JPS6214727U - - Google Patents

Info

Publication number
JPS6214727U
JPS6214727U JP1985104036U JP10403685U JPS6214727U JP S6214727 U JPS6214727 U JP S6214727U JP 1985104036 U JP1985104036 U JP 1985104036U JP 10403685 U JP10403685 U JP 10403685U JP S6214727 U JPS6214727 U JP S6214727U
Authority
JP
Japan
Prior art keywords
wafer
sample
lens
mask
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985104036U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985104036U priority Critical patent/JPS6214727U/ja
Publication of JPS6214727U publication Critical patent/JPS6214727U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1985104036U 1985-07-10 1985-07-10 Pending JPS6214727U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985104036U JPS6214727U (en:Method) 1985-07-10 1985-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985104036U JPS6214727U (en:Method) 1985-07-10 1985-07-10

Publications (1)

Publication Number Publication Date
JPS6214727U true JPS6214727U (en:Method) 1987-01-29

Family

ID=30977155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985104036U Pending JPS6214727U (en:Method) 1985-07-10 1985-07-10

Country Status (1)

Country Link
JP (1) JPS6214727U (en:Method)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64742A (en) * 1987-03-24 1989-01-05 Tokyo Electron Ltd Probing device
JPH0313946A (ja) * 1989-06-12 1991-01-22 Dainippon Printing Co Ltd エマルジョンマスク等の欠陥修正装置
JP2013234969A (ja) * 2012-05-11 2013-11-21 Hitachi High-Technologies Corp 検査装置
JP2015121503A (ja) * 2013-12-25 2015-07-02 新東エスプレシジョン株式会社 検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64742A (en) * 1987-03-24 1989-01-05 Tokyo Electron Ltd Probing device
JPH0313946A (ja) * 1989-06-12 1991-01-22 Dainippon Printing Co Ltd エマルジョンマスク等の欠陥修正装置
JP2013234969A (ja) * 2012-05-11 2013-11-21 Hitachi High-Technologies Corp 検査装置
JP2015121503A (ja) * 2013-12-25 2015-07-02 新東エスプレシジョン株式会社 検査装置

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