dwarf or Section II-Sen [hi, or use the opposite means (I, l i″f1-! 1st. 2nd OJ , and the third J-C section 1]
Cat 301, /I O1, 5()I Jj and 1st.
2nd J and; a: L of 3, iM 201, 20
Since 2 and 203 are grooves for holding or holding the woofer 100, the width of the grooves cannot be very wide, but it requires approximately 11 machining. Said '1. 2nd J, and 3rd -1-11 lira 73o
. /I (',), the first . Second
and the third I-Ha relation 111ii301, 401
, E501 11 riit notes 1-ha 100
The wafer 1 thread stopper) 1!1 of the above-mentioned j-rib. -me (2, λ・1 on the bottom of the -1 tria (2\"1
-) (The angle of inclination of the base of the base of the needle j' to the J plane is 1fl@<"L/'
The wafers U and J are tilted 1.1:I on the lower front side of the vertical plane, and the other wafers are tilted toward the opposite side of the vertical plane U5'/=). However, -) (, -1-1r The upper bit between each J-H10° in the rear is different 1. In this state, 1411, front ^1!rc13 J: Bimo holder ILl, il+ J3
Dobinoro 13.1. σ is also formed in the guides 2a and 2b and 1
．． -First. 2nd and 13th main IM 201, 2
02, 20, 'l (1, and I - C 100 smoothly inserted (-J, Gamj [Kishikaku/7). If it is difficult, move the previous 311: 1':'r
,′? +FI+ l'l 1. l,! 7 formations occurred I
IQ 113 +, /;-11
There is a volcano. , 1- As a solution to the shortcomings (, 1114i+-s i
>41. r, 7 IQ k-nori daple/
I, 1 out of 4 bacteria! Tsu ■ - Ha 100 Which intersection line Tohei h ';c Temporary! ';! ,! Axis (1), 1, i
, +t:+ may be tilted by 1n. . 1,",",l'llll
iil:'s 11\('s wafer ゛I 00 is the same f
j directionIJI”i:i”lji,l)! -?) (, corresponding one
．． - Part 1 between box 00 f(31, i' (1)
It will be the same for each rear. Note that if the slope is large (, ゛ is IM Y, 1;
Formed in the first carrier 30, the first part 11 is formed on the first carrier 30, and the above-mentioned) l, j, and right boulder are
a, l l+ aJJ: Bino i' Jj and i+
) 1st 28th, 1st formed on J r doors 2a, 2b;
and third grooves 201, 202. ,203 Which phase λ・!
1171M needs to be adjusted. Also, front) 4: of, J: sea urchin left and right boulder 1a, I
If ilj J, and il iB and right guide 2a,
Formed at 21+! ,: 1st. ffl:115J:hi 3f7) main lM2O1, 202°203'l), when the above 1-ha 100 is inserted, '711J' is formed. When the play (,1, the first and second OJ, and the third +i%S 20
1. In 202.203, there are things C that people do to make ends meet. However, in the game, the first muni, the previous -]] Udo 1 to 8
There is a J3 error in which the 00s are no longer held parallel to each other. The wafer 1 is held by the right side J and the right boulders 1a and 1b.
