JPS6171952U - - Google Patents

Info

Publication number
JPS6171952U
JPS6171952U JP15687284U JP15687284U JPS6171952U JP S6171952 U JPS6171952 U JP S6171952U JP 15687284 U JP15687284 U JP 15687284U JP 15687284 U JP15687284 U JP 15687284U JP S6171952 U JPS6171952 U JP S6171952U
Authority
JP
Japan
Prior art keywords
electron beam
electron
electron microscope
bends
current flowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15687284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH04522Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984156872U priority Critical patent/JPH04522Y2/ja
Publication of JPS6171952U publication Critical patent/JPS6171952U/ja
Application granted granted Critical
Publication of JPH04522Y2 publication Critical patent/JPH04522Y2/ja
Expired legal-status Critical Current

Links

JP1984156872U 1984-10-16 1984-10-16 Expired JPH04522Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984156872U JPH04522Y2 (enExample) 1984-10-16 1984-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984156872U JPH04522Y2 (enExample) 1984-10-16 1984-10-16

Publications (2)

Publication Number Publication Date
JPS6171952U true JPS6171952U (enExample) 1986-05-16
JPH04522Y2 JPH04522Y2 (enExample) 1992-01-09

Family

ID=30714878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984156872U Expired JPH04522Y2 (enExample) 1984-10-16 1984-10-16

Country Status (1)

Country Link
JP (1) JPH04522Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577000A (en) * 1978-12-06 1980-06-10 Hitachi Ltd Electron beam radiation device
JPS5957849U (ja) * 1982-10-08 1984-04-16 日本電子株式会社 電子顕微鏡等の試料交換装置
JPS60115468A (ja) * 1983-11-28 1985-06-21 Fuji Xerox Co Ltd プリンタ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577000A (en) * 1978-12-06 1980-06-10 Hitachi Ltd Electron beam radiation device
JPS5957849U (ja) * 1982-10-08 1984-04-16 日本電子株式会社 電子顕微鏡等の試料交換装置
JPS60115468A (ja) * 1983-11-28 1985-06-21 Fuji Xerox Co Ltd プリンタ

Also Published As

Publication number Publication date
JPH04522Y2 (enExample) 1992-01-09

Similar Documents

Publication Publication Date Title
JPS5632655A (en) Electron beam device
JPS614142A (ja) 電子顕微鏡
JPH036615B2 (enExample)
JPS6171952U (enExample)
JP3351647B2 (ja) 走査電子顕微鏡
JPH03134944A (ja) 電子線装置
JPH11135052A (ja) 走査電子顕微鏡
JPS57130354A (en) Electronic optical bodytube
JPH0234750Y2 (enExample)
JPS5919408B2 (ja) 電子顕微鏡
JPH0431728Y2 (enExample)
JPH0227494Y2 (enExample)
JPS6328518Y2 (enExample)
JPS6314810B2 (enExample)
JPS6199960U (enExample)
JPH0227492Y2 (enExample)
JPS6476655A (en) Radiation quantity stabilizing device for electron microscope
JPS61156230U (enExample)
JPS6176673U (enExample)
JPS57111936A (en) Astigmatism correcting device for electron microscope
JPS56152145A (en) Electron microscope
JPH0181858U (enExample)
JP2541931B2 (ja) 収束電子線回折装置
JPH0323617A (ja) イオンビーム描画方法
JPS63182056U (enExample)