JPS6180215A - 走査型顕微鏡撮像装置 - Google Patents

走査型顕微鏡撮像装置

Info

Publication number
JPS6180215A
JPS6180215A JP59202019A JP20201984A JPS6180215A JP S6180215 A JPS6180215 A JP S6180215A JP 59202019 A JP59202019 A JP 59202019A JP 20201984 A JP20201984 A JP 20201984A JP S6180215 A JPS6180215 A JP S6180215A
Authority
JP
Japan
Prior art keywords
sample
image sensor
scanning direction
light
main scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59202019A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438325B2 (enrdf_load_stackoverflow
Inventor
Daikichi Awamura
粟村　大吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON JIDO SEIGYO KK
Original Assignee
NIPPON JIDO SEIGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON JIDO SEIGYO KK filed Critical NIPPON JIDO SEIGYO KK
Priority to JP59202019A priority Critical patent/JPS6180215A/ja
Priority to US06/777,342 priority patent/US4736110A/en
Priority to EP85306813A priority patent/EP0176358B1/en
Priority to DE8585306813T priority patent/DE3586383T2/de
Priority to KR1019850007160A priority patent/KR910000617B1/ko
Priority to CA000491791A priority patent/CA1266324A/en
Publication of JPS6180215A publication Critical patent/JPS6180215A/ja
Publication of JPH0438325B2 publication Critical patent/JPH0438325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59202019A 1984-09-28 1984-09-28 走査型顕微鏡撮像装置 Granted JPS6180215A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP59202019A JPS6180215A (ja) 1984-09-28 1984-09-28 走査型顕微鏡撮像装置
US06/777,342 US4736110A (en) 1984-09-28 1985-09-18 Image pick-up apparatus
EP85306813A EP0176358B1 (en) 1984-09-28 1985-09-25 Image pick-up apparatus
DE8585306813T DE3586383T2 (de) 1984-09-28 1985-09-25 Bildaufnahmegeraet.
KR1019850007160A KR910000617B1 (ko) 1984-09-28 1985-09-27 영상 픽업 장치
CA000491791A CA1266324A (en) 1984-09-28 1985-09-27 Image pick-up apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59202019A JPS6180215A (ja) 1984-09-28 1984-09-28 走査型顕微鏡撮像装置

Publications (2)

Publication Number Publication Date
JPS6180215A true JPS6180215A (ja) 1986-04-23
JPH0438325B2 JPH0438325B2 (enrdf_load_stackoverflow) 1992-06-24

Family

ID=16450572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59202019A Granted JPS6180215A (ja) 1984-09-28 1984-09-28 走査型顕微鏡撮像装置

Country Status (1)

Country Link
JP (1) JPS6180215A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237870A (ja) * 1986-04-09 1987-10-17 Les-The- Tec Kk 撮像装置
JPH02207212A (ja) * 1989-02-07 1990-08-16 Sumitomo Cement Co Ltd コヒーレント光走査型光学顕微鏡装置
JPH0321913A (ja) * 1989-06-19 1991-01-30 Tokyo Electron Ltd 走査型顕微鏡装置
JP2001027728A (ja) * 1999-07-15 2001-01-30 Yokogawa Electric Corp 共焦点光スキャナ
JP2005024596A (ja) * 2003-06-30 2005-01-27 Susumu Terakawa 共焦点走査顕微鏡
JP2010025893A (ja) * 2008-07-24 2010-02-04 Canon Inc 検出装置及び方法
JP2012175103A (ja) * 2011-02-18 2012-09-10 Asml Netherlands Bv 光学装置、スキャン方法、リソグラフィ装置及びデバイス製造方法
US10368739B2 (en) 2014-09-12 2019-08-06 Centervue S.P.A. Eye examination apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020134313A (ja) * 2019-02-20 2020-08-31 株式会社デンソー 光検出器

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237870A (ja) * 1986-04-09 1987-10-17 Les-The- Tec Kk 撮像装置
JPH02207212A (ja) * 1989-02-07 1990-08-16 Sumitomo Cement Co Ltd コヒーレント光走査型光学顕微鏡装置
JPH0321913A (ja) * 1989-06-19 1991-01-30 Tokyo Electron Ltd 走査型顕微鏡装置
JP2001027728A (ja) * 1999-07-15 2001-01-30 Yokogawa Electric Corp 共焦点光スキャナ
JP2005024596A (ja) * 2003-06-30 2005-01-27 Susumu Terakawa 共焦点走査顕微鏡
JP2010025893A (ja) * 2008-07-24 2010-02-04 Canon Inc 検出装置及び方法
JP2012175103A (ja) * 2011-02-18 2012-09-10 Asml Netherlands Bv 光学装置、スキャン方法、リソグラフィ装置及びデバイス製造方法
US8593646B2 (en) 2011-02-18 2013-11-26 Asml Netherlands B.V. Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method
US9303978B2 (en) 2011-02-18 2016-04-05 Asml Netherlands B.V. Optical apparatus, method of scanning, lithographic apparatus and device manufacturing method
US10368739B2 (en) 2014-09-12 2019-08-06 Centervue S.P.A. Eye examination apparatus

Also Published As

Publication number Publication date
JPH0438325B2 (enrdf_load_stackoverflow) 1992-06-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees