JPS6195788A - 光磁気記録薄膜形成用複合ターゲット材 - Google Patents

光磁気記録薄膜形成用複合ターゲット材

Info

Publication number
JPS6195788A
JPS6195788A JP59217538A JP21753884A JPS6195788A JP S6195788 A JPS6195788 A JP S6195788A JP 59217538 A JP59217538 A JP 59217538A JP 21753884 A JP21753884 A JP 21753884A JP S6195788 A JPS6195788 A JP S6195788A
Authority
JP
Japan
Prior art keywords
target material
metal material
rare earth
transition metal
earth metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59217538A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459075B2 (enExample
Inventor
Kenichi Hijikata
土方　研一
Kazuyuki Sato
一幸 佐藤
Hitoshi Maruyama
仁 丸山
Riyouko Furuhashi
古橋　亮子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP59217538A priority Critical patent/JPS6195788A/ja
Publication of JPS6195788A publication Critical patent/JPS6195788A/ja
Publication of JPH0459075B2 publication Critical patent/JPH0459075B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
JP59217538A 1984-10-17 1984-10-17 光磁気記録薄膜形成用複合ターゲット材 Granted JPS6195788A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59217538A JPS6195788A (ja) 1984-10-17 1984-10-17 光磁気記録薄膜形成用複合ターゲット材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59217538A JPS6195788A (ja) 1984-10-17 1984-10-17 光磁気記録薄膜形成用複合ターゲット材

Publications (2)

Publication Number Publication Date
JPS6195788A true JPS6195788A (ja) 1986-05-14
JPH0459075B2 JPH0459075B2 (enExample) 1992-09-21

Family

ID=16705820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59217538A Granted JPS6195788A (ja) 1984-10-17 1984-10-17 光磁気記録薄膜形成用複合ターゲット材

Country Status (1)

Country Link
JP (1) JPS6195788A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186836A (ja) * 1987-01-27 1988-08-02 Mitsubishi Kasei Corp 低酸素希土類元素含有合金の製造方法
JPS63259077A (ja) * 1987-04-16 1988-10-26 Mitsubishi Kasei Corp 合金タ−ゲツト材
JPH01255665A (ja) * 1988-04-05 1989-10-12 Toshiba Corp スパッタリングターゲット
US4957549A (en) * 1987-04-20 1990-09-18 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
JPH0734234A (ja) * 1993-07-15 1995-02-03 Japan Energy Corp モザイクターゲット
US5607780A (en) * 1993-07-30 1997-03-04 Hitachi Metals, Ltd. Target for magneto-optical recording medium and process for production thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983768A (ja) * 1982-11-01 1984-05-15 Sumitomo Electric Ind Ltd 複合タ−ゲツト

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983768A (ja) * 1982-11-01 1984-05-15 Sumitomo Electric Ind Ltd 複合タ−ゲツト

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186836A (ja) * 1987-01-27 1988-08-02 Mitsubishi Kasei Corp 低酸素希土類元素含有合金の製造方法
JPS63259077A (ja) * 1987-04-16 1988-10-26 Mitsubishi Kasei Corp 合金タ−ゲツト材
US4957549A (en) * 1987-04-20 1990-09-18 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
US5062885A (en) * 1987-04-20 1991-11-05 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
US5098649A (en) * 1987-04-20 1992-03-24 Hitachi Metals, Ltd. Rare earth metal-iron group metal target, alloy powder therefor and method of producing same
JPH01255665A (ja) * 1988-04-05 1989-10-12 Toshiba Corp スパッタリングターゲット
JPH0734234A (ja) * 1993-07-15 1995-02-03 Japan Energy Corp モザイクターゲット
US5607780A (en) * 1993-07-30 1997-03-04 Hitachi Metals, Ltd. Target for magneto-optical recording medium and process for production thereof

Also Published As

Publication number Publication date
JPH0459075B2 (enExample) 1992-09-21

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