JPS6211140A - 異物検査装置 - Google Patents

異物検査装置

Info

Publication number
JPS6211140A
JPS6211140A JP60140149A JP14014985A JPS6211140A JP S6211140 A JPS6211140 A JP S6211140A JP 60140149 A JP60140149 A JP 60140149A JP 14014985 A JP14014985 A JP 14014985A JP S6211140 A JPS6211140 A JP S6211140A
Authority
JP
Japan
Prior art keywords
foreign object
foreign
information
specifying
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60140149A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0378928B2 (enrdf_load_stackoverflow
Inventor
Toshiaki Taniuchi
谷内　俊明
Takahiro Ninomiya
二宮　孝浩
Takuro Hosoe
細江　卓朗
Yuzo Tanaka
田中　雄三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60140149A priority Critical patent/JPS6211140A/ja
Publication of JPS6211140A publication Critical patent/JPS6211140A/ja
Publication of JPH0378928B2 publication Critical patent/JPH0378928B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP60140149A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211140A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60140149A JPS6211140A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140149A JPS6211140A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211140A true JPS6211140A (ja) 1987-01-20
JPH0378928B2 JPH0378928B2 (enrdf_load_stackoverflow) 1991-12-17

Family

ID=15262010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60140149A Granted JPS6211140A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211140A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0468141A (ja) * 1990-07-09 1992-03-03 Fujita Corp 鉄骨鉄筋コンクリート造柱、梁接合部の付着破壊防止用梁主筋の定着構造

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5674665A (en) * 1979-11-26 1981-06-20 Nec Corp Semiconductor element characteristic testing device
JPS57148928A (en) * 1981-03-09 1982-09-14 Olympus Optical Co Apparatus for controlling leading end of endoscope
JPS6015939A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 異物検査装置
JPS6069513A (ja) * 1983-09-08 1985-04-20 Furuno Electric Co Ltd 航跡記録装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5674665A (en) * 1979-11-26 1981-06-20 Nec Corp Semiconductor element characteristic testing device
JPS57148928A (en) * 1981-03-09 1982-09-14 Olympus Optical Co Apparatus for controlling leading end of endoscope
JPS6015939A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 異物検査装置
JPS6069513A (ja) * 1983-09-08 1985-04-20 Furuno Electric Co Ltd 航跡記録装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0468141A (ja) * 1990-07-09 1992-03-03 Fujita Corp 鉄骨鉄筋コンクリート造柱、梁接合部の付着破壊防止用梁主筋の定着構造

Also Published As

Publication number Publication date
JPH0378928B2 (enrdf_load_stackoverflow) 1991-12-17

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