JPS62104440U - - Google Patents

Info

Publication number
JPS62104440U
JPS62104440U JP13648185U JP13648185U JPS62104440U JP S62104440 U JPS62104440 U JP S62104440U JP 13648185 U JP13648185 U JP 13648185U JP 13648185 U JP13648185 U JP 13648185U JP S62104440 U JPS62104440 U JP S62104440U
Authority
JP
Japan
Prior art keywords
pattern surface
pattern
light source
reticle mask
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13648185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322904Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985136481U priority Critical patent/JPH0322904Y2/ja
Publication of JPS62104440U publication Critical patent/JPS62104440U/ja
Application granted granted Critical
Publication of JPH0322904Y2 publication Critical patent/JPH0322904Y2/ja
Expired legal-status Critical Current

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Landscapes

  • ing And Chemical Polishing (AREA)
JP1985136481U 1985-09-06 1985-09-06 Expired JPH0322904Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985136481U JPH0322904Y2 (enrdf_load_stackoverflow) 1985-09-06 1985-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985136481U JPH0322904Y2 (enrdf_load_stackoverflow) 1985-09-06 1985-09-06

Publications (2)

Publication Number Publication Date
JPS62104440U true JPS62104440U (enrdf_load_stackoverflow) 1987-07-03
JPH0322904Y2 JPH0322904Y2 (enrdf_load_stackoverflow) 1991-05-20

Family

ID=31039635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985136481U Expired JPH0322904Y2 (enrdf_load_stackoverflow) 1985-09-06 1985-09-06

Country Status (1)

Country Link
JP (1) JPH0322904Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461733A (en) * 1987-09-01 1989-03-08 Mitsubishi Electric Corp Manufacture of matrix type display device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS55140838A (en) * 1979-04-23 1980-11-04 Hitachi Ltd Mask preparing apparatus
JPS55165629A (en) * 1979-06-11 1980-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58419U (ja) * 1981-06-25 1983-01-05 富士通株式会社 レチクル

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS55140838A (en) * 1979-04-23 1980-11-04 Hitachi Ltd Mask preparing apparatus
JPS55165629A (en) * 1979-06-11 1980-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS58419U (ja) * 1981-06-25 1983-01-05 富士通株式会社 レチクル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461733A (en) * 1987-09-01 1989-03-08 Mitsubishi Electric Corp Manufacture of matrix type display device

Also Published As

Publication number Publication date
JPH0322904Y2 (enrdf_load_stackoverflow) 1991-05-20

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