JPS62107312A - 位置決めテ−ブル - Google Patents

位置決めテ−ブル

Info

Publication number
JPS62107312A
JPS62107312A JP60247415A JP24741585A JPS62107312A JP S62107312 A JPS62107312 A JP S62107312A JP 60247415 A JP60247415 A JP 60247415A JP 24741585 A JP24741585 A JP 24741585A JP S62107312 A JPS62107312 A JP S62107312A
Authority
JP
Japan
Prior art keywords
upper table
wedge block
positioning
rollers
contact surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60247415A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481211B2 (https=
Inventor
Mamoru Inoue
守 井上
Masaki Suzuki
正樹 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60247415A priority Critical patent/JPS62107312A/ja
Publication of JPS62107312A publication Critical patent/JPS62107312A/ja
Publication of JPH0481211B2 publication Critical patent/JPH0481211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
JP60247415A 1985-11-05 1985-11-05 位置決めテ−ブル Granted JPS62107312A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60247415A JPS62107312A (ja) 1985-11-05 1985-11-05 位置決めテ−ブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60247415A JPS62107312A (ja) 1985-11-05 1985-11-05 位置決めテ−ブル

Publications (2)

Publication Number Publication Date
JPS62107312A true JPS62107312A (ja) 1987-05-18
JPH0481211B2 JPH0481211B2 (https=) 1992-12-22

Family

ID=17163093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60247415A Granted JPS62107312A (ja) 1985-11-05 1985-11-05 位置決めテ−ブル

Country Status (1)

Country Link
JP (1) JPS62107312A (https=)

Also Published As

Publication number Publication date
JPH0481211B2 (https=) 1992-12-22

Similar Documents

Publication Publication Date Title
US4896869A (en) Moving table apparatus
US20040177520A1 (en) Positioning apparatus
JPH08190430A (ja) 位置決めテーブル
JPH02178947A (ja) 半導体ウェーハのノッチ合わせ機構
JPS62107312A (ja) 位置決めテ−ブル
JPWO2007055339A1 (ja) 三次元位置決めテーブル
CN211403121U (zh) 功率放大器芯片生产用接触式光刻机
CN120319672B (zh) 半导体材料键合平台和半导体材料键合设备
JP2000312463A (ja) リニアモータのレール接続構造
US20020185723A1 (en) Flat-type semiconductor stack
JP3215274B2 (ja) 移動ステージ装置及びその組み立て製造方法
KR102753334B1 (ko) 기판 위치 결정 장치, 기판 위치 결정 방법 및 접합 장치
JP3402172B2 (ja) 導電性ボールの搭載装置および搭載方法
US5956838A (en) IC leadframe processing system
JPH0353193A (ja) 微動zステージ装置
JPS6299038A (ja) 位置決めステ−ジ
JP3166842B2 (ja) ウェーハ面取り装置
JP2819182B2 (ja) 移送装置
JP2602303B2 (ja) 移動テーブル装置
JPH0224033A (ja) Xyテーブル
JPS5939027A (ja) 精密xyステ−ジ
JP3139919B2 (ja) ボンディング装置及びこれに装備される基板加熱装置
CN223244976U (zh) 一种晶圆旋转式激光直写曝光设备
TWI824765B (zh) 光學設備用移動裝置
CN223728130U (zh) 一种用于集成电路芯片制造的光刻对准装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term