JPS4825480A - - Google Patents
Info
- Publication number
- JPS4825480A JPS4825480A JP5829271A JP5829271A JPS4825480A JP S4825480 A JPS4825480 A JP S4825480A JP 5829271 A JP5829271 A JP 5829271A JP 5829271 A JP5829271 A JP 5829271A JP S4825480 A JPS4825480 A JP S4825480A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5829271A JPS4825480A (en) | 1971-08-04 | 1971-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5829271A JPS4825480A (en) | 1971-08-04 | 1971-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4825480A true JPS4825480A (en) | 1973-04-03 |
Family
ID=13080121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5829271A Pending JPS4825480A (en) | 1971-08-04 | 1971-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4825480A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51150975A (en) * | 1975-06-11 | 1976-12-24 | Ibm | Method of making electronic devices having glassy material layer |
| JPS5321297U (en) * | 1976-07-31 | 1978-02-22 | ||
| JPS5410887A (en) * | 1977-06-23 | 1979-01-26 | Babcock & Wilcox Co | Enclosure for nuclear steam generator |
| JPS5762536A (en) * | 1980-10-01 | 1982-04-15 | Nec Corp | Manufacture of semiconductor device |
| JPS603127A (en) * | 1983-06-21 | 1985-01-09 | Rohm Co Ltd | Manufacture of semiconductor device |
| JPH0443642A (en) * | 1990-06-11 | 1992-02-13 | G T C:Kk | Formation of gate insulating film |
| JPH0497527A (en) * | 1990-08-16 | 1992-03-30 | Applied Materials Japan Kk | Method of preventing precipitation |
| JPH04167431A (en) * | 1990-10-31 | 1992-06-15 | Handotai Process Kenkyusho:Kk | Manufacture of semiconductor device |
| JP2017521865A (en) * | 2014-07-15 | 2017-08-03 | ユ−ジーン テクノロジー カンパニー．リミテッド | Method for depositing an insulating film on a recess having a high aspect ratio |
-
1971
- 1971-08-04 JP JP5829271A patent/JPS4825480A/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51150975A (en) * | 1975-06-11 | 1976-12-24 | Ibm | Method of making electronic devices having glassy material layer |
| JPS557011B2 (en) * | 1975-06-11 | 1980-02-21 | ||
| JPS5321297U (en) * | 1976-07-31 | 1978-02-22 | ||
| JPS5410887A (en) * | 1977-06-23 | 1979-01-26 | Babcock & Wilcox Co | Enclosure for nuclear steam generator |
| JPS5853879B2 (en) * | 1977-06-23 | 1983-12-01 | ザ・バブコツク・アンド・ウイルコツクス・カンパニ− | Nuclear steam generation equipment enclosure |
| JPS5762536A (en) * | 1980-10-01 | 1982-04-15 | Nec Corp | Manufacture of semiconductor device |
| JPS603127A (en) * | 1983-06-21 | 1985-01-09 | Rohm Co Ltd | Manufacture of semiconductor device |
| JPH0443642A (en) * | 1990-06-11 | 1992-02-13 | G T C:Kk | Formation of gate insulating film |
| JPH0497527A (en) * | 1990-08-16 | 1992-03-30 | Applied Materials Japan Kk | Method of preventing precipitation |
| JPH04167431A (en) * | 1990-10-31 | 1992-06-15 | Handotai Process Kenkyusho:Kk | Manufacture of semiconductor device |
| JP2017521865A (en) * | 2014-07-15 | 2017-08-03 | ユ−ジーン テクノロジー カンパニー．リミテッド | Method for depositing an insulating film on a recess having a high aspect ratio |