JPS6166940U - - Google Patents

Info

Publication number
JPS6166940U
JPS6166940U JP15269484U JP15269484U JPS6166940U JP S6166940 U JPS6166940 U JP S6166940U JP 15269484 U JP15269484 U JP 15269484U JP 15269484 U JP15269484 U JP 15269484U JP S6166940 U JPS6166940 U JP S6166940U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
stage
hole
adhesive tape
stepped part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15269484U
Other languages
English (en)
Other versions
JPH0249712Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15269484U priority Critical patent/JPH0249712Y2/ja
Publication of JPS6166940U publication Critical patent/JPS6166940U/ja
Application granted granted Critical
Publication of JPH0249712Y2 publication Critical patent/JPH0249712Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は本考案の一実施例を示す側
断面図及び平面図、第３図乃至第８図は第１図の
装置の各動作段階での側断面図である。第９図乃
至第１１図は従来の半導体ウエーハ電極強度試験
装置の各動作段階での側断面図である。 ３…半導体ウエーハ、４…粘着テープ、５…第
１ステージ、６…穴、７…段部、８…第２ステー
ジ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 内周面上部に半導体ウエーハの外径、厚さにほ
    ぼ同一の内径、高さを持ち半導体ウエーハを周縁
    部でもつて保持する段部が形成された穴を有する
    第１ステージと、第１ステージの前記穴内に穴の
    軸方向に相対的に上下動可能に配置された第２ス
    テージとを具備し、第１ステージの穴の段部、第
    ２ステージにて支持された半導体ウエーハの上面
    に粘着テープを貼着し、第２ステージを相対下降
    動させて半導体ウエーハ上面から粘着テープを順
    次に剥がすことを特徴とする半導体ウエーハ電極
    強度試験装置。
JP15269484U 1984-10-09 1984-10-09 Expired JPH0249712Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15269484U JPH0249712Y2 (ja) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15269484U JPH0249712Y2 (ja) 1984-10-09 1984-10-09

Publications (2)

Publication Number Publication Date
JPS6166940U true JPS6166940U (ja) 1986-05-08
JPH0249712Y2 JPH0249712Y2 (ja) 1990-12-27

Family

ID=30710747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15269484U Expired JPH0249712Y2 (ja) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPH0249712Y2 (ja)

Also Published As

Publication number Publication date
JPH0249712Y2 (ja) 1990-12-27

Similar Documents

Publication Publication Date Title
JPS6166940U (ja)
JPS61179906U (ja)
JPS6237932U (ja)
JPH02133308U (ja)
JPH0369232U (ja)
JPS6194348U (ja)
JPS63191633U (ja)
JPS63119246U (ja)
JPS61162054U (ja)
JPH031438U (ja)
JPS62122359U (ja)
JPS6280335U (ja)
JPH0195756U (ja)
JPS6134733U (ja) 半導体ウエハ
JPS61106038U (ja)
JPS62130825U (ja)
JPS6429828U (ja)
JPS63164231U (ja)
JPS6312836U (ja)
JPS6181142U (ja)
JPH0180931U (ja)
JPS6153992U (ja)
JPS6186939U (ja)
JPS61146976U (ja)
JPS6397237U (ja)