JPS62102935A - 微小変位装置 - Google Patents

微小変位装置

Info

Publication number
JPS62102935A
JPS62102935A JP24335885A JP24335885A JPS62102935A JP S62102935 A JPS62102935 A JP S62102935A JP 24335885 A JP24335885 A JP 24335885A JP 24335885 A JP24335885 A JP 24335885A JP S62102935 A JPS62102935 A JP S62102935A
Authority
JP
Japan
Prior art keywords
parts
spring
support body
actuator
upper piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24335885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521697B2 (enrdf_load_stackoverflow
Inventor
Tomoji Sekiya
関谷　智司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24335885A priority Critical patent/JPS62102935A/ja
Publication of JPS62102935A publication Critical patent/JPS62102935A/ja
Publication of JPH0521697B2 publication Critical patent/JPH0521697B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
JP24335885A 1985-10-30 1985-10-30 微小変位装置 Granted JPS62102935A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24335885A JPS62102935A (ja) 1985-10-30 1985-10-30 微小変位装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24335885A JPS62102935A (ja) 1985-10-30 1985-10-30 微小変位装置

Publications (2)

Publication Number Publication Date
JPS62102935A true JPS62102935A (ja) 1987-05-13
JPH0521697B2 JPH0521697B2 (enrdf_load_stackoverflow) 1993-03-25

Family

ID=17102646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24335885A Granted JPS62102935A (ja) 1985-10-30 1985-10-30 微小変位装置

Country Status (1)

Country Link
JP (1) JPS62102935A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0457662A (ja) * 1990-06-25 1992-02-25 Iwakura Seiki Kogyo Kk 石材研磨機
JP2009274196A (ja) * 2008-05-19 2009-11-26 Olympus Corp 移動ステージ装置
JP2022061634A (ja) * 2020-10-07 2022-04-19 株式会社ディスコ 微調整装置、加工装置及び被加工物の加工方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0457662A (ja) * 1990-06-25 1992-02-25 Iwakura Seiki Kogyo Kk 石材研磨機
JP2009274196A (ja) * 2008-05-19 2009-11-26 Olympus Corp 移動ステージ装置
JP2022061634A (ja) * 2020-10-07 2022-04-19 株式会社ディスコ 微調整装置、加工装置及び被加工物の加工方法

Also Published As

Publication number Publication date
JPH0521697B2 (enrdf_load_stackoverflow) 1993-03-25

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