JPH0563895B2 - - Google Patents
Info
- Publication number
- JPH0563895B2 JPH0563895B2 JP58026153A JP2615383A JPH0563895B2 JP H0563895 B2 JPH0563895 B2 JP H0563895B2 JP 58026153 A JP58026153 A JP 58026153A JP 2615383 A JP2615383 A JP 2615383A JP H0563895 B2 JPH0563895 B2 JP H0563895B2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- signal
- charged beam
- sample
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005070 sampling Methods 0.000 claims description 22
- 238000000605 extraction Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58026153A JPS59154731A (ja) | 1983-02-21 | 1983-02-21 | 荷電ビーム偏向装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58026153A JPS59154731A (ja) | 1983-02-21 | 1983-02-21 | 荷電ビーム偏向装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59154731A JPS59154731A (ja) | 1984-09-03 |
| JPH0563895B2 true JPH0563895B2 (enrdf_load_stackoverflow) | 1993-09-13 |
Family
ID=12185585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58026153A Granted JPS59154731A (ja) | 1983-02-21 | 1983-02-21 | 荷電ビーム偏向装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59154731A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160026577A (ko) * | 2014-09-01 | 2016-03-09 | 주식회사 제낙스 | 직물 친화형 이차 전지 배터리 패키지 |
-
1983
- 1983-02-21 JP JP58026153A patent/JPS59154731A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160026577A (ko) * | 2014-09-01 | 2016-03-09 | 주식회사 제낙스 | 직물 친화형 이차 전지 배터리 패키지 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59154731A (ja) | 1984-09-03 |