JPH0563898B2 - - Google Patents
Info
- Publication number
- JPH0563898B2 JPH0563898B2 JP29534186A JP29534186A JPH0563898B2 JP H0563898 B2 JPH0563898 B2 JP H0563898B2 JP 29534186 A JP29534186 A JP 29534186A JP 29534186 A JP29534186 A JP 29534186A JP H0563898 B2 JPH0563898 B2 JP H0563898B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- deflection
- ion beam
- deflected
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 56
- 150000002500 ions Chemical class 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 239000007943 implant Substances 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29534186A JPS63148526A (ja) | 1986-12-10 | 1986-12-10 | イオンビーム注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29534186A JPS63148526A (ja) | 1986-12-10 | 1986-12-10 | イオンビーム注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63148526A JPS63148526A (ja) | 1988-06-21 |
| JPH0563898B2 true JPH0563898B2 (enrdf_load_stackoverflow) | 1993-09-13 |
Family
ID=17819359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29534186A Granted JPS63148526A (ja) | 1986-12-10 | 1986-12-10 | イオンビーム注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148526A (enrdf_load_stackoverflow) |
-
1986
- 1986-12-10 JP JP29534186A patent/JPS63148526A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63148526A (ja) | 1988-06-21 |
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