JPH0414516B2 - - Google Patents
Info
- Publication number
- JPH0414516B2 JPH0414516B2 JP21778084A JP21778084A JPH0414516B2 JP H0414516 B2 JPH0414516 B2 JP H0414516B2 JP 21778084 A JP21778084 A JP 21778084A JP 21778084 A JP21778084 A JP 21778084A JP H0414516 B2 JPH0414516 B2 JP H0414516B2
- Authority
- JP
- Japan
- Prior art keywords
- organometallic compound
- thin film
- diketone
- group
- metals selected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59217780A JPS6197159A (ja) | 1984-10-17 | 1984-10-17 | 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59217780A JPS6197159A (ja) | 1984-10-17 | 1984-10-17 | 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197159A JPS6197159A (ja) | 1986-05-15 |
| JPH0414516B2 true JPH0414516B2 (esLanguage) | 1992-03-13 |
Family
ID=16709611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59217780A Granted JPS6197159A (ja) | 1984-10-17 | 1984-10-17 | 圧電体薄膜製造用溶液及び圧電体薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197159A (esLanguage) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH674596A5 (esLanguage) * | 1988-02-12 | 1990-06-15 | Sulzer Ag | |
| JPH07108102B2 (ja) * | 1990-05-01 | 1995-11-15 | 日本碍子株式会社 | 圧電／電歪膜型アクチュエータの製造方法 |
| US5393907A (en) * | 1992-03-24 | 1995-02-28 | Tokyo Ohka Kogyo Co., Ltd. | Coating solution for forming composite metal oxide film and process for making same |
| JPH06305713A (ja) * | 1993-04-16 | 1994-11-01 | Texas Instr Japan Ltd | ゾルーゲル法による強誘電体膜の形成方法及びキャパシタの製造方法、及びその原料溶液 |
| KR100638890B1 (ko) * | 2005-10-04 | 2006-10-27 | 삼성전기주식회사 | 고유전성 박막용 코팅용액 및 이를 이용한 유전박막의제조방법 |
-
1984
- 1984-10-17 JP JP59217780A patent/JPS6197159A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6197159A (ja) | 1986-05-15 |
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