JPS57126128A - Moving method for wafer - Google Patents

Moving method for wafer

Info

Publication number
JPS57126128A
JPS57126128A JP56010581A JP1058181A JPS57126128A JP S57126128 A JPS57126128 A JP S57126128A JP 56010581 A JP56010581 A JP 56010581A JP 1058181 A JP1058181 A JP 1058181A JP S57126128 A JPS57126128 A JP S57126128A
Authority
JP
Japan
Prior art keywords
section
wafers
grooves
guide
pusher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56010581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216019B2 (OSRAM
Inventor
Kiyoshi Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56010581A priority Critical patent/JPS57126128A/ja
Publication of JPS57126128A publication Critical patent/JPS57126128A/ja
Publication of JPS6216019B2 publication Critical patent/JPS6216019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/00—
JP56010581A 1981-01-27 1981-01-27 Moving method for wafer Granted JPS57126128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56010581A JPS57126128A (en) 1981-01-27 1981-01-27 Moving method for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56010581A JPS57126128A (en) 1981-01-27 1981-01-27 Moving method for wafer

Publications (2)

Publication Number Publication Date
JPS57126128A true JPS57126128A (en) 1982-08-05
JPS6216019B2 JPS6216019B2 (OSRAM) 1987-04-10

Family

ID=11754204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56010581A Granted JPS57126128A (en) 1981-01-27 1981-01-27 Moving method for wafer

Country Status (1)

Country Link
JP (1) JPS57126128A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045031A (ja) * 1983-08-22 1985-03-11 Tomuko:Kk 自動ウェ−ハ移換機
JPH05291379A (ja) * 1992-04-10 1993-11-05 Kaijo Corp 半導体基板用搬送装置及び半導体基板処理器並びに自動処理装置
US10273864B2 (en) 2015-03-26 2019-04-30 Honda Motor Co., Ltd. Engine-driven generator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045031A (ja) * 1983-08-22 1985-03-11 Tomuko:Kk 自動ウェ−ハ移換機
JPH05291379A (ja) * 1992-04-10 1993-11-05 Kaijo Corp 半導体基板用搬送装置及び半導体基板処理器並びに自動処理装置
US10273864B2 (en) 2015-03-26 2019-04-30 Honda Motor Co., Ltd. Engine-driven generator

Also Published As

Publication number Publication date
JPS6216019B2 (OSRAM) 1987-04-10

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