JPS62130534A - 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置 - Google Patents

縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置

Info

Publication number
JPS62130534A
JPS62130534A JP26951885A JP26951885A JPS62130534A JP S62130534 A JPS62130534 A JP S62130534A JP 26951885 A JP26951885 A JP 26951885A JP 26951885 A JP26951885 A JP 26951885A JP S62130534 A JPS62130534 A JP S62130534A
Authority
JP
Japan
Prior art keywords
wafer
boat
cassette
support
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26951885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513379B2 (enrdf_load_stackoverflow
Inventor
Takatoshi Ono
小野　喬利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DEISUKO SAIYAA JAPAN KK
Original Assignee
DEISUKO SAIYAA JAPAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DEISUKO SAIYAA JAPAN KK filed Critical DEISUKO SAIYAA JAPAN KK
Priority to JP26951885A priority Critical patent/JPS62130534A/ja
Publication of JPS62130534A publication Critical patent/JPS62130534A/ja
Publication of JPH0513379B2 publication Critical patent/JPH0513379B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
JP26951885A 1985-12-02 1985-12-02 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置 Granted JPS62130534A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26951885A JPS62130534A (ja) 1985-12-02 1985-12-02 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26951885A JPS62130534A (ja) 1985-12-02 1985-12-02 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS62130534A true JPS62130534A (ja) 1987-06-12
JPH0513379B2 JPH0513379B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=17473513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26951885A Granted JPS62130534A (ja) 1985-12-02 1985-12-02 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS62130534A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01117022A (ja) * 1987-10-29 1989-05-09 Toshiba Ceramics Co Ltd 半導体ウェーハの縦型熱処理装置
JPH01230243A (ja) * 1988-03-10 1989-09-13 Tel Sagami Ltd 縦型熱処理装置用移送装置
JPH01257346A (ja) * 1987-12-12 1989-10-13 Tel Sagami Ltd 半導体ウエハー処理装置
JPH03125453A (ja) * 1989-10-09 1991-05-28 Toshiba Corp 半導体ウエハ移送装置
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165317A (en) * 1980-05-26 1981-12-18 Fujitsu Ltd Manufacture of semiconductor device
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165317A (en) * 1980-05-26 1981-12-18 Fujitsu Ltd Manufacture of semiconductor device
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01117022A (ja) * 1987-10-29 1989-05-09 Toshiba Ceramics Co Ltd 半導体ウェーハの縦型熱処理装置
JPH01257346A (ja) * 1987-12-12 1989-10-13 Tel Sagami Ltd 半導体ウエハー処理装置
JPH01230243A (ja) * 1988-03-10 1989-09-13 Tel Sagami Ltd 縦型熱処理装置用移送装置
JPH03125453A (ja) * 1989-10-09 1991-05-28 Toshiba Corp 半導体ウエハ移送装置
US6579052B1 (en) * 1997-07-11 2003-06-17 Asyst Technologies, Inc. SMIF pod storage, delivery and retrieval system

Also Published As

Publication number Publication date
JPH0513379B2 (enrdf_load_stackoverflow) 1993-02-22

Similar Documents

Publication Publication Date Title
JPH0617295Y2 (ja) 基板受け渡し装置
US5033038A (en) Automatic disk exchange device
TWI390661B (zh) 承載介面裝置
US4806057A (en) Automatic wafer loading method and apparatus
TW452565B (en) Cassette transfer mechanism
JP2000503478A (ja) 二重基板ホルダを有する基板搬送装置
WO2000069761A9 (en) Cassette buffering within a minienvironment
JP2000124301A (ja) 容器載置ユニット、容器収納装置、及び処理装置
JP3272729B2 (ja) ウェーハカセットの移送装置
TWI272673B (en) Cutting machine
JPS62130534A (ja) 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置
JP3825232B2 (ja) ウエハ搬送システム及びその搬送方法
JP4100585B2 (ja) 半導体製造装置におけるポッド供給装置
CN219418975U (zh) 一种晶圆料盒自动装载平台装置
JPS63244856A (ja) ウエハボ−トの移送装置
JP2002261150A (ja) 基板処理装置
JP2908161B2 (ja) カセットマガジン
JP4564695B2 (ja) ウェーハカセット並びに半導体ウェーハの搬入方法及び搬出方法
JP2528416B2 (ja) 移載装置
JPH0735393Y2 (ja) 縦型プラズマ処理機のウエハー搬送装置
JP4027526B2 (ja) 基板搬送方法及び基板搬送装置並びに基板搬送アーム
JPH1197505A (ja) 半導体ウエハと保護シートの収納・分別装置、収納方法、分別方法および収納・分別方法
JPH06329209A (ja) 半導体製造装置のウェーハカセット搬送装置
JP2525297B2 (ja) 移載装置
JPH041989B2 (enrdf_load_stackoverflow)