JPS6197159A - 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法 - Google Patents

圧電体薄膜製造用溶液及び圧電体薄膜の製造方法

Info

Publication number
JPS6197159A
JPS6197159A JP59217780A JP21778084A JPS6197159A JP S6197159 A JPS6197159 A JP S6197159A JP 59217780 A JP59217780 A JP 59217780A JP 21778084 A JP21778084 A JP 21778084A JP S6197159 A JPS6197159 A JP S6197159A
Authority
JP
Japan
Prior art keywords
thin film
solution
organometallic compound
piezoelectric thin
metals selected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59217780A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0414516B2 (esLanguage
Inventor
勉 七尾
江口　民行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP59217780A priority Critical patent/JPS6197159A/ja
Publication of JPS6197159A publication Critical patent/JPS6197159A/ja
Publication of JPH0414516B2 publication Critical patent/JPH0414516B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Chemically Coating (AREA)
JP59217780A 1984-10-17 1984-10-17 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法 Granted JPS6197159A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59217780A JPS6197159A (ja) 1984-10-17 1984-10-17 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59217780A JPS6197159A (ja) 1984-10-17 1984-10-17 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6197159A true JPS6197159A (ja) 1986-05-15
JPH0414516B2 JPH0414516B2 (esLanguage) 1992-03-13

Family

ID=16709611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59217780A Granted JPS6197159A (ja) 1984-10-17 1984-10-17 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6197159A (esLanguage)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220380A (ja) * 1988-02-12 1989-09-04 Gebr Sulzer Ag 光電気化学電池・その製法及び使用法
JPH0412678A (ja) * 1990-05-01 1992-01-17 Ngk Insulators Ltd 圧電／電歪膜型アクチュエータの製造方法
US5393907A (en) * 1992-03-24 1995-02-28 Tokyo Ohka Kogyo Co., Ltd. Coating solution for forming composite metal oxide film and process for making same
US5840615A (en) * 1993-04-16 1998-11-24 Texas Instruments Incorporated Method for forming a ferroelectric material film by the sol-gel method, along with a process for a production of a capacitor and its raw material solution
JP2007126354A (ja) * 2005-10-04 2007-05-24 Samsung Electro Mech Co Ltd 高誘電性薄膜用コーティング溶液及びこれを用いた誘電薄膜の製造方法、並びにこの製造方法により製造される誘電薄膜およびこの誘電薄膜を含むエンベッディドキャパシタ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220380A (ja) * 1988-02-12 1989-09-04 Gebr Sulzer Ag 光電気化学電池・その製法及び使用法
JPH0412678A (ja) * 1990-05-01 1992-01-17 Ngk Insulators Ltd 圧電／電歪膜型アクチュエータの製造方法
US5393907A (en) * 1992-03-24 1995-02-28 Tokyo Ohka Kogyo Co., Ltd. Coating solution for forming composite metal oxide film and process for making same
US5840615A (en) * 1993-04-16 1998-11-24 Texas Instruments Incorporated Method for forming a ferroelectric material film by the sol-gel method, along with a process for a production of a capacitor and its raw material solution
JP2007126354A (ja) * 2005-10-04 2007-05-24 Samsung Electro Mech Co Ltd 高誘電性薄膜用コーティング溶液及びこれを用いた誘電薄膜の製造方法、並びにこの製造方法により製造される誘電薄膜およびこの誘電薄膜を含むエンベッディドキャパシタ

Also Published As

Publication number Publication date
JPH0414516B2 (esLanguage) 1992-03-13

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