JPS6190862U - - Google Patents
Info
- Publication number
- JPS6190862U JPS6190862U JP17405284U JP17405284U JPS6190862U JP S6190862 U JPS6190862 U JP S6190862U JP 17405284 U JP17405284 U JP 17405284U JP 17405284 U JP17405284 U JP 17405284U JP S6190862 U JPS6190862 U JP S6190862U
- Authority
- JP
- Japan
- Prior art keywords
- substrate surface
- vapor growth
- commutator
- flow path
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Description
第１図は本考案の気相成長装置の一実施例を示
す断面図、第２図イ，ロ，ハは本考案に用いられ
る整流子の夫々異なる実施例を示す斜視図、第３
図は従来の気相成長装置の断面図である。 １…反応管、２…処理ガス導入管、３…高周波
加熱コイル、４…サセプタ、５…基板、１０，１
０Ａ，１０Ｂ…整流子、１１…操作棒、１２…鋭
角部。
す断面図、第２図イ，ロ，ハは本考案に用いられ
る整流子の夫々異なる実施例を示す斜視図、第３
図は従来の気相成長装置の断面図である。 １…反応管、２…処理ガス導入管、３…高周波
加熱コイル、４…サセプタ、５…基板、１０，１
０Ａ，１０Ｂ…整流子、１１…操作棒、１２…鋭
角部。
Claims (1)
- 基板面に垂直に気相成長ガスを吹き付けて該基
板面上に成膜する気相成長装置において、気相成
長ガス流路の前記基板面より上流に整流子を設け
たことを特徴とする気相成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174052U JPH0329333Y2 (ja) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984174052U JPH0329333Y2 (ja) | 1984-11-16 | 1984-11-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190862U true JPS6190862U (ja) | 1986-06-12 |
| JPH0329333Y2 JPH0329333Y2 (ja) | 1991-06-21 |
Family
ID=30731682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984174052U Expired JPH0329333Y2 (ja) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0329333Y2 (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5136590A (ja) * | 1974-09-24 | 1976-03-27 | Fujitsu Ten Ltd |
-
1984
- 1984-11-16 JP JP1984174052U patent/JPH0329333Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5136590A (ja) * | 1974-09-24 | 1976-03-27 | Fujitsu Ten Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0329333Y2 (ja) | 1991-06-21 |