00 as the 1st. 2nd and 3rd q) 1-c relation IL
tM301, 401, ! Within 1501/\li person, 1ffi If SaL! Things become 11 times more difficult. . - [To solve the problem of lack of memory (: 1, said 1st. 2nd, 1st
51 The cross section of the third main groove 20'l, 202.2034, r is not rectangular, and the bottom wall of the slope is
Width of 00 Inl U (-1 the jiINl/) 1f
tl I l r+lL Kanjt Is 'J r' wider than the width of the open bottom part? Ir look(l・)yo)t
In this case, the locking groove 301./101.toj01 (5-1 thread 1 \i
t, l-u-[-ha 100, 1st. No. 't' i1
3+1. and 3rd q) 1 leak 2 (11,202,203
'\if' to 1 /+, '4 go t, t,) 17
) The cross section is shaped like 41, and the play is L/ /, I)
Same as n life (T has easy C, and also 1--Ha I 00
If f+: 11r 1, then the 1--C ratio 11 leaks (at the second surface, the above 1°) T-HA 100 is held C, the 1-HA 100,! =The first and second d
3 J: hir('r, 7)011 if'+ 20
'l. 202.203, there is 1j77 difference. In the previous rH+-actual JAi example 43, No. 13 and the right holders la and lb were made into the 1lfj shape, [ shape, but especially limited to the regular square shape, ゛, circle (1 shape or other shape) Shape C a-)te OJ, yes. Ma Iko, 2nd i1j J, σ20:i (1) t I
ノ 'J'/' 40, 50 (1) Formed on the bottom surface, the second upper fth 33rd part t-c relation j1) I401
．． The pip of each of the children of 5Q1 was set to 21f' of the 1st σ door formed on the bottom of the rI rear 30 1--c 11) bitch of the number 11 of the ro 301. , it is clear that the pips of -C of the first locking groove 3o'1 may be the same. and the third one
-1? Sj'/10.50 When the negatives of any shrine are the same, the first
(1) 111. Su/' , 3 (J o tchi (, 2nd
il3 J, and the third ++1 reno'4(,), can be replaced with 5Q. An embodiment of the present invention is as follows: 1σ) = 1-II Reno' 1,: III-I) Redari C) 25 pieces of J-C into two other 1 tria Transfer,′,I:
Transfer 25 sheets into the gear I area of /, 2 different 2゛), 1 piece and 1 ζ bit between I and C (, L, first 1')
) within 11 nori 1' (, - 50 sheets stored in J, -
There was a pitch between 1 and 2 (i'l).
．． (The number of sheets of IJ 1-C, 1st, 2nd Δ3 and 3rd,
2 ij1 of the number of 11 pieces delivered to the 11TIJ node of ')
(A) I=-,,. However, the right holder (, shouting sugi is formed /, -i
T! 2σ) The main groove is multi-ri 1'? ” fM's mouthful (+2) J meha (,-forming ruru, and another one
('Q 2 (1) 10, the 40th main groove of the same shape as iM is the 20th main groove) a, ', ii'i have the shape 1~
(\re(I1.1) 2 at the other end of the first main groove) Me, 1.2 formed, :II L:, Roughly the fourth key (・
sj) ′,'A IJ, ii12. No. 3434.
'and 40th) The first chitorino in chitosu jl' 1. J.
I am seven! , 7 1st U - "-Ha section + L i 3
1f1σn1゛・n1 ni ni'r 2. ;4! :”!L
13 J: and the fourth part]--C relation 1lii"i 1 formed, 1. Hek 1'11 part 1--C relation +L, +M
(J) Lil\TekaH'x;Yi') , ','
n: 3 Llr, 1.7F 4th (7) I)
J: A Locking iFi U) g 14 JSI I
L2Kl fn 1 d, +, L'> IJ1〆1
By doing this, the conversion rate can be tripled. The present invention (, 15, these!: 11 H; ik f !tf l-, ii+l not guaranteed, 1 tQ) 1,000 Ir 1,17' (6-1 t, -
Transfer X wafers to another n wafers l',
, r' l1 sheet replacement 1.1,! , :, Transfer 1 x 7 pieces one by one into II rear of 1111, il and place 1114 squares in the 1-h bit [jl, j)fH'1 kitria. tl, /, = X
October 1, 1717 between T-Ha
Giru. In addition, in the reverse operation f'1, J, 11 II, Suj', X sheet 1 'tsu IIV mere I, = Tsu 1-8, another one kit t! rear l\\ 11 ・X sheets were transferred 1); 1.l was transferred to another kitosu l) 11 ・
X number of pips between J--H (, 1, X number of pips are stored in the first n number of pips, I,: 1/'11 times the hip between U-S-H) (Effect) It is clear from the above explanation that Honkomei (・l
, J: tl, the following, ),) effects are achieved and X is achieved. (1) Stored in Kitria 11 /, l'no 1 - automatic tr transfer to 1p rear of the song 1//l /l)
(-ga-(Kiruno(, the-shi, "-ha")
Shilζniri, il71) () people,
(1 ri Rui + 71 failure without 1: II
, °The transfer 1 color picture j1! It is carried out 1,000,1,0 times, and it is stored in the (2)-1-+7 sjl, and it is stored in
Aligning the first position of the crystal of Ha) is (Kiruno(, each (Φ
^l The riF procedure is performed at a high rate. 4. In the drawing (m Q! '-'rr )
KT? II f'JI, 31st m 1.1 /+ J
+ J. When the right holder is in the state shown in Figure 2, the part facing upward will be J: Sea urchin/I! :51θ times Φi, shi/r
14, Fig. 4 shows the left onibine holder is rt.
