JPH0527215B2 - - Google Patents

Info

Publication number
JPH0527215B2
JPH0527215B2 JP59187498A JP18749884A JPH0527215B2 JP H0527215 B2 JPH0527215 B2 JP H0527215B2 JP 59187498 A JP59187498 A JP 59187498A JP 18749884 A JP18749884 A JP 18749884A JP H0527215 B2 JPH0527215 B2 JP H0527215B2
Authority
JP
Japan
Prior art keywords
magnetic flux
deflection coil
current
scanning
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59187498A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166353A (ja
Inventor
Nobuyuki Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP59187498A priority Critical patent/JPS6166353A/ja
Publication of JPS6166353A publication Critical patent/JPS6166353A/ja
Publication of JPH0527215B2 publication Critical patent/JPH0527215B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59187498A 1984-09-07 1984-09-07 走査像の補正方法 Granted JPS6166353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59187498A JPS6166353A (ja) 1984-09-07 1984-09-07 走査像の補正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59187498A JPS6166353A (ja) 1984-09-07 1984-09-07 走査像の補正方法

Publications (2)

Publication Number Publication Date
JPS6166353A JPS6166353A (ja) 1986-04-05
JPH0527215B2 true JPH0527215B2 (enrdf_load_stackoverflow) 1993-04-20

Family

ID=16207111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59187498A Granted JPS6166353A (ja) 1984-09-07 1984-09-07 走査像の補正方法

Country Status (1)

Country Link
JP (1) JPS6166353A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006107870A (ja) * 2004-10-04 2006-04-20 Jeol Ltd 分析走査電子顕微鏡

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS534768Y2 (enrdf_load_stackoverflow) * 1973-08-16 1978-02-06

Also Published As

Publication number Publication date
JPS6166353A (ja) 1986-04-05

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