JPS63148526A - イオンビーム注入装置 - Google Patents
イオンビーム注入装置Info
- Publication number
- JPS63148526A JPS63148526A JP29534186A JP29534186A JPS63148526A JP S63148526 A JPS63148526 A JP S63148526A JP 29534186 A JP29534186 A JP 29534186A JP 29534186 A JP29534186 A JP 29534186A JP S63148526 A JPS63148526 A JP S63148526A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ion beam
- deflection
- redeflecting
- deflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 title claims abstract description 69
- 150000002500 ions Chemical class 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000002513 implantation Methods 0.000 description 5
- 239000007943 implant Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004949 mass spectrometry Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 241000981595 Zoysia japonica Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29534186A JPS63148526A (ja) | 1986-12-10 | 1986-12-10 | イオンビーム注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29534186A JPS63148526A (ja) | 1986-12-10 | 1986-12-10 | イオンビーム注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63148526A true JPS63148526A (ja) | 1988-06-21 |
| JPH0563898B2 JPH0563898B2 (enrdf_load_stackoverflow) | 1993-09-13 |
Family
ID=17819359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29534186A Granted JPS63148526A (ja) | 1986-12-10 | 1986-12-10 | イオンビーム注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148526A (enrdf_load_stackoverflow) |
-
1986
- 1986-12-10 JP JP29534186A patent/JPS63148526A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0563898B2 (enrdf_load_stackoverflow) | 1993-09-13 |
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