JPS6212624B2 - - Google Patents

Info

Publication number
JPS6212624B2
JPS6212624B2 JP52123481A JP12348177A JPS6212624B2 JP S6212624 B2 JPS6212624 B2 JP S6212624B2 JP 52123481 A JP52123481 A JP 52123481A JP 12348177 A JP12348177 A JP 12348177A JP S6212624 B2 JPS6212624 B2 JP S6212624B2
Authority
JP
Japan
Prior art keywords
scanning
voltage
irradiated
control
monitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52123481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5457862A (en
Inventor
Nobuyoshi Kashu
Shizunori Ooyu
Kanji Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12348177A priority Critical patent/JPS5457862A/ja
Publication of JPS5457862A publication Critical patent/JPS5457862A/ja
Publication of JPS6212624B2 publication Critical patent/JPS6212624B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP12348177A 1977-10-17 1977-10-17 Ion-beam irradiation device Granted JPS5457862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12348177A JPS5457862A (en) 1977-10-17 1977-10-17 Ion-beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12348177A JPS5457862A (en) 1977-10-17 1977-10-17 Ion-beam irradiation device

Publications (2)

Publication Number Publication Date
JPS5457862A JPS5457862A (en) 1979-05-10
JPS6212624B2 true JPS6212624B2 (enrdf_load_stackoverflow) 1987-03-19

Family

ID=14861691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12348177A Granted JPS5457862A (en) 1977-10-17 1977-10-17 Ion-beam irradiation device

Country Status (1)

Country Link
JP (1) JPS5457862A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61250953A (ja) * 1985-04-27 1986-11-08 Jeol Ltd イオンビ−ム描画装置
JPS6212040A (ja) * 1985-07-10 1987-01-21 Ulvac Corp イオン注入装置用ビ−ムセンサ
JP2699170B2 (ja) * 1986-04-09 1998-01-19 イクリプス・イオン・テクノロジー・インコーポレイテッド イオンビーム走査方法および装置
US7683348B2 (en) * 2006-10-11 2010-03-23 Axcelis Technologies, Inc. Sensor for ion implanter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3778626A (en) * 1972-07-28 1973-12-11 Western Electric Co Mechanical scan system for ion implantation
JPS5330633B2 (enrdf_load_stackoverflow) * 1974-06-25 1978-08-28

Also Published As

Publication number Publication date
JPS5457862A (en) 1979-05-10

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