JPS62130285A - 塩化第二鉄エツチング廃液の再生方法 - Google Patents

塩化第二鉄エツチング廃液の再生方法

Info

Publication number
JPS62130285A
JPS62130285A JP26858885A JP26858885A JPS62130285A JP S62130285 A JPS62130285 A JP S62130285A JP 26858885 A JP26858885 A JP 26858885A JP 26858885 A JP26858885 A JP 26858885A JP S62130285 A JPS62130285 A JP S62130285A
Authority
JP
Japan
Prior art keywords
waste liquid
ferric chloride
etching
chloride etching
etching waste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26858885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366908B2 (enExample
Inventor
Yorio Nakaji
中路　順雄
Shoichi Ishihara
石原　正一
Junsuke Oishi
大石　淳介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP26858885A priority Critical patent/JPS62130285A/ja
Publication of JPS62130285A publication Critical patent/JPS62130285A/ja
Publication of JPS6366908B2 publication Critical patent/JPS6366908B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP26858885A 1985-11-29 1985-11-29 塩化第二鉄エツチング廃液の再生方法 Granted JPS62130285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26858885A JPS62130285A (ja) 1985-11-29 1985-11-29 塩化第二鉄エツチング廃液の再生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26858885A JPS62130285A (ja) 1985-11-29 1985-11-29 塩化第二鉄エツチング廃液の再生方法

Publications (2)

Publication Number Publication Date
JPS62130285A true JPS62130285A (ja) 1987-06-12
JPS6366908B2 JPS6366908B2 (enExample) 1988-12-22

Family

ID=17460615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26858885A Granted JPS62130285A (ja) 1985-11-29 1985-11-29 塩化第二鉄エツチング廃液の再生方法

Country Status (1)

Country Link
JP (1) JPS62130285A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020073126A (ko) * 2002-09-05 2002-09-19 서보창 폐염화철 수용액의 환원·제거장치
KR100451052B1 (ko) * 2002-10-22 2004-10-13 엘지마이크론 주식회사 섀도우 마스크 제조용 에칭액의 재생 방법 및 그 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121123A (ja) * 1982-12-24 1984-07-13 Toppan Printing Co Ltd 塩化第二鉄液の再生方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121123A (ja) * 1982-12-24 1984-07-13 Toppan Printing Co Ltd 塩化第二鉄液の再生方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020073126A (ko) * 2002-09-05 2002-09-19 서보창 폐염화철 수용액의 환원·제거장치
KR100451052B1 (ko) * 2002-10-22 2004-10-13 엘지마이크론 주식회사 섀도우 마스크 제조용 에칭액의 재생 방법 및 그 장치

Also Published As

Publication number Publication date
JPS6366908B2 (enExample) 1988-12-22

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