JPS6212663B2 - - Google Patents

Info

Publication number
JPS6212663B2
JPS6212663B2 JP52145262A JP14526277A JPS6212663B2 JP S6212663 B2 JPS6212663 B2 JP S6212663B2 JP 52145262 A JP52145262 A JP 52145262A JP 14526277 A JP14526277 A JP 14526277A JP S6212663 B2 JPS6212663 B2 JP S6212663B2
Authority
JP
Japan
Prior art keywords
silicon nitride
nitride film
oxide film
silicon oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52145262A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5477569A (en
Inventor
Tomio Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP14526277A priority Critical patent/JPS5477569A/ja
Publication of JPS5477569A publication Critical patent/JPS5477569A/ja
Publication of JPS6212663B2 publication Critical patent/JPS6212663B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/019—

Landscapes

  • Weting (AREA)
  • Wire Bonding (AREA)
JP14526277A 1977-12-02 1977-12-02 Production of semiconductor element Granted JPS5477569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14526277A JPS5477569A (en) 1977-12-02 1977-12-02 Production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14526277A JPS5477569A (en) 1977-12-02 1977-12-02 Production of semiconductor element

Publications (2)

Publication Number Publication Date
JPS5477569A JPS5477569A (en) 1979-06-21
JPS6212663B2 true JPS6212663B2 (enExample) 1987-03-19

Family

ID=15381054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14526277A Granted JPS5477569A (en) 1977-12-02 1977-12-02 Production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5477569A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260249A (ja) * 1985-09-09 1987-03-16 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS5477569A (en) 1979-06-21

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