JPS62106642A - ウェハリングの供給・返送方法 - Google Patents

ウェハリングの供給・返送方法

Info

Publication number
JPS62106642A
JPS62106642A JP24626385A JP24626385A JPS62106642A JP S62106642 A JPS62106642 A JP S62106642A JP 24626385 A JP24626385 A JP 24626385A JP 24626385 A JP24626385 A JP 24626385A JP S62106642 A JPS62106642 A JP S62106642A
Authority
JP
Japan
Prior art keywords
wafer ring
wafer
cassette
storage section
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24626385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543184B2 (enrdf_load_stackoverflow
Inventor
Hisaya Suzuki
鈴木　久彌
Makoto Arie
誠 有江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Original Assignee
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Seiki Co Ltd filed Critical Toshiba Seiki Co Ltd
Priority to JP24626385A priority Critical patent/JPS62106642A/ja
Publication of JPS62106642A publication Critical patent/JPS62106642A/ja
Publication of JPH0543184B2 publication Critical patent/JPH0543184B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • De-Stacking Of Articles (AREA)
  • Die Bonding (AREA)
JP24626385A 1985-11-05 1985-11-05 ウェハリングの供給・返送方法 Granted JPS62106642A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24626385A JPS62106642A (ja) 1985-11-05 1985-11-05 ウェハリングの供給・返送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24626385A JPS62106642A (ja) 1985-11-05 1985-11-05 ウェハリングの供給・返送方法

Publications (2)

Publication Number Publication Date
JPS62106642A true JPS62106642A (ja) 1987-05-18
JPH0543184B2 JPH0543184B2 (enrdf_load_stackoverflow) 1993-06-30

Family

ID=17145917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24626385A Granted JPS62106642A (ja) 1985-11-05 1985-11-05 ウェハリングの供給・返送方法

Country Status (1)

Country Link
JP (1) JPS62106642A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5556248A (en) * 1993-01-14 1996-09-17 Applied Materials, Inc. Semiconductor wafer cassette transfer system
US5725728A (en) * 1995-09-18 1998-03-10 Kabushiki Kaisha Shinkawa Pellet pick-up device
US5824185A (en) * 1995-08-18 1998-10-20 Kabushiki Kaisha Shinkawa Wafer ring supply and return device
US5853532A (en) * 1995-08-18 1998-12-29 Kabushiki Kaisha Shinkawa Wafer ring supply and return device
US6062795A (en) * 1996-10-01 2000-05-16 Kabushiki Kaisha Shinkawa Wafer ring feeding apparatus
KR20180021492A (ko) * 2016-08-22 2018-03-05 세메스 주식회사 웨이퍼링 이송 장치

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5556248A (en) * 1993-01-14 1996-09-17 Applied Materials, Inc. Semiconductor wafer cassette transfer system
US5824185A (en) * 1995-08-18 1998-10-20 Kabushiki Kaisha Shinkawa Wafer ring supply and return device
US5853532A (en) * 1995-08-18 1998-12-29 Kabushiki Kaisha Shinkawa Wafer ring supply and return device
US5725728A (en) * 1995-09-18 1998-03-10 Kabushiki Kaisha Shinkawa Pellet pick-up device
US6062795A (en) * 1996-10-01 2000-05-16 Kabushiki Kaisha Shinkawa Wafer ring feeding apparatus
KR20180021492A (ko) * 2016-08-22 2018-03-05 세메스 주식회사 웨이퍼링 이송 장치

Also Published As

Publication number Publication date
JPH0543184B2 (enrdf_load_stackoverflow) 1993-06-30

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