JPS6156617B2 - - Google Patents

Info

Publication number
JPS6156617B2
JPS6156617B2 JP52038862A JP3886277A JPS6156617B2 JP S6156617 B2 JPS6156617 B2 JP S6156617B2 JP 52038862 A JP52038862 A JP 52038862A JP 3886277 A JP3886277 A JP 3886277A JP S6156617 B2 JPS6156617 B2 JP S6156617B2
Authority
JP
Japan
Prior art keywords
insulating film
groove
mesa
photoresist film
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52038862A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53123657A (en
Inventor
Masatake Saito
Hideyuki Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3886277A priority Critical patent/JPS53123657A/ja
Publication of JPS53123657A publication Critical patent/JPS53123657A/ja
Publication of JPS6156617B2 publication Critical patent/JPS6156617B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
  • Dicing (AREA)
JP3886277A 1977-04-04 1977-04-04 Production of semiconductor unit Granted JPS53123657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3886277A JPS53123657A (en) 1977-04-04 1977-04-04 Production of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3886277A JPS53123657A (en) 1977-04-04 1977-04-04 Production of semiconductor unit

Publications (2)

Publication Number Publication Date
JPS53123657A JPS53123657A (en) 1978-10-28
JPS6156617B2 true JPS6156617B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-12-03

Family

ID=12537004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3886277A Granted JPS53123657A (en) 1977-04-04 1977-04-04 Production of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS53123657A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762536A (en) * 1980-10-01 1982-04-15 Nec Corp Manufacture of semiconductor device
KR940016546A (ko) * 1992-12-23 1994-07-23 프레데릭 얀 스미트 반도체 장치 및 제조방법
JP4590174B2 (ja) * 2003-09-11 2010-12-01 株式会社ディスコ ウエーハの加工方法
JP2006203251A (ja) * 2004-10-07 2006-08-03 Showa Denko Kk 半導体素子の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635025B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-11-02 1981-08-14
JPS5643611B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-03-22 1981-10-14
JPS5629383A (en) * 1979-08-17 1981-03-24 Nippon Telegr & Teleph Corp <Ntt> Manufacture of tunnel-junction type josephson element

Also Published As

Publication number Publication date
JPS53123657A (en) 1978-10-28

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