JPS6166353A - 走査像の補正方法 - Google Patents

走査像の補正方法

Info

Publication number
JPS6166353A
JPS6166353A JP59187498A JP18749884A JPS6166353A JP S6166353 A JPS6166353 A JP S6166353A JP 59187498 A JP59187498 A JP 59187498A JP 18749884 A JP18749884 A JP 18749884A JP S6166353 A JPS6166353 A JP S6166353A
Authority
JP
Japan
Prior art keywords
scanning
current
eddy currents
deflection coil
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59187498A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527215B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Kobayashi
伸之 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP59187498A priority Critical patent/JPS6166353A/ja
Publication of JPS6166353A publication Critical patent/JPS6166353A/ja
Publication of JPH0527215B2 publication Critical patent/JPH0527215B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59187498A 1984-09-07 1984-09-07 走査像の補正方法 Granted JPS6166353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59187498A JPS6166353A (ja) 1984-09-07 1984-09-07 走査像の補正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59187498A JPS6166353A (ja) 1984-09-07 1984-09-07 走査像の補正方法

Publications (2)

Publication Number Publication Date
JPS6166353A true JPS6166353A (ja) 1986-04-05
JPH0527215B2 JPH0527215B2 (enrdf_load_stackoverflow) 1993-04-20

Family

ID=16207111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59187498A Granted JPS6166353A (ja) 1984-09-07 1984-09-07 走査像の補正方法

Country Status (1)

Country Link
JP (1) JPS6166353A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006107870A (ja) * 2004-10-04 2006-04-20 Jeol Ltd 分析走査電子顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5042652U (enrdf_load_stackoverflow) * 1973-08-16 1975-04-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5042652U (enrdf_load_stackoverflow) * 1973-08-16 1975-04-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006107870A (ja) * 2004-10-04 2006-04-20 Jeol Ltd 分析走査電子顕微鏡

Also Published As

Publication number Publication date
JPH0527215B2 (enrdf_load_stackoverflow) 1993-04-20

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