JPS5762536A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5762536A JPS5762536A JP55137469A JP13746980A JPS5762536A JP S5762536 A JPS5762536 A JP S5762536A JP 55137469 A JP55137469 A JP 55137469A JP 13746980 A JP13746980 A JP 13746980A JP S5762536 A JPS5762536 A JP S5762536A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- protecting
- reliability
- cut
- separated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To improve the damp resisting property, and to ameliorate reliability by a method wherein a semiconductor element is cut and separated into several element, an edge section of an insulating film for protecting the elements is partially heated by laser beams, and a crack formed at the time of division is recrystallized and removed. CONSTITUTION:The insulating film 1 for protecting the semiconductor element severally cut and separated is dissolved partially by locally heating ghe edge sections 2 of the insulating film 1 by using laser beams, and the cracks 3 can be removed. Accordingly, the damp resisting property is improved, and reliability can be ameliorated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55137469A JPS5762536A (en) | 1980-10-01 | 1980-10-01 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55137469A JPS5762536A (en) | 1980-10-01 | 1980-10-01 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5762536A true JPS5762536A (en) | 1982-04-15 |
Family
ID=15199326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55137469A Pending JPS5762536A (en) | 1980-10-01 | 1980-10-01 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5762536A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4825480A (en) * | 1971-08-04 | 1973-04-03 | ||
JPS50118672A (en) * | 1974-03-01 | 1975-09-17 | ||
JPS5354477A (en) * | 1976-10-28 | 1978-05-17 | Seiko Epson Corp | Production of semiconductor device |
JPS53123657A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Production of semiconductor unit |
-
1980
- 1980-10-01 JP JP55137469A patent/JPS5762536A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4825480A (en) * | 1971-08-04 | 1973-04-03 | ||
JPS50118672A (en) * | 1974-03-01 | 1975-09-17 | ||
JPS5354477A (en) * | 1976-10-28 | 1978-05-17 | Seiko Epson Corp | Production of semiconductor device |
JPS53123657A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Production of semiconductor unit |
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