JPS6194707U - - Google Patents

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Publication number
JPS6194707U
JPS6194707U JP17953084U JP17953084U JPS6194707U JP S6194707 U JPS6194707 U JP S6194707U JP 17953084 U JP17953084 U JP 17953084U JP 17953084 U JP17953084 U JP 17953084U JP S6194707 U JPS6194707 U JP S6194707U
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JP
Japan
Prior art keywords
marker
scans
line width
sampling
sample
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17953084U
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English (en)
Japanese (ja)
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JPH0430489Y2 (en:Method
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Publication date
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Priority to JP1984179530U priority Critical patent/JPH0430489Y2/ja
Publication of JPS6194707U publication Critical patent/JPS6194707U/ja
Application granted granted Critical
Publication of JPH0430489Y2 publication Critical patent/JPH0430489Y2/ja
Expired legal-status Critical Current

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  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP1984179530U 1984-11-26 1984-11-26 Expired JPH0430489Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984179530U JPH0430489Y2 (en:Method) 1984-11-26 1984-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984179530U JPH0430489Y2 (en:Method) 1984-11-26 1984-11-26

Publications (2)

Publication Number Publication Date
JPS6194707U true JPS6194707U (en:Method) 1986-06-18
JPH0430489Y2 JPH0430489Y2 (en:Method) 1992-07-23

Family

ID=30737097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984179530U Expired JPH0430489Y2 (en:Method) 1984-11-26 1984-11-26

Country Status (1)

Country Link
JP (1) JPH0430489Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS55151207A (en) * 1979-05-16 1980-11-25 Nippon Telegr & Teleph Corp <Ntt> Detecting method for reference mark position by electron beam exposure
JPS5637501A (en) * 1979-09-03 1981-04-11 Mitsubishi Electric Corp Micropattern measuring method by electron beam
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope
JPS57204406A (en) * 1981-06-12 1982-12-15 Akashi Seisakusho Co Ltd Measuring method of length using scanning-type electronic microscope and its device
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54138467A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Scanning type electron microscope or resembling apparatus
JPS55151207A (en) * 1979-05-16 1980-11-25 Nippon Telegr & Teleph Corp <Ntt> Detecting method for reference mark position by electron beam exposure
JPS5637501A (en) * 1979-09-03 1981-04-11 Mitsubishi Electric Corp Micropattern measuring method by electron beam
JPS5661604A (en) * 1979-10-25 1981-05-27 Jeol Ltd Range finder in scanning electronic microscope
JPS57204406A (en) * 1981-06-12 1982-12-15 Akashi Seisakusho Co Ltd Measuring method of length using scanning-type electronic microscope and its device
JPS58117404A (ja) * 1982-01-05 1983-07-13 Jeol Ltd パタ−ン測定法
JPS59112217A (ja) * 1982-11-29 1984-06-28 Toshiba Corp 寸法測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡

Also Published As

Publication number Publication date
JPH0430489Y2 (en:Method) 1992-07-23

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