JPS6191469A - ダイアフラムを用いたパワ−エレメントの製造方法 - Google Patents

ダイアフラムを用いたパワ−エレメントの製造方法

Info

Publication number
JPS6191469A
JPS6191469A JP59213556A JP21355684A JPS6191469A JP S6191469 A JPS6191469 A JP S6191469A JP 59213556 A JP59213556 A JP 59213556A JP 21355684 A JP21355684 A JP 21355684A JP S6191469 A JPS6191469 A JP S6191469A
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
lid
clearance
upper lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59213556A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0584430B2 (https=
Inventor
荒木　時則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Refrigeration Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Refrigeration Co filed Critical Matsushita Refrigeration Co
Priority to JP59213556A priority Critical patent/JPS6191469A/ja
Publication of JPS6191469A publication Critical patent/JPS6191469A/ja
Publication of JPH0584430B2 publication Critical patent/JPH0584430B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Actuator (AREA)
  • Diaphragms And Bellows (AREA)
JP59213556A 1984-10-11 1984-10-11 ダイアフラムを用いたパワ−エレメントの製造方法 Granted JPS6191469A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59213556A JPS6191469A (ja) 1984-10-11 1984-10-11 ダイアフラムを用いたパワ−エレメントの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59213556A JPS6191469A (ja) 1984-10-11 1984-10-11 ダイアフラムを用いたパワ−エレメントの製造方法

Publications (2)

Publication Number Publication Date
JPS6191469A true JPS6191469A (ja) 1986-05-09
JPH0584430B2 JPH0584430B2 (https=) 1993-12-01

Family

ID=16641160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59213556A Granted JPS6191469A (ja) 1984-10-11 1984-10-11 ダイアフラムを用いたパワ−エレメントの製造方法

Country Status (1)

Country Link
JP (1) JPS6191469A (https=)

Also Published As

Publication number Publication date
JPH0584430B2 (https=) 1993-12-01

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