JPS6211144A - 異物検査装置 - Google Patents

異物検査装置

Info

Publication number
JPS6211144A
JPS6211144A JP14420785A JP14420785A JPS6211144A JP S6211144 A JPS6211144 A JP S6211144A JP 14420785 A JP14420785 A JP 14420785A JP 14420785 A JP14420785 A JP 14420785A JP S6211144 A JPS6211144 A JP S6211144A
Authority
JP
Japan
Prior art keywords
light
polarized
photoelectric conversion
foreign matter
conversion element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14420785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0365862B2 (enrdf_load_stackoverflow
Inventor
Ryoji Nemoto
亮二 根本
Toshiaki Taniuchi
谷内　俊明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP14420785A priority Critical patent/JPS6211144A/ja
Publication of JPS6211144A publication Critical patent/JPS6211144A/ja
Publication of JPH0365862B2 publication Critical patent/JPH0365862B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14420785A 1985-07-01 1985-07-01 異物検査装置 Granted JPS6211144A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14420785A JPS6211144A (ja) 1985-07-01 1985-07-01 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14420785A JPS6211144A (ja) 1985-07-01 1985-07-01 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211144A true JPS6211144A (ja) 1987-01-20
JPH0365862B2 JPH0365862B2 (enrdf_load_stackoverflow) 1991-10-15

Family

ID=15356717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14420785A Granted JPS6211144A (ja) 1985-07-01 1985-07-01 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211144A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129144A (ja) * 1987-11-14 1989-05-22 Horiba Ltd 異物有無検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01129144A (ja) * 1987-11-14 1989-05-22 Horiba Ltd 異物有無検査装置

Also Published As

Publication number Publication date
JPH0365862B2 (enrdf_load_stackoverflow) 1991-10-15

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