JPH0365862B2 - - Google Patents
Info
- Publication number
- JPH0365862B2 JPH0365862B2 JP14420785A JP14420785A JPH0365862B2 JP H0365862 B2 JPH0365862 B2 JP H0365862B2 JP 14420785 A JP14420785 A JP 14420785A JP 14420785 A JP14420785 A JP 14420785A JP H0365862 B2 JPH0365862 B2 JP H0365862B2
- Authority
- JP
- Japan
- Prior art keywords
- polarized
- light
- foreign matter
- conversion element
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 27
- 238000006243 chemical reaction Methods 0.000 claims description 23
- 235000012431 wafers Nutrition 0.000 description 24
- 238000012545 processing Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14420785A JPS6211144A (ja) | 1985-07-01 | 1985-07-01 | 異物検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14420785A JPS6211144A (ja) | 1985-07-01 | 1985-07-01 | 異物検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6211144A JPS6211144A (ja) | 1987-01-20 |
| JPH0365862B2 true JPH0365862B2 (enrdf_load_stackoverflow) | 1991-10-15 |
Family
ID=15356717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14420785A Granted JPS6211144A (ja) | 1985-07-01 | 1985-07-01 | 異物検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211144A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0621879B2 (ja) * | 1987-11-14 | 1994-03-23 | 株式会社堀場製作所 | 異物有無検査装置 |
-
1985
- 1985-07-01 JP JP14420785A patent/JPS6211144A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6211144A (ja) | 1987-01-20 |
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