JPS6171832A - 原料供給装置 - Google Patents
原料供給装置Info
- Publication number
- JPS6171832A JPS6171832A JP19246184A JP19246184A JPS6171832A JP S6171832 A JPS6171832 A JP S6171832A JP 19246184 A JP19246184 A JP 19246184A JP 19246184 A JP19246184 A JP 19246184A JP S6171832 A JPS6171832 A JP S6171832A
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- material liquid
- liquid
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 title claims description 177
- 239000007789 gas Substances 0.000 claims description 66
- 239000007788 liquid Substances 0.000 claims description 60
- 238000009835 boiling Methods 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 19
- 229910001873 dinitrogen Inorganic materials 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 244000007835 Cyamopsis tetragonoloba Species 0.000 description 2
- 229910006113 GeCl4 Inorganic materials 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 235000019353 potassium silicate Nutrition 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19246184A JPS6171832A (ja) | 1984-09-17 | 1984-09-17 | 原料供給装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19246184A JPS6171832A (ja) | 1984-09-17 | 1984-09-17 | 原料供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6171832A true JPS6171832A (ja) | 1986-04-12 |
JPH0212142B2 JPH0212142B2 (enrdf_load_stackoverflow) | 1990-03-19 |
Family
ID=16291680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19246184A Granted JPS6171832A (ja) | 1984-09-17 | 1984-09-17 | 原料供給装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6171832A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114669244A (zh) * | 2020-12-24 | 2022-06-28 | 中昊晨光化工研究院有限公司 | 加料系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS513737U (enrdf_load_stackoverflow) * | 1974-06-24 | 1976-01-12 | ||
JPS5312758U (enrdf_load_stackoverflow) * | 1976-07-15 | 1978-02-02 | ||
JPS5992933A (ja) * | 1982-11-19 | 1984-05-29 | Sumitomo Electric Ind Ltd | 原料ガス供給装置 |
JPS59127644A (ja) * | 1983-01-06 | 1984-07-23 | Nec Corp | 原料ガス発生制御装置 |
-
1984
- 1984-09-17 JP JP19246184A patent/JPS6171832A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS513737U (enrdf_load_stackoverflow) * | 1974-06-24 | 1976-01-12 | ||
JPS5312758U (enrdf_load_stackoverflow) * | 1976-07-15 | 1978-02-02 | ||
JPS5992933A (ja) * | 1982-11-19 | 1984-05-29 | Sumitomo Electric Ind Ltd | 原料ガス供給装置 |
JPS59127644A (ja) * | 1983-01-06 | 1984-07-23 | Nec Corp | 原料ガス発生制御装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114669244A (zh) * | 2020-12-24 | 2022-06-28 | 中昊晨光化工研究院有限公司 | 加料系统 |
Also Published As
Publication number | Publication date |
---|---|
JPH0212142B2 (enrdf_load_stackoverflow) | 1990-03-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |