JPS6215041A - チャック装置 - Google Patents

チャック装置

Info

Publication number
JPS6215041A
JPS6215041A JP60130028A JP13002885A JPS6215041A JP S6215041 A JPS6215041 A JP S6215041A JP 60130028 A JP60130028 A JP 60130028A JP 13002885 A JP13002885 A JP 13002885A JP S6215041 A JPS6215041 A JP S6215041A
Authority
JP
Japan
Prior art keywords
workpiece
flexible hose
suction
blower
opposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60130028A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246333B2 (enExample
Inventor
Senji Shinpo
新保　仙治
Tadayoshi Kudo
工藤　忠芳
Masayuki Horiuchi
堀内　雅之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60130028A priority Critical patent/JPS6215041A/ja
Publication of JPS6215041A publication Critical patent/JPS6215041A/ja
Publication of JPH0246333B2 publication Critical patent/JPH0246333B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Manipulator (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP60130028A 1985-06-17 1985-06-17 チャック装置 Granted JPS6215041A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60130028A JPS6215041A (ja) 1985-06-17 1985-06-17 チャック装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60130028A JPS6215041A (ja) 1985-06-17 1985-06-17 チャック装置

Publications (2)

Publication Number Publication Date
JPS6215041A true JPS6215041A (ja) 1987-01-23
JPH0246333B2 JPH0246333B2 (enExample) 1990-10-15

Family

ID=15024366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60130028A Granted JPS6215041A (ja) 1985-06-17 1985-06-17 チャック装置

Country Status (1)

Country Link
JP (1) JPS6215041A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03166087A (ja) * 1989-11-27 1991-07-18 Matsushita Electric Works Ltd 部品装着機の吸着方法
JP2020142358A (ja) * 2019-03-08 2020-09-10 ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ 機械加工工程中の物質の輪郭シートの支持

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5066174A (enExample) * 1973-10-12 1975-06-04
JPS5973293A (ja) * 1982-10-17 1984-04-25 竹崎　龍夫 吸着移送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5066174A (enExample) * 1973-10-12 1975-06-04
JPS5973293A (ja) * 1982-10-17 1984-04-25 竹崎　龍夫 吸着移送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03166087A (ja) * 1989-11-27 1991-07-18 Matsushita Electric Works Ltd 部品装着機の吸着方法
JP2020142358A (ja) * 2019-03-08 2020-09-10 ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ 機械加工工程中の物質の輪郭シートの支持

Also Published As

Publication number Publication date
JPH0246333B2 (enExample) 1990-10-15

Similar Documents

Publication Publication Date Title
CN210743929U (zh) 承载装置
KR20140129070A (ko) 비접촉 흡착반
JP3642696B2 (ja) 基板保持装置およびそれを用いた基板処理装置
JPH07183261A (ja) ウエ−ハ貼付方法
JPS6215041A (ja) チャック装置
JP4756295B2 (ja) ガラス板の吸着保持装置及び吸着保持方法
JPS63142829A (ja) 基板吸着固定装置
JPH05283512A (ja) ウエハ用真空チャックとこれを用いた半導体装置の製造方法
JP2002110626A (ja) ベベルエッチング装置およびベベルエッチング方法
CN102012646A (zh) 一种光刻机的调平系统
JP4249871B2 (ja) 基板搬送装置
JPH08243865A (ja) Ｘ−ｙステージとｘ−ｙステージの駆動機構と半導体チップ実装装置
TW201805091A (zh) 物件吸載機構
JPH04199655A (ja) 真空吸着基板保持装置の真空配管
CN214335466U (zh) 一种集成电路元器件的新型光刻机
JPH07231033A (ja) 基板保持装置
JPH03256677A (ja) 薄片吸着保持装置
CN220029887U (zh) 一种喷砂机的工件吸料组件
CN111554603A (zh) 一种带孔方形硅片加工传送系统
CN219751211U (zh) 取料装置及光刻设备
JPS60158625A (ja) 平板固定装置
JPH0533012Y2 (enExample)
JP2004106118A (ja) 研磨装置
JP4227208B2 (ja) 半導体製造装置
JPS6325737Y2 (enExample)