JPS59154731A - 荷電ビーム偏向装置 - Google Patents

荷電ビーム偏向装置

Info

Publication number
JPS59154731A
JPS59154731A JP58026153A JP2615383A JPS59154731A JP S59154731 A JPS59154731 A JP S59154731A JP 58026153 A JP58026153 A JP 58026153A JP 2615383 A JP2615383 A JP 2615383A JP S59154731 A JPS59154731 A JP S59154731A
Authority
JP
Japan
Prior art keywords
deflection
charged beam
signal
sampling pulse
sampling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58026153A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563895B2 (enrdf_load_stackoverflow
Inventor
Kazushi Yoshimura
和士 吉村
Toshimitsu Hamada
浜田　利満
Tomohiro Kuji
久邇　朝宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58026153A priority Critical patent/JPS59154731A/ja
Publication of JPS59154731A publication Critical patent/JPS59154731A/ja
Publication of JPH0563895B2 publication Critical patent/JPH0563895B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58026153A 1983-02-21 1983-02-21 荷電ビーム偏向装置 Granted JPS59154731A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58026153A JPS59154731A (ja) 1983-02-21 1983-02-21 荷電ビーム偏向装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58026153A JPS59154731A (ja) 1983-02-21 1983-02-21 荷電ビーム偏向装置

Publications (2)

Publication Number Publication Date
JPS59154731A true JPS59154731A (ja) 1984-09-03
JPH0563895B2 JPH0563895B2 (enrdf_load_stackoverflow) 1993-09-13

Family

ID=12185585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58026153A Granted JPS59154731A (ja) 1983-02-21 1983-02-21 荷電ビーム偏向装置

Country Status (1)

Country Link
JP (1) JPS59154731A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101681906B1 (ko) * 2014-09-01 2016-12-02 주식회사 제낙스 직물 친화형 이차 전지 배터리 패키지

Also Published As

Publication number Publication date
JPH0563895B2 (enrdf_load_stackoverflow) 1993-09-13

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