JPS62111490A - エキシマレ−ザ装置 - Google Patents

エキシマレ−ザ装置

Info

Publication number
JPS62111490A
JPS62111490A JP60251359A JP25135985A JPS62111490A JP S62111490 A JPS62111490 A JP S62111490A JP 60251359 A JP60251359 A JP 60251359A JP 25135985 A JP25135985 A JP 25135985A JP S62111490 A JPS62111490 A JP S62111490A
Authority
JP
Japan
Prior art keywords
discharge
excimer laser
ionization
main discharge
parabolic reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60251359A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573073B2 (enExample
Inventor
Naoya Horiuchi
直也 堀内
Takuhiro Ono
小野　拓弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60251359A priority Critical patent/JPS62111490A/ja
Publication of JPS62111490A publication Critical patent/JPS62111490A/ja
Publication of JPH0573073B2 publication Critical patent/JPH0573073B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
JP60251359A 1985-11-08 1985-11-08 エキシマレ−ザ装置 Granted JPS62111490A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60251359A JPS62111490A (ja) 1985-11-08 1985-11-08 エキシマレ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60251359A JPS62111490A (ja) 1985-11-08 1985-11-08 エキシマレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS62111490A true JPS62111490A (ja) 1987-05-22
JPH0573073B2 JPH0573073B2 (enExample) 1993-10-13

Family

ID=17221652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60251359A Granted JPS62111490A (ja) 1985-11-08 1985-11-08 エキシマレ−ザ装置

Country Status (1)

Country Link
JP (1) JPS62111490A (enExample)

Also Published As

Publication number Publication date
JPH0573073B2 (enExample) 1993-10-13

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