JPS6177729A - 熱電堆型赤外検出素子の製造方法 - Google Patents

熱電堆型赤外検出素子の製造方法

Info

Publication number
JPS6177729A
JPS6177729A JP59200016A JP20001684A JPS6177729A JP S6177729 A JPS6177729 A JP S6177729A JP 59200016 A JP59200016 A JP 59200016A JP 20001684 A JP20001684 A JP 20001684A JP S6177729 A JPS6177729 A JP S6177729A
Authority
JP
Japan
Prior art keywords
thin film
detection element
infrared detection
manufacturing
type infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59200016A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462014B2 (en, 2012
Inventor
Kunio Nakamura
中村　邦雄
Toyoichi Ozaki
豊一 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59200016A priority Critical patent/JPS6177729A/ja
Publication of JPS6177729A publication Critical patent/JPS6177729A/ja
Publication of JPH0462014B2 publication Critical patent/JPH0462014B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
JP59200016A 1984-09-25 1984-09-25 熱電堆型赤外検出素子の製造方法 Granted JPS6177729A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59200016A JPS6177729A (ja) 1984-09-25 1984-09-25 熱電堆型赤外検出素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59200016A JPS6177729A (ja) 1984-09-25 1984-09-25 熱電堆型赤外検出素子の製造方法

Publications (2)

Publication Number Publication Date
JPS6177729A true JPS6177729A (ja) 1986-04-21
JPH0462014B2 JPH0462014B2 (en, 2012) 1992-10-02

Family

ID=16417397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59200016A Granted JPS6177729A (ja) 1984-09-25 1984-09-25 熱電堆型赤外検出素子の製造方法

Country Status (1)

Country Link
JP (1) JPS6177729A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0476966A (ja) * 1990-07-19 1992-03-11 Anritsu Corp 紫外線センサ
KR20170105409A (ko) * 2016-03-09 2017-09-19 르네사스 일렉트로닉스 가부시키가이샤 반도체 장치, 차지 펌프 회로, 반도체 시스템, 차량 및 반도체 장치의 제어 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120767A (en) * 1975-04-16 1976-10-22 Yoshio Furusawa Stas type film thermocouple radiation detictor and its manufacturing m ethod
JPS52134786A (en) * 1976-05-06 1977-11-11 Fuji Electric Co Ltd Radiation detector
JPS5739338U (en, 2012) * 1980-08-14 1982-03-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120767A (en) * 1975-04-16 1976-10-22 Yoshio Furusawa Stas type film thermocouple radiation detictor and its manufacturing m ethod
JPS52134786A (en) * 1976-05-06 1977-11-11 Fuji Electric Co Ltd Radiation detector
JPS5739338U (en, 2012) * 1980-08-14 1982-03-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0476966A (ja) * 1990-07-19 1992-03-11 Anritsu Corp 紫外線センサ
KR20170105409A (ko) * 2016-03-09 2017-09-19 르네사스 일렉트로닉스 가부시키가이샤 반도체 장치, 차지 펌프 회로, 반도체 시스템, 차량 및 반도체 장치의 제어 방법

Also Published As

Publication number Publication date
JPH0462014B2 (en, 2012) 1992-10-02

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