JPS62146265A - 気相化学蒸着装置 - Google Patents

気相化学蒸着装置

Info

Publication number
JPS62146265A
JPS62146265A JP60286055A JP28605585A JPS62146265A JP S62146265 A JPS62146265 A JP S62146265A JP 60286055 A JP60286055 A JP 60286055A JP 28605585 A JP28605585 A JP 28605585A JP S62146265 A JPS62146265 A JP S62146265A
Authority
JP
Japan
Prior art keywords
phase chemical
manifold
vapor deposition
chemical vapor
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60286055A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548307B2 (enrdf_load_stackoverflow
Inventor
Kazufumi Ogawa
一文 小川
Yoshiko Mino
美濃　美子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60286055A priority Critical patent/JPS62146265A/ja
Publication of JPS62146265A publication Critical patent/JPS62146265A/ja
Publication of JPH0548307B2 publication Critical patent/JPH0548307B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP60286055A 1985-12-19 1985-12-19 気相化学蒸着装置 Granted JPS62146265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60286055A JPS62146265A (ja) 1985-12-19 1985-12-19 気相化学蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60286055A JPS62146265A (ja) 1985-12-19 1985-12-19 気相化学蒸着装置

Publications (2)

Publication Number Publication Date
JPS62146265A true JPS62146265A (ja) 1987-06-30
JPH0548307B2 JPH0548307B2 (enrdf_load_stackoverflow) 1993-07-21

Family

ID=17699371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60286055A Granted JPS62146265A (ja) 1985-12-19 1985-12-19 気相化学蒸着装置

Country Status (1)

Country Link
JP (1) JPS62146265A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01145807A (ja) * 1987-12-01 1989-06-07 Toshiba Ceramics Co Ltd ウェーハ熱処理用治具
US5221201A (en) * 1990-07-27 1993-06-22 Tokyo Electron Sagami Limited Vertical heat treatment apparatus
JPH06173010A (ja) * 1992-11-30 1994-06-21 Nippon Ee S M Kk 熱処理装置
JP2002060947A (ja) * 2000-07-07 2002-02-28 Asm Internatl Nv 原子層のｃｖｄ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871783A (enrdf_load_stackoverflow) * 1971-12-29 1973-09-28
JPS54160172A (en) * 1978-06-09 1979-12-18 Hitachi Ltd Manufacture of semiconductor device and cvd device used for the said manufacture
JPS59151419A (ja) * 1983-02-18 1984-08-29 Hitachi Electronics Eng Co Ltd 反応処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871783A (enrdf_load_stackoverflow) * 1971-12-29 1973-09-28
JPS54160172A (en) * 1978-06-09 1979-12-18 Hitachi Ltd Manufacture of semiconductor device and cvd device used for the said manufacture
JPS59151419A (ja) * 1983-02-18 1984-08-29 Hitachi Electronics Eng Co Ltd 反応処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01145807A (ja) * 1987-12-01 1989-06-07 Toshiba Ceramics Co Ltd ウェーハ熱処理用治具
US5221201A (en) * 1990-07-27 1993-06-22 Tokyo Electron Sagami Limited Vertical heat treatment apparatus
JPH06173010A (ja) * 1992-11-30 1994-06-21 Nippon Ee S M Kk 熱処理装置
JP2002060947A (ja) * 2000-07-07 2002-02-28 Asm Internatl Nv 原子層のｃｖｄ

Also Published As

Publication number Publication date
JPH0548307B2 (enrdf_load_stackoverflow) 1993-07-21

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