JPS61156230U - - Google Patents
Info
- Publication number
- JPS61156230U JPS61156230U JP4009685U JP4009685U JPS61156230U JP S61156230 U JPS61156230 U JP S61156230U JP 4009685 U JP4009685 U JP 4009685U JP 4009685 U JP4009685 U JP 4009685U JP S61156230 U JPS61156230 U JP S61156230U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- blanking
- electron
- control section
- condenser lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 3
- 238000000609 electron-beam lithography Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4009685U JPS61156230U (enExample) | 1985-03-19 | 1985-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4009685U JPS61156230U (enExample) | 1985-03-19 | 1985-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61156230U true JPS61156230U (enExample) | 1986-09-27 |
Family
ID=30548667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4009685U Pending JPS61156230U (enExample) | 1985-03-19 | 1985-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61156230U (enExample) |
-
1985
- 1985-03-19 JP JP4009685U patent/JPS61156230U/ja active Pending
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