JPS6188480A - 局所加熱方法及び装置 - Google Patents

局所加熱方法及び装置

Info

Publication number
JPS6188480A
JPS6188480A JP20819584A JP20819584A JPS6188480A JP S6188480 A JPS6188480 A JP S6188480A JP 20819584 A JP20819584 A JP 20819584A JP 20819584 A JP20819584 A JP 20819584A JP S6188480 A JPS6188480 A JP S6188480A
Authority
JP
Japan
Prior art keywords
gas
heating
heated
temperature distribution
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20819584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341952B2 (enrdf_load_stackoverflow
Inventor
勝 坂口
大島　宗夫
旻 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20819584A priority Critical patent/JPS6188480A/ja
Publication of JPS6188480A publication Critical patent/JPS6188480A/ja
Publication of JPH0341952B2 publication Critical patent/JPH0341952B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Furnace Details (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP20819584A 1984-10-05 1984-10-05 局所加熱方法及び装置 Granted JPS6188480A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20819584A JPS6188480A (ja) 1984-10-05 1984-10-05 局所加熱方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20819584A JPS6188480A (ja) 1984-10-05 1984-10-05 局所加熱方法及び装置

Publications (2)

Publication Number Publication Date
JPS6188480A true JPS6188480A (ja) 1986-05-06
JPH0341952B2 JPH0341952B2 (enrdf_load_stackoverflow) 1991-06-25

Family

ID=16552230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20819584A Granted JPS6188480A (ja) 1984-10-05 1984-10-05 局所加熱方法及び装置

Country Status (1)

Country Link
JP (1) JPS6188480A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012146842A (ja) * 2011-01-13 2012-08-02 Sensbey Co Ltd 選択はんだ付け装置および選択はんだ付け方法
US9391488B1 (en) 2014-12-17 2016-07-12 Shinano Kenshi Kabushiki Kaisha Rotary body driving apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012146842A (ja) * 2011-01-13 2012-08-02 Sensbey Co Ltd 選択はんだ付け装置および選択はんだ付け方法
US9391488B1 (en) 2014-12-17 2016-07-12 Shinano Kenshi Kabushiki Kaisha Rotary body driving apparatus

Also Published As

Publication number Publication date
JPH0341952B2 (enrdf_load_stackoverflow) 1991-06-25

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