JPS61156172U - - Google Patents
Info
- Publication number
- JPS61156172U JPS61156172U JP3878285U JP3878285U JPS61156172U JP S61156172 U JPS61156172 U JP S61156172U JP 3878285 U JP3878285 U JP 3878285U JP 3878285 U JP3878285 U JP 3878285U JP S61156172 U JPS61156172 U JP S61156172U
- Authority
- JP
- Japan
- Prior art keywords
- vertical mechanism
- electron microscope
- scanning electron
- objective lens
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3878285U JPS61156172U (enExample) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3878285U JPS61156172U (enExample) | 1985-03-20 | 1985-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61156172U true JPS61156172U (enExample) | 1986-09-27 |
Family
ID=30546106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3878285U Pending JPS61156172U (enExample) | 1985-03-20 | 1985-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61156172U (enExample) |
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1985
- 1985-03-20 JP JP3878285U patent/JPS61156172U/ja active Pending