rXl's payment (j, the part facing i from i is
I'm going to go to Riki. 1: Rotated 90 degrees to 'r, IC state diagram,
Figure 5) shows No. 1 and J, and details of the right guide.
Figure 3 is the first. 2nd and 3rd Ki I7 Rear J3. J: Detailed drawing of 8Y for B-r--1, Fig. 7 (a) (1) Explanatory drawing showing the procedure for transferring 1φ of the hardware, Fig. 7<m
)...(1)) Following the procedure for aligning the lj direction of Hatsu J-C, in the explanatory diagram (5ru1゜'l a...) 1 holder, 1b...I holder, 2
a...1 sword (do, 21)...right side id, /1...table, 5...pushito, Fl a...no'rotation axis, ε311...right rotation axis, 30. ...1st -1-1
-Rear, 31...1st push hole, /IO...
Second 1+7 lire 7.4゛1...Second push II hole, 50...Third II7 reno 7.51...Third push I7 hole, 100...NJ-H, 101...first one 1. -Ha, 102...Second wafer,'+03
...Third U 1-ha, 10/l...Fourth 1-
Ha, 20'I...first 1! r1i, 202...
Second tenth iii. 203...Third ebb and flow, 301...First wafer staff 11-j Toma, /+ 01...ε02 oath-ha staff 1
1) 11'1.501...Third wafer worker IL!
＃“1 Agent Bentanukiju ′”1′ Kiboshihito Evening 11th 1st
Figure (2nd figure 3 Figure 41-1 5th N 7th (b) ・jd) 7th 7th (1) (k) 8a1 1a1b 8b 0-6 5 (1) shi Ia 1b leak 8b ■, 6a5-A-6b~■ (m) (o) Figure (n) aa A 11. ib~B-sb 8a) 7to 1a 1b (B78b

Claims

[Claims] J-ha stored in the -I+ rear of fit jj at the first pitch is multiplied by 1 times (n is an integer) or i/
There is an automatic wafer transfer lF,t!e in which a second bit C corresponding to n times is transferred and stored in the other chip 17 rear, and a plurality of bits I- formed by the first pip -The first bushing hole drilled in the locking groove and the bottom
a carrier, as well as a plurality of wafer-engaging blind vortices formed by the second pip and a second σ-relia with 11 holes drilled in the bottom; A table for loading wafers in the tIη condition on the -1 side of each carrier j' so that the wafer retaining grooves are arranged in a straight line;
)-111) 11 holes drilled in the 10th neck corresponding to the 1ν hole of the f-pull of 7, and l = 13 of the front & ii-pull.
To. The 1713J and 2nd pits are arranged parallel to each other to form a columnar shape, and the 1713J and 2nd pits are arranged in parallel with each other on the circumferential surface of each. The first plurality of main grooves are stored at the smaller pitch of !, leek "-8", 1, σ and the larger pitch of the first and second pitches. At least one set of second plurality of main grooves, through which only the wafers housed at 1! pass through, are drilled with a center angle of 4 [+1'] and a pair of holters;
Rotate the pair of holders according to the circumstances I) U twice 5 (
Shiken passes between Horta and controls Section 11 DII
a holter rotation device, and a (% 10l)
-1 and 8 are placed on opposite sides of each other.
