JPS62124271A - 溶融物質の蒸気噴出装置 - Google Patents
溶融物質の蒸気噴出装置Info
- Publication number
- JPS62124271A JPS62124271A JP26252485A JP26252485A JPS62124271A JP S62124271 A JPS62124271 A JP S62124271A JP 26252485 A JP26252485 A JP 26252485A JP 26252485 A JP26252485 A JP 26252485A JP S62124271 A JPS62124271 A JP S62124271A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- crucible
- molten material
- vapor
- clusters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012768 molten material Substances 0.000 title claims abstract description 11
- 239000000126 substance Substances 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000010793 Steam injection (oil industry) Methods 0.000 claims 1
- 230000005494 condensation Effects 0.000 claims 1
- 238000009833 condensation Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 5
- 238000009792 diffusion process Methods 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 abstract description 3
- 230000002093 peripheral effect Effects 0.000 abstract 2
- 239000010409 thin film Substances 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26252485A JPS62124271A (ja) | 1985-11-25 | 1985-11-25 | 溶融物質の蒸気噴出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26252485A JPS62124271A (ja) | 1985-11-25 | 1985-11-25 | 溶融物質の蒸気噴出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62124271A true JPS62124271A (ja) | 1987-06-05 |
| JPH0416545B2 JPH0416545B2 (enrdf_load_html_response) | 1992-03-24 |
Family
ID=17376991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26252485A Granted JPS62124271A (ja) | 1985-11-25 | 1985-11-25 | 溶融物質の蒸気噴出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124271A (enrdf_load_html_response) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006111961A (ja) * | 2004-09-17 | 2006-04-27 | Nippon Seiki Co Ltd | 蒸着源装置 |
| JP2007297695A (ja) * | 2006-05-08 | 2007-11-15 | Fujifilm Corp | 真空蒸着用ルツボおよび真空蒸着装置 |
| JP2012087353A (ja) * | 2010-10-19 | 2012-05-10 | Mitsubishi Shindoh Co Ltd | 真空蒸着装置 |
| KR101710063B1 (ko) * | 2016-07-26 | 2017-02-28 | 에스엔유 프리시젼 주식회사 | 열 기상 증착장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57134555A (en) * | 1981-02-10 | 1982-08-19 | Fuji Photo Film Co Ltd | Method and device for forming thin film |
-
1985
- 1985-11-25 JP JP26252485A patent/JPS62124271A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57134555A (en) * | 1981-02-10 | 1982-08-19 | Fuji Photo Film Co Ltd | Method and device for forming thin film |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006111961A (ja) * | 2004-09-17 | 2006-04-27 | Nippon Seiki Co Ltd | 蒸着源装置 |
| JP2007297695A (ja) * | 2006-05-08 | 2007-11-15 | Fujifilm Corp | 真空蒸着用ルツボおよび真空蒸着装置 |
| JP2012087353A (ja) * | 2010-10-19 | 2012-05-10 | Mitsubishi Shindoh Co Ltd | 真空蒸着装置 |
| KR101710063B1 (ko) * | 2016-07-26 | 2017-02-28 | 에스엔유 프리시젼 주식회사 | 열 기상 증착장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416545B2 (enrdf_load_html_response) | 1992-03-24 |
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