C 183 and a pair of small grooves in the second bit, where a plurality of 1-grooves are drilled for inserting the stored wafers into JC Do..., I'l'l
+jl: 1 woman, 1 Horta OJ: and 1 pair of Ga, Ido, ill /, / 1. , :dokoro', j゛ phases 2 and 1 (
A support frame that supports 1 urine per i'/ti'i°, and a support frame that supports 1 stomach J or 1 l? f saru power・f
When lowering the stomach, it is installed on the ■: side of the 7-pull, and the above-mentioned positioning bull (13 holes above each pusher on the 7th hole) IT+C1, The stomach descends and the T-ha supported by the 17 rear, 13 and the holster is placed above Fj1.
':J, or descend 1! A pusher I7, a pusher lowering device 11 that controls the soil and descent of the pusher, the table a3 and the pusher 11, and the support frame are connected by means of a T--1 thread 11 groove and flat tI. It is equipped with a drive device for relatively moving in the direction 1. - An automatic engine characterized by
- Ha fiX + 1 amount of moxibustion. (2) A patent characterized in that the bits of the 1-H locking ff4 formed on the 1st and 12th kitria of i'+ζ1 are equal. (31 i'ljjijisi'1, 2nd and 3rd main) The said claim 1 or 21 "1" characterized in that the cross-sectional shape of the suspension is trapezoidal. Automatic/La]
Peek into it. (4) Inside the kiselia of one block j, the '1st bi-so'f (
-11'7 11'+C]--C, its IT
I:'i (n LU 'lili Qllko [, mouth/
The second bin f (' fll! which corresponds to n (il!
13σ) Transfer to 1ll rear and install II automatic U1-NOS i? ', IIil! A question formed by the first pitch f; I'l. t. ,, number of tu]
．． - Part 11: There is a hole in the bottom and 1'! , ゛l Push Ir hole right 1st 11 rear, 4f Rahi (L
l+'+fi is formed with the second pitch I. ：Multiple Ur-l
l: Zonshi IT hole to the right《The second Killeria, η
1 for each: +7 'J-70 U, Y-H 1
1-groove is ii'j bond ro,-ll111. l11sa1'
41 ~ uni, juxtaposition state C 1 r 1 rir I on the soil surface of A, Nida) C1) ＼・λ in the hole
-I Lt> Ifru l1'/Repair, drilled pusher 1, hole, and front! j' − nono1noσ)l /'J
IZ, said first and second Ki17 Reno? and A-fi
To,! ``1) It is placed in a flat 11 (column shape), and on the circumferential surface of the first plate,
and 2nd σ) BITSUBU-σ) [The smaller pitch of 1l is stored Iko Harano X) i! + the first plurality of main grooves and the first i13J'; and the larger pitch of the second pitch -7: fly. A second plurality of principal fM of at least one phase that passes only through the wafer tl'1 is offset by a certain center angle (drilled
Rotate the pair of holters and the holder of the front 21st 1 around the axis of 1 to control the passage between the legs and the door 112. True L Iff. of the pair of holders. , are arranged respectively, and on their respective opposing surfaces, the third pip C, which is stored in the first (1) and the second pip (1), and inserts 1=U1-H multiple σ); 1 groove is drilled iL/.: 'IX
J's guide and the pair of 41 rugae, 1, bi1ta, 1
to keep the guide at a predetermined ltl intersection with the phase 'l7.
: The supporting frame and the 10 supporting frames are 1/ζ
l;l. -(; The guide rental device and the above-mentioned -j-
The name of Ki V I of ``I − ', f / and that'' is set in /J under the nol; ij
Then, I took off my jacket and went to work in Japan (FtYir).
Supported by 1ζ no 1 no da, I can't believe it.
lj: 'l-fall 7\l putushire and said putushi 1
・1 stomach 1・Fte tii・control ruru butsusha raising firewood equipment and 1) {1ki-j-'fruo. ”, Biputushi 1? , as well as before. l1! Support 4, 1 frame is moved 11.1χ・1 in the /i direction parallel to the locking groove by 11.1x1, and the table is placed on the surface of O, 1, biu 1＼ constant angle in the plane v1′ almost perpendicular to both planes + Cr l,
+ +1 FI Hit tlη1゛ji\uru f stage J2
L/A: (1 and 4: q.'j ink and 1J ru Shiroko 111shi].-ha transfer 1//!machine,.